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1. 发明授权

EP2703824B1 MEMS accelerometer comprising pendulous masses being pivotable in the substrate plane 失效转让
标题翻译：在衬底平面摆锤摆动MEMS加速度计装置
公开(公告)号：EP2703824B1
公开(公告)日：2015-06-24
申请号：EP13194358.1
申请日：2005-12-21
申请人： Honeywell International Inc.
发明人： Eskridge, Mark, H.
IPC分类号： G01P15/125 , B81B3/00 , G01P15/08 , G01P15/18 , G01P15/13
CPC分类号： G01P15/18 , G01P15/0802 , G01P15/125 , G01P15/131 , G01P2015/0817 , G01P2015/0851

2. 发明公开

EP2411817A4 VERTICALLY INTEGRATED MEMS ACCELERATION TRANSDUCER 有权
标题翻译：纵向一体化MEMS加速度计
公开(公告)号：EP2411817A4
公开(公告)日：2014-07-23
申请号：EP10756542
申请日：2010-02-26
申请人： FREESCALE SEMICONDUCTOR INC
发明人： LIN YIZHEN , MILLER TODD F , PARK WOO TAC
IPC分类号： G01P15/125 , B81B7/00 , B81B7/02 , G01P15/08 , G01P15/097 , G01P15/18
CPC分类号： G01P15/0802 , B81B7/0074 , B81B2201/0235 , G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/082 , G01P2015/0831 , G01P2015/0837 , G01P2015/0848 , G01P2015/0851 , G01P2015/0871 , G01P2015/088

3. 发明公开

EP2411817A2 VERTICALLY INTEGRATED MEMS ACCELERATION TRANSDUCER 有权
标题翻译：纵向一体化MEMS加速度计
公开(公告)号：EP2411817A2
公开(公告)日：2012-02-01
申请号：EP10756542.6
申请日：2010-02-26
申请人： Freescale Semiconductor, Inc.
发明人： LIN, Yizhen , MILLER, Todd F. , PARK, Woo Tac
IPC分类号： G01P15/125 , G01P15/097 , G01P15/08 , B81B7/02 , B81B7/00
CPC分类号： G01P15/0802 , B81B7/0074 , B81B2201/0235 , G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/082 , G01P2015/0831 , G01P2015/0837 , G01P2015/0848 , G01P2015/0851 , G01P2015/0871 , G01P2015/088
摘要： A transducer (20) includes sensors (28, 30) that are bonded to form a vertically integrated configuration. The sensor (28) includes a proof mass (32) movably coupled to and spaced apart from a surface (34) of a substrate (36). The sensor (30) includes a proof mass (58) movably coupled to and spaced apart from a surface (60) of a substrate (56). The substrates (36, 56) are coupled with the surface (60) of substrate (56) facing the surface (34) of substrate (36). Thus, the proof mass (58) faces the proof mass (32). The sensors (28, 30) are fabricated separately and can be formed utilizing differing micromachining techniques. The sensors (28, 30) are subsequently coupled (90) utilizing a wafer bonding technique to form the transducer (20). Embodiments of the transducer (20) may include sensing along one, two, or three orthogonal axes and may be adapted to detect movement at different acceleration sensing ranges.

4. 发明公开

EP2937702A1 MEMS ACCELEROMETER COMPRISING PENDULOUS MASSES BEING PIVOTABLE IN THE SUBSTRATE PLANE 失效转让
标题翻译：微机电系统微电脑控制系统在基板上的麻醉机VERSCHWENKBAREN PENDELMASSEN
公开(公告)号：EP2937702A1
公开(公告)日：2015-10-28
申请号：EP15172701.3
申请日：2005-12-21
申请人： Honeywell International Inc.
发明人： ESKRIDGE, Mark H.
IPC分类号： G01P15/125 , B81B3/00 , G01P15/08 , G01P15/18 , G01P15/13
CPC分类号： G01P15/18 , G01P15/0802 , G01P15/125 , G01P15/131 , G01P2015/0817 , G01P2015/0851
摘要： A high aspect ratio microelectromechanical system device for measuring an applied force, the device being a cellular in-plane accelerometer formed of a base having a substantially planar mounting surface. A pair of substantially rigid fixed electrode Q structures are formed in a doped silicon mechanism layer, the fixed electrode structures having substantially parallel and mutually 0 opposing pickoff electrode surfaces oriented substantially perpendicular to the planar mounting surface of the base and spaced apart M along an input direction parallel with the planar mounting surface of the base, each of the fixed electrode structures being anchored to the mounting surface of the base. A pendulous electrostatic comb is formed in the doped silicon mechanism layer and oriented substantially perpendicular to the planar mounting surface of the base, the electrostatic comb being pendulously suspended from the mounting surface of the base between the fixed electrode structures for motion along the input direction.
摘要翻译：一种用于测量施加的力的高纵横比微机电系统装置，该装置是由具有基本平坦的安装表面的底座形成的蜂窝式平面内加速度计。在掺杂的硅机制层中形成一对基本上刚性的固定电极Q结构，固定电极结构具有基本上平行且相互0相对的相对的传感电极表面，其基本上垂直于基底的平面安装表面定向并沿着输入方向与基座的平面安装表面平行，每个固定电极结构锚固到基座的安装表面。在掺杂硅机构层中形成一个下垂的静电梳，并且基本上垂直于基座的平面安装表面定向，静电梳被从固定电极结构之间的基座的安装表面被垂直悬挂，以便沿输入方向运动。

