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1. 发明公开

EP1485686A4 HIGH RESOLUTION SPECTRAL MEASUREMENT DEVICE 审中-公开
标题翻译：高分辨率光谱测量
公开(公告)号：EP1485686A4
公开(公告)日：2008-09-24
申请号：EP03744588
申请日：2003-01-15
申请人： CYMER INC
发明人： SANDSTROM RICHARD L , ERSHOV ALEXANDER I , PARTLO WILLIAM N , FOMENKOV IGOR V , SMITH SCOTT T , BROWN DANIEL J W
IPC分类号： G01J3/18 , G01J3/26 , G01J1/42 , G01J3/02 , G01J3/12 , G01J3/22 , G01J3/36 , G01J9/00 , G01J9/02 , G21K1/06 , H01S3/134 , H01S3/137
CPC分类号： G01J3/26 , G01J1/4257 , G01J3/02 , G01J3/0205 , G01J3/12 , G01J3/1804 , G01J3/22 , G01J9/02
摘要： A high resolution spectral measurement device. A preferred embodiment presents an extremely narrow slit function in the ultraviolet range and is very useful for measuring bandwidth of narrow-band excimer lasers used for integrated circuit lithography. Light from the laser is focused into a diffuser (D) and the diffused light exiting the diffuser (D) illuminates an etalon (ET). A portion of its light exiting the etalon (ET) is collected and directed into a slit (S1) positioned at a fringe pattern of the etalon (ET). Light passing through the slit (S1) is collimated and the collimated light illuminates a grating (GR1) positioned in an approximately Littrow configuration which disperses the light according to wavelength. A portion of the dispersed light representing the wavelength corresponding to the selected etalon fringe is passed through a second slit and monitored by a light detector. When the etalon (ET) and the grating (GR1) are tuned to the same precise wavelength a slit function is defined which is extremely narrow such as about 0.034pm (FWHM) and about 0.091pm (95 percent integral). The bandwidth of a laser beam can be measured very accurately by a directing portion of the laser beam into the insulator and scanning the laser wavelength over a range which includes the monochromator slit wavelength. In a second embodiment the second slit and the light detector is replaced by a photodiode array (PDA) and the bandwidth of a laser beam is determined by analyzing a set of scan data from the photodiode array (PDA). Alternately, the laser wavelength can be fixed near the middle of the spectrum range of the grating spectrometer (50), and the etalon (ET) can be scanned.

2. 发明公开

EP1451541A4 COMPACT LITTROW-TYPE SCANNING SPECTROGRAPH 审中-公开
标题翻译： KOMPAKTER RASTERSPEKTROGRAPH DES LITTROW-TYPS
公开(公告)号：EP1451541A4
公开(公告)日：2008-08-13
申请号：EP01988169
申请日：2001-11-19
申请人： JOBIN YVON INC
发明人： JIANG WU , SLUTTER WARREN STEPHEN , LANGE KEVIN
IPC分类号： G01J3/02 , G01J3/22
CPC分类号： G01J3/02 , G01J3/021 , G01J3/0218 , G01J3/0221 , G01J3/0243 , G01J3/0256 , G01J3/0291 , G01J3/22
摘要： A Littrow-type spectrometer or monochromator using a folded light path to provide a compact optical instrument is disclosed. Light enters the instrument through an inlet aperture on a planar mirror. The aperture is located at the focus of a parabolic collimetor mirror. Collimated light reflected by the parabolic miror is reflected back to the planar mirror, which is positioned at an angle to the collimated light. The light reflected from the planar mirror is directed at a planar grating that produces diffracted light having all the wavelengths input into the system, including light of a selected wavelength, back towards the planar mirror. Light having the selected wavelength is thus caused to fall on the parabolic mirror. The parabolic mirror then focuses the selected wavelength of light ont a light exit aperture that is juxtaposed to the inlet light aperture. The planar grating can be rotatably mounted to scan the input light spectrum.
摘要翻译：公开了一种利用折叠光路来提供紧凑型光学仪器的利特罗型分光计或单色仪。光线通过平面镜上的入口进入仪器。光圈位于抛物面准直镜的焦点处。由抛物镜反射的准直光被反射回平面镜，该平面镜与平行光成一定角度。从平面镜反射的光被导向平面光栅，该平面光栅产生具有输入到系统中的所有波长的衍射光，包括选定波长的光回到平面镜。具有选定波长的光因此落在抛物面镜上。抛物面反射镜然后将选定波长的光聚焦在与入射光孔并列的光出射孔上。平面光栅可旋转安装以扫描输入光谱。

