专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明公开

EP3226006A1 ACCELEROMETER SENSOR SYSTEM 有权
标题翻译：加速度传感器系统
公开(公告)号：EP3226006A1
公开(公告)日：2017-10-04
申请号：EP17161707.9
申请日：2017-03-17
申请人： Northrop Grumman Systems Corporation
发明人： Bulatowicz, Michael D , Griffith, Robert C , Abbink, Henry C , Sakaida, Daryl K , Clark, Philip R
IPC分类号： G01P15/08 , G01P15/125 , G01P15/13
CPC分类号： G01P15/131 , B81B2201/0235 , B81B2203/0109 , G01P15/0802 , G01P15/125 , G01P2015/0837
摘要： Embodiments of the invention include an accelerometer system. The system includes an accelerometer sensor comprising first and second electrode configurations and an inertial mass between the first and second electrode configurations. In one example, the accelerometer sensor being fabricated as symmetrically arranged about each of three orthogonal mid-planes. The system also includes an accelerometer controller configured to apply control signals to each of the first and second electrode configurations to provide respective forces to maintain the inertial mass at a null position between the first and second electrode configurations. The accelerometer controller can measure a first pickoff signal and a second pickoff signal associated with the respective first and second electrode configurations. The first and second pickoff signals can be indicative of a displacement of the inertial mass relative to the null position. The accelerometer controller can calculate an acceleration based on the first and second pickoff signals.
摘要翻译：本发明的实施例包括加速计系统。该系统包括加速计传感器，其包括第一和第二电极配置以及在第一和第二电极配置之间的惯性质量。在一个示例中，加速计传感器被制造为围绕三个正交中平面中的每一个对称地布置。该系统还包括加速度计控制器，该加速度计控制器被配置为将控制信号施加到第一和第二电极配置中的每一个以提供相应的力以将惯性质量保持在第一和第二电极配置之间的零位置处。加速度计控制器可以测量与相应的第一和第二电极配置相关联的第一传感信号和第二传感信号。第一和第二传感信号可以指示惯性质量相对于零位置的位移。加速计控制器可以基于第一和第二传感信号计算加速度。

2. 发明授权

EP2411817B1 VERTICALLY INTEGRATED MEMS ACCELERATION TRANSDUCER 有权
标题翻译：纵向一体化MEMS加速度计
公开(公告)号：EP2411817B1
公开(公告)日：2016-05-04
申请号：EP10756542.6
申请日：2010-02-26
申请人： North Star Innovations Inc.
发明人： LIN, Yizhen , MILLER, Todd F. , PARK, Woo Tac
IPC分类号： G01P15/125 , G01P15/097 , G01P15/08 , B81B7/02 , B81B7/00 , G01P15/18
CPC分类号： G01P15/0802 , B81B7/0074 , B81B2201/0235 , G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/082 , G01P2015/0831 , G01P2015/0837 , G01P2015/0848 , G01P2015/0851 , G01P2015/0871 , G01P2015/088

3. 发明授权

EP2908141B1 ACCELERATION SENSOR 有权
标题翻译：加速度传感器
公开(公告)号：EP2908141B1
公开(公告)日：2017-03-15
申请号：EP13845916.9
申请日：2013-09-27
申请人： Panasonic Intellectual Property Management Co., Ltd.
发明人： KISHIMOTO, Shinichi , UEDA, Hideki , TAURA, Takumi , YOSHIDA, Hitoshi , MORI, Takeshi , IBARA, Nobuyuki , GODA, Kazuo
IPC分类号： G01P15/18 , G01P15/08 , G01P15/125 , H01L29/84
CPC分类号： G01P15/125 , G01P15/0802 , G01P15/18 , G01P2015/0831 , G01P2015/0837

4. 发明公开

EP2887073A1 MEMS accelerometer with proof masses moving in anti-phase direction normal to the plane of the substrate 有权
标题翻译： MEMS加速度计与反相位移动至基板平面检测质量体的法线方向
公开(公告)号：EP2887073A1
公开(公告)日：2015-06-24
申请号：EP14199883.1
申请日：2014-12-22
申请人： InvenSense, Inc.
发明人： Baldasarre, Leonardo , Thompson, Matthew Julian
IPC分类号： G01P15/125 , G01P15/08
CPC分类号： G01P15/125 , G01P2015/0837 , G01P2015/086
摘要： A sensor is disclosed. The sensor includes a substrate and at least two proof masses. The sensor also includes a flexible coupling between the at least two proof masses and the substrate. The at least two coupling proof masses move in an antiphase direction normal to a plane of the substrate in response to acceleration.
摘要翻译：传感器是游离缺失盘。该传感器包括一个基底和至少两个检测质量。因此，该传感器包括至少两个检测质量块和所述基板之间的柔性联接。所述至少两个耦合质量块移动到反相法线方向基板的平面响应于加速度。

