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1. 发明公开

EP2131202A4 ACCELERATION SENSOR 审中-公开
标题翻译：加速度传感器
公开(公告)号：EP2131202A4
公开(公告)日：2014-07-30
申请号：EP09727029
申请日：2009-04-01
申请人： PANASONIC CORP
发明人： HATTORI ISAO , NOZOE TOSHIYUKI
IPC分类号： G01P21/00 , G01P15/08 , G01P15/125 , G01P15/18
CPC分类号： G01P15/125 , G01P15/18 , G01P21/00 , G01P2015/0817 , G01P2015/0842 , G01P2015/0845 , G01P2015/0854 , G01P2015/0857
摘要： An acceleration sensor includes a driver circuit for outputting a biased alternating-current (AC) voltage having a variable bias voltage, a detector element having a capacitance provided between a fixed electrode and a movable electrode changing depending on acceleration applied to the detector element, a current-voltage (C/V) converter for converting a current output from the movable electrode of the detector element into a voltage and outputting the voltage, a first operational amplifier outputting a voltage depending on the input voltage, a synchronous demodulator for synchronously detecting the voltage output from the first operational amplifier, and a defect detector for outputting a defect detection signal when the defect detector determines that the voltage output from the first operational amplifier is out of a predetermined range while the biased AC voltage output from the driver circuit is a predetermined voltage. This acceleration sensor can have a small size.

2. 发明公开

EP2834650A1 MEMS SENSOR WITH MOVABLE Z-AXIS SENSING ELEMENT 有权
标题翻译： WITH MOBILE Z轴传感器ELEMENT MEMS传感器
公开(公告)号：EP2834650A1
公开(公告)日：2015-02-11
申请号：EP13716596.5
申请日：2013-03-27
申请人： Analog Devices, Inc.
发明人： ZHANG, Xin , JUDY, Michael W.
IPC分类号： G01P15/125 , B81B3/00 , G01P15/08
CPC分类号： G01P15/125 , B81B3/0086 , B81B2201/0235 , B81B2203/0181 , G01P2015/0825 , G01P2015/0854
摘要： A MEMS sensor includes a substrate and a MEMS structure coupled to the substrate. The MEMS structure has a mass movable with respect to the substrate. The MEMS sensor also includes a reference structure electrically coupled to the mass of the MEMS sensor. The reference structure is used to provide a reference to offset any environmental changes that may affect the MEMS sensor in order to increase the accuracy of its measurement.

3. 发明公开

EP2131202A1 ACCELERATION SENSOR 审中-公开
标题翻译：加速度传感器
公开(公告)号：EP2131202A1
公开(公告)日：2009-12-09
申请号：EP09727029.2
申请日：2009-04-01
申请人： Panasonic Corporation
发明人： HATTORI, Isao , NOZOE, Toshiyuki
IPC分类号： G01P21/00 , G01P15/125 , G01P15/18
CPC分类号： G01P15/125 , G01P15/18 , G01P21/00 , G01P2015/0817 , G01P2015/0842 , G01P2015/0845 , G01P2015/0854 , G01P2015/0857
摘要： An acceleration sensor includes a driver circuit for outputting a biased alternating-current (AC) voltage having a variable bias voltage, a detector element having a capacitance provided between a fixed electrode and a movable electrode changing depending on acceleration applied to the detector element, a current-voltage (C/V) converter for converting a current output from the movable electrode of the detector element into a voltage and outputting the voltage, a first operational amplifier outputting a voltage depending on the input voltage, a synchronous demodulator for synchronously detecting the voltage output from the first operational amplifier, and a defect detector for outputting a defect detection signal when the defect detector determines that the voltage output from the first operational amplifier is out of a predetermined range while the biased AC voltage output from the driver circuit is a predetermined voltage. This acceleration sensor can have a small size.
摘要翻译：一种加速度传感器包括：驱动电路，用于输出具有可变偏置电压的偏置交流（AC）电压;检测器元件，具有设置在固定电极和可移动电极之间的电容，该电容根据施加到检测器元件的加速度而改变; （C / V）转换器，用于将从检测器元件的可动电极输出的电流转换成电压并输出该电压;第一运算放大器，输出取决于输入电压的电压;同步解调器，用于同步检测以及缺陷检测器，用于当所述缺陷检测器确定从所述第一运算放大器输出的电压超出预定范围时输出缺陷检测信号，同时从所述驱动器电路输出的所述偏置的AC电压是从所述第一运算放大器输出的电压预定电压。该加速度传感器可以具有小尺寸。

