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    • 9. 发明公开
    • Infrared non-destructive inspection method and apparatus
    • Infrarot-Verfahren und -Vorrichtung zurzerstörungsfreienPrüfung
    • EP2803983A1
    • 2014-11-19
    • EP14166408.6
    • 2014-04-29
    • JTEKT CORPORATION
    • Matsumoto, NaokiYoshida, Kouya
    • G01N25/72
    • G01J5/0896G01J1/42G01N25/72H01L2224/48472H01L2224/73257H01L2224/859
    • In an optical non-destructive inspection method and an optical non-destructive inspection apparatus which can perform inspection accurately in a short time, a measurement object is heated with a laser beam without destroying the measurement object, and a state of the measurement object is determined based on a curve shape of a temperature rise characteristic of the measurement object. In the method and the apparatus, a heating laser beam source (21), at least one infrared detector (31, 32), a control unit (50), and a storage unit (60) are used. The storage unit (60) stores a parameter state-time constant characteristic in which a parameter corresponding to a state of the measurement object is correlated with a time constant indicating the curve shape of the temperature rise characteristic that varies depending on the state of the parameter. The control unit (50) determines the time constant based on the curve shape of the temperature rise characteristic, which extends from a heating start time point to a time point at which a saturated temperature is reached, and determines the state of the parameter of the measurement object based on the determined time constant and the parameter state-time constant characteristic.
    • 在能够在短时间内精确地进行检查的光学非破坏性检查方法和光学非破坏性检查装置中,用激光束加热测量对象而不破坏测量对象,并且确定测量对象的状态 基于测量对象的温度上升特性的曲线形状。 在该方法和装置中,使用加热激光束源(21),至少一个红外检测器(31,32),控制单元(50)和存储单元(60)。 存储单元(60)存储参数状态 - 时间常数特性,其中与测量对象的状态相对应的参数与指示根据参数的状态而变化的温度上升特性的曲线形状的时间常数相关联 。 控制单元(50)基于从加热开始时刻到达达到饱和温度的时间点的温度上升特性的曲线形状来确定时间常数,并且确定 基于确定的时间常数和参数状态 - 时间常数特征的测量对象。