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    • 4. 发明公开
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • EP1969616A1
    • 2008-09-17
    • EP06835133.7
    • 2006-12-18
    • CASIO COMPUTER CO., LTD.
    • AOKI, Yutaka
    • H01L21/02
    • H01F17/0006H01F2017/0046H01F2017/0073H01L23/5227H01L27/016H01L28/10H01L2924/0002H01L2924/00
    • A semiconductor device includes a semiconductor substrate, an insulating film formed on the semiconductor substrate, and a thin film inductor element which is formed on the insulating film, and which includes first and second terminals and a conductive layer formed into a spiral shape between the first and second terminals so as to have a plurality of turns and at least one intersection. The conductive layer includes (i) a first conductor layer formed on the semiconductor substrate, and (ii) a second conductor layer which is formed on the insulating film, intersects the first conductor layer via the insulating film at the intersection. The thin film inductor element has an arrangement in which the first and second conductor layers are symmetrically arranged in directions from an intermediate point between the first and second terminals along the longitudinal direction of the conductive layer to the first and second terminals.
    • 一种半导体器件,包括:半导体衬底;形成在所述半导体衬底上的绝缘膜;以及形成在所述绝缘膜上的薄膜电感器元件,所述薄膜电感器元件包括第一端子和第二端子以及形成为螺旋形状的导电层, 和第二端子,以便具有多匝和至少一个交点。 导电层包括:(i)在半导体基板上形成的第一导体层;以及(ii)在绝缘膜上形成的第二导体层,在交叉部隔着绝缘膜与第一导体层相交。 薄膜电感器元件具有这样的布置,其中第一和第二导体层沿从导电层的纵向方向的第一和第二端子之间的中间点到第一和第二端子的方向对称地布置。