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1. 发明公开

EP4354187A1 SIX-DEGREE-OF-FREEDOM ERROR CORRECTION METHOD AND APPARATUS 审中-公开
公开(公告)号：EP4354187A1
公开(公告)日：2024-04-17
申请号：EP23197237.3
申请日：2023-09-13
申请人： Chroma ATE Inc.
发明人： Hsieh, Cheng Chih , Wu, Tien Chi , Lee, Ming-Long , Lin, Yu-Hsuan , Lin, Tsung-I , Ma, Chien-Hao
IPC分类号： G02B5/04 , G01B11/26 , G01B11/27
CPC分类号： G02B5/04 , G01B11/26 , G01B11/27
摘要： The present invention relates to six-degree-of-freedom error correction method and apparatus. The apparatus comprises a six-axis correction stage, an auto-collimation measurement device, a light splitter, a telecentric image measurement device, and a controller. The six-axis correction stage is used for carrying a device under test; the auto-collimation measurement device is arranged above the six-axis correction stage along a measurement optical axis; the light splitter is arranged on the measurement optical axis and is interposed between the six-axis correction stage and the auto-collimation measurement device; the telecentric image measurement device is arranged on one side of the measurement optical axis and corresponds to the light splitter. The method controls the six-axis correction stage to correct rotation errors in at least two degrees of freedom of the device under test according to a measurement result of the auto-collimation measurement device, and controls the six-axis correction stage to correct translation and yaw errors in at least three degrees of freedom of the device under test according to a measurement result of the telecentric image measurement device by means of the controller.

2. 发明授权

EP3340599B1 AN ALIGNMENT MEMBER AND A METHOD FOR ALIGNING A SENSOR BOARD 有权
公开(公告)号：EP3340599B1
公开(公告)日：2018-11-28
申请号：EP16205246.8
申请日：2016-12-20
申请人： Axis AB
发明人： Karlsson Jägerman, Andreas , Frohlund, Stig
IPC分类号： H04N5/225
CPC分类号： H04N5/2253 , G01B11/27 , H04N5/238
摘要： An alignment member (10, 50) for alignment of a sensor board (12, 52) relative an optics unit (11, 51) is disclosed. The alignment member (10, 50) is arranged to couple the sensor board (12, 52) to the optics unit (11, 51). The alignment member (10, 50) comprises: a section (15) formed by a thermoplastic material and arranged to support the sensor board (12, 52); and a heating element (30a, 30b, 30c, 40, 41) which upon activation is arranged to transfer heat to the section such that the section (15) at least partly is heated to a temperature being at least the glass transition temperature for the thermoplastic material for enabling alignment of the sensor board (12, 52) relative the optics unit (11, 51). A camera arrangement (1, 5) comprising an alignment member (10, 50) and a method for aligning a sensor board relative an optics unit are also disclosed.

3. 发明公开

EP3385667A2 MARKIERVORRICHTUNG 审中-公开
公开(公告)号：EP3385667A2
公开(公告)日：2018-10-10
申请号：EP18164148.1
申请日：2018-03-27
申请人： Testo SE & Co. KGaA
发明人： ZAHN, Patrick , KUPPING, Stephan
IPC分类号： G01C15/02
CPC分类号： G01B11/27 , B23Q17/24 , B25H7/045 , B44B7/00 , G01B11/002 , G01C15/02 , G02B27/18
摘要： Markiervorrichtung (1) mit einer Darstellungsvorrichtung (9) zur optisch geführten Ausrichtung auf eine Bearbeitungsstelle (5) eines Objekts (3), wobei in einem Modellspeicher ein digitales Modell (2) des Objekts (3) hinterlegbar ist und dem digitalen Modell (2) wenigstens eine Markierung (4) hinzufügbar ist, die mit einer Bearbeitungsstelle (5) auf dem Objekt (3) korrespondiert, wobei mit einer Messvorrichtung die Lage der Markiervorrichtung (1) in Bezug auf das Objekt (3) bestimmbar ist (Fig. 3).

