基本信息:
- 专利标题： ELECTROSTATICALLY ACTUATED TORSIONAL RESONANT SENSORS AND SWITCHES
- 专利标题（中）：静电驱动扭转共振传感器和开关
- 申请号：EP16736623.6 申请日：2016-06-23
- 公开(公告)号：EP3314249A1 公开(公告)日：2018-05-02
- 发明人： YOUNIS, Mohammad Ibrahim
- 申请人： King Abdullah University of Science and Technology
- 申请人地址： 4700 King Abdullah University of Science and Technology Thuwal 23955-6900 SA
- 专利权人： King Abdullah University of Science and Technology
- 当前专利权人： King Abdullah University of Science and Technology
- 当前专利权人地址： 4700 King Abdullah University of Science and Technology Thuwal 23955-6900 SA
- 代理机构： Hervouet-Malbec, Sylvie
- 优先权： US201562183420P 20150623
- 国际公布： WO2016207834 20161229
- 主分类号： G01N29/02
- IPC分类号： G01N29/02 ; G01N29/036 ; H01H35/42 ; H01H59/00
摘要：
Embodiments in accordance of a torsional resonant sensor disclosure is configured to actuate a beam structure using electrostatic actuation with an AC harmonic load (e.g., AC and DC voltage sources) that is activated upon detecting a particular agent having a mass above a predefined level. In various embodiments, the beam structure may be different types of resonant structures that is at least partially coated or layered with a selective material.
公开/授权文献:
IPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01N | 借助于测定材料的化学或物理性质来测试或分析材料 |
| ------G01N29/00 | 利用超声波、声波或次声波来测试或分析材料；靠发射超声波或声波通过物体得到物体内部的显像 |
| --------G01N29/02 | .流体分析 |