5. 发明公开

EP2778692A1 Force feedback electrodes in MEMS accelerometer 有权
标题翻译： Kraftrückkoppelungselektroden在MEMS-Beschleunigungsmesser
公开(公告)号：EP2778692A1
公开(公告)日：2014-09-17
申请号：EP14158907.7
申请日：2014-03-11
申请人： PGS Geophysical AS , Agency For Science, Technology And Research (A*star)
发明人： Ocak, Ilker Ender , Sun, Chengliang , Tsai, Julius Ming-Lin , Fernando, Sanchitha Nirodha
IPC分类号： G01P15/13 , G01P15/08
CPC分类号： G01V1/18 , G01P15/125 , G01P15/131 , G01P2015/0837 , G01P2015/0862 , G01P2015/0882 , G01V1/09 , G01V1/38
摘要： A microelectromechanical system (MEMS) accelerometer having separate sense (110b,130b,110c,130d,150b,130e,150c) and force-feedback (110p,130p,130q,150q) electrodes is disclosed. The use of separate electrodes may in some embodiments increase the dynamic range of such devices. Other possible advantages include, for example, better sensitivity, better noise suppression, and better signal-to-noise ratio. In one embodiment, the accelerometer includes three silicon wafers, fabricated with sensing electrodes forming capacitors in a fully differential capacitive architecture, and with separate force feedback electrodes forming capacitors for force feedback. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a restoring force to the proof mass region. MEMS accelerometers with force-feedback electrodes may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.
摘要翻译：公开了一种具有单独的感测（110b，130b，110c，130d，150b，130e，150c）和力反馈（110p，130p，130q，150q）电极的微机电系统（MEMS）加速计。在一些实施例中，单独电极的使用可以增加这种装置的动态范围。其他可能的优点包括例如更好的灵敏度，更好的噪声抑制和更好的信噪比。在一个实施例中，加速度计包括三个硅晶片，其中制造有感测电极，形成全差分电容结构中的电容器，并且具有单独的力反馈电极，形成用于力反馈的电容器。这些电极可以分离在二氧化硅层上。在一些实施例中，加速度计还包括二氧化硅层，压电结构，吸气剂层，接合垫，粘结间隔物和力反馈电极，其可将恢复力施加到检验质量区域。具有力反馈电极的MEMS加速度计可用于地球物理勘测，例如用于地震检测或声学定位。

6. 发明授权

EP2479579B1 MEMS sensor with dual proof masses 有权转让
标题翻译： MEMS传感器与配对震动块
公开(公告)号：EP2479579B1
公开(公告)日：2014-06-04
申请号：EP12151623.1
申请日：2012-01-18
申请人： Freescale Semiconductor, Inc.
发明人： Mcneil, Andrew C
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P2015/0831 , G01P2015/0837

7. 发明公开

EP2021747A2 FIBER OPTIC MEMS SEISMIC SENSOR WITH MASS SUPPORTED BY HINGED BEAMS 有权转让
标题翻译：摆式支持的海量光纤地震MEMS传感器
公开(公告)号：EP2021747A2
公开(公告)日：2009-02-11
申请号：EP07750603.8
申请日：2007-02-12
申请人： Davidson Instruments, Inc.
发明人： BERTHOLD, John, W. , ZHOU, Tiansheng , BUSH, Ira, Jeffery , McNAIR, Fred
IPC分类号： G01H9/00
CPC分类号： G01V1/184 , G01H9/006 , G01P15/093 , G01P15/18 , G01P2015/0837
摘要： The present invention relates to an optic seismic MEMS sensor. More specifically, a proof mass is supported by a frame having supporting beams. The proof mass is positioned within the frame and has a hinged attachment to the beams. The proof mass has a sensor gap having a first reflector and a second reflector positioned at opposing ends of the sensor gap. An optical fiber injects light into the sensor gap and light is reflected to determine seismic movement of the proof mass with respect to the frame. Stops are provided for limiting the movement of the proof mass to minimize strain on the attachment of the beams and the proof mass.