3. 发明公开

EP2829855A1 Spectral apparatus, detection apparatus, light source apparatus, reaction apparatus, and measurement apparatus 审中-公开
标题翻译： Spektralvorrichtung，Nachweisvorrichtung，Lichtquellenvorrichtung，Reaktionsvorrichtung和und Messvorrichtung
公开(公告)号：EP2829855A1
公开(公告)日：2015-01-28
申请号：EP14165535.7
申请日：2014-04-23
申请人： Canon Kabushiki Kaisha , The University of Tokyo
发明人： Sukegawa, Takashi , Kobayashi, Yohei , Ozawa, Akira , Endo, Mamoru , Gonokami, Makoto
IPC分类号： G01J3/02 , G01J3/18 , G01J3/22 , G01J1/04
CPC分类号： G02B27/1086 , G01J1/0411 , G01J1/0414 , G01J1/0425 , G01J3/0208 , G01J3/021 , G01J3/0218 , G01J3/0221 , G01J3/0291 , G01J3/18 , G01J3/1804 , G01J3/22 , G01J3/2823 , G01J2003/1861 , G01N21/75 , G02B5/18 , G02B2005/1804
摘要： The present invention provides a spectral apparatus for spectrally separating light including a predetermined wavelength, including a slit that the light enters, a first optical system configured to collimate the light from the slit, a transmissive type diffraction element configured to diffract the light from the first optical system, and a second optical system including a first mirror configured to reflect the light diffracted by the transmissive type diffraction element, and a second mirror configured to reflect the light reflected by the first mirror and diffracted by the transmissive type diffraction element, and configured to make the light reciprocally travel between the first mirror and the second mirror via the transmissive type diffraction element.
摘要翻译：本发明提供了一种用于光谱分离包括光入射的狭缝的预定波长的光的光谱装置，被配置为准直来自狭缝的光的第一光学系统，被配置为衍射来自第一光学系统，以及第二光学系统，包括被配置为反射由透射型衍射元件衍射的光的第一反射镜，以及被配置为反射由第一反射镜反射并被透射型衍射元件衍射的光的第二反射镜，以使光通过透射型衍射元件在第一反射镜和第二反射镜之间往复行进。