5. 发明授权

EP1831702B1 MEMS ACCELEROMETER COMPRISING A PENDULOUS MASS BEING PIVOTABLE IN THE SUBSTRATE PLANE 失效
标题翻译： MEMS加速度计与底物水平摆动鲍勃·马塞
公开(公告)号：EP1831702B1
公开(公告)日：2014-01-15
申请号：EP05855114.4
申请日：2005-12-21
申请人： Honeywell International Inc.
发明人： ESKRIDGE, Mark, H.
IPC分类号： G01P15/125 , B81B3/00 , G01P15/08 , G01P15/13 , G01P15/18
CPC分类号： G01P15/18 , G01P15/0802 , G01P15/125 , G01P15/131 , G01P2015/0817 , G01P2015/0851

6. 发明公开

EP1831702A1 PENDULOUS IN-PLANE MEMS ACCELEROMETER DEVICE 失效
标题翻译： MEMS加速度计与底物水平摆动鲍勃·马塞
公开(公告)号：EP1831702A1
公开(公告)日：2007-09-12
申请号：EP05855114.4
申请日：2005-12-21
申请人： Honeywell International Inc.
发明人： ESKRIDGE, Mark, H.
IPC分类号： G01P15/125 , B81B3/00
CPC分类号： G01P15/18 , G01P15/0802 , G01P15/125 , G01P15/131 , G01P2015/0817 , G01P2015/0851
摘要： A high aspect ratio microelectromechanical system device for measuring an applied force, the device being a cellular in-plane accelerometer formed of a base having a substantially planar mounting surface. A pair of substantially rigid fixed electrode structures are formed in a doped silicon mechanism layer, the fixed electrode structures having substantially parallel and mutually opposing pickoff electrode surfaces oriented substantially perpendicular to the planar mounting surface of the base and spaced apart along an input direction parallel with the planar mounting surface of the base, each of the fixed electrode structures being anchored to the mounting surface of the base. A pendulous electrostatic comb is formed in the doped silicon mechanism layer and oriented substantially perpendicular to the planar mounting surface of the base, the electrostatic comb being pendulously suspended from the mounting surface of the base between the fixed electrode structures for motion along the input direction.

7. 发明授权

EP2937702B1 MEMS ACCELEROMETER COMPRISING PENDULOUS MASSES BEING PIVOTABLE IN THE SUBSTRATE PLANE 失效转让
标题翻译：与底物水平摆动悬挂质量MEMS加速度测量装置
公开(公告)号：EP2937702B1
公开(公告)日：2016-06-29
申请号：EP15172701.3
申请日：2005-12-21
申请人： Honeywell International Inc.
发明人： ESKRIDGE, Mark H.
IPC分类号： G01P15/125 , B81B3/00 , G01P15/08 , G01P15/18 , G01P15/13
CPC分类号： G01P15/18 , G01P15/0802 , G01P15/125 , G01P15/131 , G01P2015/0817 , G01P2015/0851

8. 发明授权

EP2411817B1 VERTICALLY INTEGRATED MEMS ACCELERATION TRANSDUCER 有权
标题翻译：纵向一体化MEMS加速度计
公开(公告)号：EP2411817B1
公开(公告)日：2016-05-04
申请号：EP10756542.6
申请日：2010-02-26
申请人： North Star Innovations Inc.
发明人： LIN, Yizhen , MILLER, Todd F. , PARK, Woo Tac
IPC分类号： G01P15/125 , G01P15/097 , G01P15/08 , B81B7/02 , B81B7/00 , G01P15/18
CPC分类号： G01P15/0802 , B81B7/0074 , B81B2201/0235 , G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/082 , G01P2015/0831 , G01P2015/0837 , G01P2015/0848 , G01P2015/0851 , G01P2015/0871 , G01P2015/088

9. 发明公开

EP2703824A1 MEMS accelerometer comprising pendolus masses being pivotable in the substrate plane 失效转让
标题翻译：基底物微生物学技术
公开(公告)号：EP2703824A1
公开(公告)日：2014-03-05
申请号：EP13194358.1
申请日：2005-12-21
申请人： Honeywell International Inc.
发明人： Eskridge, Mark, H.
IPC分类号： G01P15/125 , B81B3/00 , G01P15/08 , G01P15/18 , G01P15/13
CPC分类号： G01P15/18 , G01P15/0802 , G01P15/125 , G01P15/131 , G01P2015/0817 , G01P2015/0851
摘要： A high aspect ratio microelectromechanical system device for measuring an applied force, the device being a cellular in-plane accelerometer formed of a base having a substantially planar mounting surface. A pair of substantially rigid fixed electrode structures are formed in a doped silicon mechanism layer, the fixed electrode structures having substantially parallel and mutually opposing pickoff electrode surfaces oriented substantially perpendicular to the planar mounting surface of the base and spaced apart along an input direction parallel with the planar mounting surface of the base, each of the fixed electrode structures being anchored to the mounting surface of the base. A pendulous electrostatic comb is formed in the doped silicon mechanism layer and oriented substantially perpendicular to the planar mounting surface of the base, the electrostatic comb being pendulously suspended from the mounting surface of the base between the fixed electrode structures for motion along the input direction.
摘要翻译：一种用于测量施加的力的高纵横比微机电系统装置，该装置是由具有基本平坦的安装表面的底座形成的蜂窝式平面内加速度计。在掺杂硅机构层中形成一对基本上刚性的固定电极结构，固定电极结构具有基本上平行且相互相对的传感电极表面，其基本上垂直于基座的平面安装表面定向并且沿着与基座的平面安装表面，每个固定电极结构锚固到基座的安装表面。在掺杂硅机构层中形成一个下垂的静电梳，并且基本上垂直于基座的平面安装表面定向，静电梳被从固定电极结构之间的基座的安装表面被垂直悬挂，以便沿输入方向运动。

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