8. 发明公开

EP0767915A1 MONOLITHIC SILICON RATE-GYRO WITH INTEGRATED SENSORS 失效
标题翻译：转速传感器GYRO单片硅集成传感器
公开(公告)号：EP0767915A1
公开(公告)日：1997-04-16
申请号：EP95913591.0
申请日：1995-03-07
申请人： Neukermans, Armand P.
发明人： NEUKERMANS, Armand, P. , SLATER, Timothy, G.
IPC分类号： G01C19 , G01P9 , G01P15 , G02B26
CPC分类号： G01P15/132 , G01C19/5719 , G01P2015/0831 , G01P2015/0837 , G02B26/0833 , G02B26/0841 , G02B26/085 , G02B26/0858 , G02B26/101
摘要： A monolithic single crystal Si rate-gyro is disclosed, consisting in the preferred embodiment of an outer torsional frame (101), self-resonating with a substantial amplitude, as controlled by a four-terminal piezo torsion sensor (111), connected to an inner frame (105) by torsion hinges (103). The inner frame itself is connected to a fixed inner post (117), by a set of torsion hinges (107), defining an axis of rotation perpendicular to the first axis. Rotation of the axis of oscillation of the outer body causes the moving mass and the inner frame to tilt and oscillate at the outer frequency due to Coriolis forces, thereby periodically deforming the inner hinges in torsion. These inner hinges are likewise equipped with a four-terminal piezo voltage torsion sensor (115), giving an indication of the rate of rotation of the sensor. The design allows for good sensitivity, due to the substantial swing of the outer oscillator, its high moment of inertia, excellent Si spring characteristics, and excellent sensitivity of the torsional sensors.

9. 发明授权

EP2910953B1 PARALLEL PLATE CAPACITOR AND ACCELERATION SENSOR COMPRISING SAME 有权转让
公开(公告)号：EP2910953B1
公开(公告)日：2018-07-04
申请号：EP13847107.3
申请日：2013-08-30
申请人： CSMC Technologies Fab1 Co., Ltd.
发明人： GUO, Meihan , ZHANG, Xinwei , XIA, Changfeng , SU, Wei
IPC分类号： G01P15/125 , G01P15/08
CPC分类号： G01P15/125 , B81B7/02 , G01P2015/0837 , H01G5/16 , H02N1/08
摘要： A parallel plate capacitor includes a first polar plate (10), and a second polar plate disposed opposite to the first polar plate (10). The parallel plate capacitor further includes at least a pair of sensitive units disposed on a substrate forming the first polar plate (10); the sensitive units includes sensitive elements (21a, 21b, 22a, 22b) and element connecting arms (23a, 23b, 24a, 24b) connecting the sensitive elements (21a, 21b, 22a, 22b) to the first polar plate (10). The parallel plate capacitor further includes anchoring bases (30, 31, 32, 33) disposed on a substrate where the second polar plate is located; the anchoring bases (30, 31, 32, 33) are connected to the element connecting arms (23a, 23b, 24a, 24b) via cantilever beams (30a, 30b, 31a, 31b, 32a, 32b, 33a, 33b); each element connecting arm (23a, 23b, 24a, 24b) is connected to at least two anchoring bases (30, 31, 32, 33), which are symmetric with respect to the element connecting arm. The parallel plate capacitor is more likely to be influenced by an external factor, thus being more likely to experience capacitance change. An acceleration sensor including the parallel plate capacitor is also provided.

10. 发明授权

EP2975412B1 MEMS ACCELEROMETER 有权
标题翻译： MEMS-BESCHLEUNIGUNGSSENSOR
公开(公告)号：EP2975412B1
公开(公告)日：2017-02-01
申请号：EP15170390.7
申请日：2015-06-03
申请人： Meggitt (Orange County), Inc.
发明人： KWA, Tom
IPC分类号： G01P15/12 , G01P15/08
CPC分类号： G01P15/09 , B81B3/0035 , B81B2203/0338 , G01P15/0802 , G01P15/123 , G01P15/18 , G01P2015/0837
摘要： A MEMS acceleration sensor comprising: a frame, a plurality of proofmasses; a plurality of flexures; a plurality of hinges and a plurality of gauges. The frame, proofmasses, flexures, hinges and gauges designed to measure acceleration in a direction perpendicular to the device plane while being generally resistant to motions parallel to the device plane. The measurement of the acceleration is accomplished through the piezoresistive effect of the strain in the gauges.
摘要翻译：一种MEMS加速度传感器，包括：框架，多个校样物; 多个弯曲; 多个铰链和多个量规。设计用于测量垂直于设备平面的方向上的加速度的框架，校对，弯曲，铰链和量规，同时通常抵抗平行于设备平面的运动。加速度的测量通过压力计在压力表中的压阻效应来实现。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式