4. 发明公开

EP3250932A1 TRANSLATING Z AXIS ACCELEROMETER 有权
标题翻译：翻译Z轴加速度计
公开(公告)号：EP3250932A1
公开(公告)日：2017-12-06
申请号：EP16703025.3
申请日：2016-01-21
申请人： InvenSense, Inc.
发明人： THOMPSON, Matthew Julian , SEEGER, Joseph
IPC分类号： G01P15/125 , G01P15/08 , B81B5/00
CPC分类号： B81B3/0016 , B81B3/0037 , B81B2201/025 , B81B2203/0109 , B81B2203/0145 , B81B2203/053 , G01P15/125 , G01P2015/0837 , G01P2015/0854 , G01P2015/086
摘要： A system and method for providing a MEMS sensor are disclosed. In a first aspect, the system is a MEMS sensor that comprises a substrate, an anchor region coupled to the substrate, at least one support arm coupled to the anchor region, at least two guiding arms coupled to and moving relative to the at least one support arm, a plurality of sensing elements disposed on the at least two guiding arms to measure motion of the at least two guiding arms relative to the substrate, and a proof mass system comprising at least one mass coupled to each of the at least two guiding arms by a set of springs. The proof mass system is disposed outside the anchor region, the at least one support arm, the at least two guiding arms, the set of springs, and the plurality of sensing elements.

5. 发明授权

EP2834650B1 MEMS SENSOR WITH MOVABLE Z-AXIS SENSING ELEMENT 有权
标题翻译： WITH MOBILE Z轴传感器ELEMENT MEMS传感器
公开(公告)号：EP2834650B1
公开(公告)日：2016-09-28
申请号：EP13716596.5
申请日：2013-03-27
申请人： Analog Devices, Inc.
发明人： ZHANG, Xin , JUDY, Michael W.
IPC分类号： G01P15/125 , B81B3/00 , G01P15/08
CPC分类号： G01P15/125 , B81B3/0086 , B81B2201/0235 , B81B2203/0181 , G01P2015/0825 , G01P2015/0854

6. 发明公开

EP2711720A1 Device for measuring force components, and method for its production 有权转让
标题翻译： Vorrichtung zum Messen von Kraftkomponenten und Herstellungsverfahrendafür
公开(公告)号：EP2711720A1
公开(公告)日：2014-03-26
申请号：EP12185908.6
申请日：2012-09-25
申请人： Acreo Swedish ICT AB
发明人： Andersson, Gert , Anguelova, Milena , Hedenstierna, Nils , Nafari, Alexandra , Westberg, David
IPC分类号： G01P15/08 , G01P15/125 , G01P15/13 , G01L1/14
CPC分类号： G01L1/04 , G01P15/02 , G01P15/0802 , G01P15/125 , G01P15/131 , G01P2015/0854 , G01P2015/0857
摘要： A device for measuring force components formed from a single crystal material, wherein the device comprises at least one cantilever beam inclined to a wafer plane normal and formed in one piece with a mass body, which mass body provides a mass of inertia. The mass body has a first and a second major surface which are substantially parallel with a wafer plane. A mass body cross section presents a portion which is substantially symmetrical along a centrally (in the thickness direction) located plane parallel with the wafer plane. Disclosed is also a method for its production and an accelerometer comprising at least one such device. The device allow for a more compact 3-axis accelerometer.
摘要翻译：一种用于测量由单晶材料形成的力分量的装置，其中所述装置包括至少一个垂直于晶片平面倾斜并且与质量体一体形成的悬臂梁，所述质量体提供了大量的惯性。质量体具有与晶片平面基本平行的第一和第二主表面。质量体横截面呈现出沿着与晶片平面平行的中心（在厚度方向上）定位的平面基本对称的部分。公开了其生产方法和包括至少一种这样的装置的加速度计。该器件允许更紧凑的3轴加速度计。

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