4. 发明公开

EP1417462A1 CONVOLUTION METHOD FOR MEASURING LASER BANDWIDTH 审中-公开
标题翻译：折叠式激光测量带宽方法
公开(公告)号：EP1417462A1
公开(公告)日：2004-05-12
申请号：EP02752594.8
申请日：2002-07-25
申请人： Cymer, Inc.
发明人： HAAS, Steven , SANDSTROM, Richard, L. , HOFMANN, Thomas , ERSHOV, Alexander, I.
IPC分类号： G01J3/18
CPC分类号： G01J3/26 , G01J1/4257 , G01J3/02 , G01J3/027 , G01J3/12 , G01J3/1809 , G01J3/22 , G01J3/28 , G01J9/02
摘要： A simple, reliable, easy to use method for calculating bandwidth data of very narrow band laser beams based on bandwidth data obtained with a spectrometer in circumstances where the laser bandwidths are not large compared to the slit function of the spectrometer. The slit function of the spectrometer is determined (20). Spectral data of the laser beam is measured with the spectrometer to produce a measured laser beam spectrum which represents a convolution of the laser beam spectrum and the spectrometer slit function (76). This measured laser spectrum is then mathematically convolved with the slit function of the spectrometer to produce a doubly convolved spectrum. Bandwidth values representing true laser bandwidths are determined from measured laser spectrum and the doubly convolved spectrum. Preferably the true laser bandwidths are calculated by determining the difference between 'twice a measured laser bandwidth' and a corresponding 'doubly convolved bandwidth.' This method provides an excellent estimate of the true laser bandwidth because 'twice the measured laser bandwidth' represents two laser bandwidths and two spectrometer slit function bandwidths and the 'doubly convolved bandwidth' represents one laser bandwidth and two spectrometer slit function bandwidths. Thus, the difference is a representation of the true laser bandwidth. In a preferred embodiment the bandwidth parameters measured are the full width half-maximum bandwidth and the 95% integral bandwidth.

5. 发明授权

EP0587683B1 ECHELLE-POLYCHROMATOR 失效
标题翻译： ECHELLE，多色
公开(公告)号：EP0587683B1
公开(公告)日：1995-02-22
申请号：EP92911706.7
申请日：1992-06-05
申请人： BODENSEEWERK PERKIN-ELMER GMBH
发明人： FLOREK, Stefan , BECKER-ROSS, Helmut
IPC分类号： G01J3/12 , G01J3/28 , G02B5/06
CPC分类号： G01J3/14 , G01J3/1809 , G01J3/22 , G01J3/2803 , G01J2003/1208 , G01J2003/1286 , G01J2003/1828
摘要： A monochromator (14) with a prism (20) is disposed so that light passes through it before passing on to an echelle polychromator (50). The linear dispersion of the monochromator (14) can be changed by changing the angular dispersion of the prism (20). This makes it possible to investigate, at high resolution, using an echelle grating (54), a particular spectral position and the region close to it. Care is taken that, depending on the mean wavelength being observed, not only is the detector array (66) of the polychromator (50) completely used, but also interfering orders are kept away from the polychromator (50). The linear dispersion of the monchromator can be changed for this purpose.
摘要翻译：具有棱镜（20）的单色器（14）被设置成使得光在通过到中阶梯多色仪（50）之前穿过它。单色器（14）的线性色散可以通过改变棱镜（20）的角色散来改变。这使得可以在高分辨率下使用中阶梯光栅（54），特定的光谱位置和靠近它的区域进行研究。注意的是，取决于观察到的平均波长，不仅多色仪（50）的检测器阵列（66）被完全使用，而且干扰顺序也远离多色仪（50）。单色器的线性色散可以为此改变。

6. 发明公开

EP1588148A1 A GAS CELL 审中-公开
标题翻译： GASZELLE
公开(公告)号：EP1588148A1
公开(公告)日：2005-10-26
申请号：EP04702475.7
申请日：2004-01-15
申请人： Senseair AB
发明人： MARTIN, Hans, Göran, Evald
IPC分类号： G01N21/17
CPC分类号： G01N21/3504 , G01J3/22 , G01N21/314 , G01N2021/3137 , G01N2021/317
摘要： The present invention relates to a gas cell which is included in a gas sensor and adapted to establish the presence of a gas and/or for determining the concentration of one such gas (G), comprising a cavity (2') which is delimited by wall portions that have light reflecting properties and which is intended to enclose a volume ((G)) of said gas, and further comprising a light source (3) which is adapted to emit a light bundle (3a') directed for reflection between cavity-associated and opposing wall portions, wherein a light bundle (3a') is comprised of light rays which are reflected in a concave wall mirror surface (2b') and adapted to be directed onto one or more light receivers (4, 5) which function to detect an absorption wavelength corresponding to the gas sample ((G)). The concave curved wall mirror surface (2b') is adapted to reflect an obliquely received divergent light bundle (3a') from the light source (3) onto a flat grating-allocated cavity-associated wall surface (2g') whose reflecting surface includes or is structured as a Littrow arrangement (2g'). The light bundle (3a') is adapted to fall onto the flat wall surface (2g') at an angle which lies close to the Blaze angle of the grating wherewith, inter alia, an absorption wavelength corresponding to the chosen gas sample ((G)) and present in the light bundle (3a') is caused to be reflected and diffracted ((3a')) by said flat wall surface (2g') in a straight opposite direction so as to be reflected again in said curved mirror surface (2b') and directed diffracted towards each of said light receivers (4, 5).

7. 发明公开

EP1485686A2 HIGH RESOLUTION SPECTRAL MEASUREMENT DEVICE 审中-公开
标题翻译：高分辨率光谱测量
公开(公告)号：EP1485686A2
公开(公告)日：2004-12-15
申请号：EP03744588.9
申请日：2003-01-15
申请人： Cymer, Inc.
发明人： SANDSTROM, Richard, L. , ERSHOV, Alexander, I. , PARTLO, William, N. , FOMENKOV, Igor, V. , SMITH, Scott, T. , BROWN, Daniel, J., W.
IPC分类号： G01J3/18
CPC分类号： G01J3/26 , G01J1/4257 , G01J3/02 , G01J3/0205 , G01J3/12 , G01J3/1804 , G01J3/22 , G01J9/02
摘要： A high resolution spectral measurement device. A preferred embodiment presents an extremely narrow slit function in the ultraviolet range and is very useful for measuring bandwidth of narrow-band excimer lasers used for integrated circuit lithography. Light from the laser is focused into a diffuser (D) and the diffused light exiting the diffuser (D) illuminates an etalon (ET). A portion of its light exiting the etalon (ET) is collected and directed into a slit (S1) positioned at a fringe pattern of the etalon (ET). Light passing through the slit (S1) is collimated and the collimated light illuminates a grating (GR1) positioned in an approximately Littrow configuration which disperses the light according to wavelength. A portion of the dispersed light representing the wavelength corresponding to the selected etalon fringe is passed through a second slit and monitored by a light detector. When the etalon (ET) and the grating (GR1) are tuned to the same precise wavelength a slit function is defined which is extremely narrow such as about 0.034pm (FWHM) and about 0.091pm (95 percent integral). The bandwidth of a laser beam can be measured very accurately by a directing portion of the laser beam into the insulator and scanning the laser wavelength over a range which includes the monochromator slit wavelength. In a second embodiment the second slit and the light detector is replaced by a photodiode array (PDA) and the bandwidth of a laser beam is determined by analyzing a set of scan data from the photodiode array (PDA). Alternately, the laser wavelength can be fixed near the middle of the spectrum range of the grating spectrometer (50), and the etalon (ET) can be scanned.

8. 发明公开

EP0587683A1 ECHELLE-POLYCHROMATOR 失效
标题翻译： SCALE-多色
公开(公告)号：EP0587683A1
公开(公告)日：1994-03-23
申请号：EP92911706.0
申请日：1992-06-05
申请人： BODENSEEWERK PERKIN-ELMER GMBH
发明人： FLOREK, Stefan , BECKER-ROSS, Helmut
IPC分类号： G01J3
CPC分类号： G01J3/14 , G01J3/1809 , G01J3/22 , G01J3/2803 , G01J2003/1208 , G01J2003/1286 , G01J2003/1828
摘要： Un premier monochromateur (14) doté d'une prisme (20) est monté à l'avant d'un polychromateur à échelle (50). La dispersion linéaire du premier monochromateur (14) est susceptible de varier lorsqu'on modifie la dispersion angulaire du prisme (20). Une position spectrale déterminée et son environnement immédiat sont analysés avec une résolution élevée, au moyen d'une grille échelle (54). Des moyens sont prévus afin que, en fonction de chacune des longueurs d'onde moyennes observées, d'une part le réseau détecteur (66) du polychromateur à échelle (50) soit totalement utilisé et, d'autre part, les perturbations soient écartées du polychromateur à échelle (50). Dans ce but, la dispersion linéaire du premier monochromateur est variable.
摘要翻译：具有棱镜（20）的第一单色仪（14）安装在梯形多色仪（50）的前面。当修改棱镜（20）的角色散时，第一单色器（14）的线性色散很可能发生变化。使用比例尺网格（54）以高分辨率分析确定的光谱位置及其直接环境。设置装置，使得，取决于在一方面中观察到的检测器阵列（66），每个平均波长缩放多色仪（50）被完全使用，并且在另一方面，扰动间隔的缩放多色仪（50）。为此，第一单色器的线性色散是可变的。

9. 发明公开

EP2943760A1 SPEKTROMETER 有权
标题翻译：光谱仪
公开(公告)号：EP2943760A1
公开(公告)日：2015-11-18
申请号：EP15714403.1
申请日：2015-02-06
申请人： Micro-Epsilon Optronic GmbH
发明人： OTTO, Tobias
IPC分类号： G01J3/14 , G01J3/22 , G01J3/02 , G01J3/28 , A61B5/00 , G01J3/12
CPC分类号： G01J3/14 , G01J3/0208 , G01J3/0256 , G01J3/18 , G01J3/22 , G01J3/2803 , G01J2003/1208
摘要： The invention relates to a spectrometer comprising a combination of at least one grid (1) and at least one prism (2), characterised in that total reflexion is used to produce a compact spectrometer in at least one prism (2).

10. 发明公开

EP1451541A2 COMPACT LITTROW-TYPE SCANNING SPECTROGRAPH 审中-公开
标题翻译：紧凑型LITTROW型扫描光谱
公开(公告)号：EP1451541A2
公开(公告)日：2004-09-01
申请号：EP01988169.7
申请日：2001-11-19
申请人： Jobin Yvon Inc.
发明人： JIANG, Wu , SLUTTER, Warren, Stephen , LANGE, Kevin
IPC分类号： G01J1/00
CPC分类号： G01J3/02 , G01J3/021 , G01J3/0218 , G01J3/0221 , G01J3/0243 , G01J3/0256 , G01J3/0291 , G01J3/22
摘要： A Littrow-type spectrometer or monochromator (10) using a folded light path to provide a compact optical instrument is disclosed. Light enters the instrument through an inlet aperture on a planar mirror (14). The aperture is located at the focus of a parabolic collimetor-mirror (18). Collimated light reflected by the parabolic mirror is reflected back to the planar mirror, which is positioned at an angle to the collimated light. The light reflected from the planar mirror is directed at a planar grating (20) that produces diffracted light having all the wavelengths input into the system, including light of a selected wavelength, back towards the planar mirror. Light having the selected wavelength is thus caused to fall on the parabolic mirror. The parabolic mirror then focuses the selected wavelength of light ont a light exit aperture that is juxtaposed to the inlet light aperture. The planar grating can be rotatably mounted to scan the input light spectrum.
摘要翻译：公开了利用折叠光路提供小型光学仪器的利特罗型分光计或单色器（10）。光线通过平面镜（14）上的入口进入仪器。光圈位于抛物面准直镜（18）的焦点处。由抛物面镜反射的准直光被反射回平面镜，该平面镜与平行光成一定角度。从平面镜反射的光被导向平面光栅（20），该平面光栅产生具有输入到系统中的所有波长（包括选定波长的光）的衍射光返回平面镜。具有选定波长的光因此落在抛物面镜上。抛物面反射镜然后将选定波长的光聚焦在与入射光孔并列的光出射孔上。平面光栅可旋转安装以扫描输入光谱。

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