4. 发明公开

EP2624018A3 Integrated laser alignment aid using multiple laser spots out of one single laser 有权转让
标题翻译：集成的激光对准辅助工具，使用单个激光器中的多个激光点
公开(公告)号：EP2624018A3
公开(公告)日：2018-03-21
申请号：EP12165326.5
申请日：2012-04-24
申请人： Rockwell Automation Safety AG
发明人： Meinherz, Carl , Casty, Richard
IPC分类号： G01V8/20 , F16P3/14 , G02B27/10 , G02B27/12 , G02B19/00 , G01B11/27
CPC分类号： G01B11/14 , F16P3/144 , G01B11/27 , G01D5/342 , G01V8/10 , G01V8/20 , G02B19/0052 , G02B27/106 , G02B27/1086 , G02B27/1093 , G02B27/123 , G02B27/126 , G08B13/183
摘要： The present invention relates to light curtains, in particular safety light curtains, for monitoring a protective field. Furthermore, the present invention relates to optical units which are part of such a light curtain. An optical unit (100) for an alignment system of a light curtain monitoring a protective field comprises an optical processing element (102) for generating a defined radiation pattern from the radiation emitted by an alignment radiation source, and at least one additional optical functional element (106, 107,128) being formed integrally with said optical processing element.
摘要翻译：本发明涉及用于监视保护区域的光幕，特别是安全光幕。此外，本发明涉及作为这种光幕的一部分的光学单元。一种用于监视保护区域的光幕的对准系统的光学单元（100）包括用于从由对准辐射源发射的辐射生成限定的辐射图案的光学处理元件（102），以及至少一个附加的光学功能元件（106,107,128）与所述光学处理元件一体形成。

5. 发明授权

EP3088841B1 VERFAHREN UND EINRICHTUNG ZUR BEURTEILUNG DER OBERFLÄCHENBESCHAFFENHEIT NACH DER WINKELAUFGELÖSTEN STREULICHTMESSMETHODE MIT AUTOMATISCHER LAGEERKENNUNG DES WERKSTÜCKS 有权转让
标题翻译：用于根据工件的自动位置检测的倾斜式抛光方法来评估表面纹理的方法和设备
公开(公告)号：EP3088841B1
公开(公告)日：2018-03-14
申请号：EP16167293.6
申请日：2016-04-27
申请人： Brodmann Technologies GmbH
发明人： Brodmann, Rainer , Brodmann, Boris
IPC分类号： G01B11/30 , G01B11/27 , G01B11/24 , G01N21/952 , B23Q17/00 , B23Q17/20 , B23Q17/24 , G01N21/47
CPC分类号： G01N21/952 , G01B11/2408 , G01B11/27 , G01B11/303 , G01N21/4788

6. 发明授权

EP3043208B1 EXPOSURE APPARATUS, EXPOSURE METHOD AND DEVICE MANUFACTURING METHOD 有权
标题翻译：曝光装置，曝光方法及装置制造方法
公开(公告)号：EP3043208B1
公开(公告)日：2017-05-31
申请号：EP16155011.6
申请日：2007-01-19
申请人： Nikon Corporation
发明人： Shibazaki, Yuichi
IPC分类号： G03F7/20
CPC分类号： G03F7/70725 , G01B11/27 , G01D5/26 , G01D5/266 , G01D18/002 , G03F7/70141 , G03F7/70341 , G03F7/70483 , G03F7/70516 , G03F7/70716 , G03F7/70775 , G03F7/70975 , Y10T29/49826
摘要： Positional information of a movable body (RST) in a Y-axis direction is measured using an interferometer (16y) and an encoder ((24A, 26A 1 ), (24B, 26B 1 )) whose short-term stability of measurement values excels when compared with the interferometer, and based on the measurement results, a predetermined calibration operation for obtaining correction information for correcting measurement values of the encoder is performed. Accordingly, by using measurement values of the interferometer, correction information for correcting the measurement values of the encoder whose short-term stability of the measurement values excels the interferometer is obtained. Then, based on the measurement values of the encoder and the correction information, the movable body is driven in the Y-axis direction with good precision.
摘要翻译：使用测量值的短期稳定性优异的干涉仪（16y）和编码器（（24A，26A 1），（24B，26B 1））测量移动体（RST）在Y轴方向上的位置信息当与干涉仪比较时，并且基于测量结果，执行用于获得用于校正编码器的测量值的校正信息的预定校准操作。因此，通过使用干涉仪的测量值，获得用于校正测量值的短期稳定性优于干涉仪的编码器的测量值的校正信息。然后，基于编码器的测量值和校正信息，以高精度在Y轴方向上驱动可移动体。

7. 发明授权

EP2818928B8 Exposure method, exposure apparatus, and device manufacturing method 有权转让
标题翻译：曝光方法，曝光装置及方法，用于制造器件
公开(公告)号：EP2818928B8
公开(公告)日：2016-11-30
申请号：EP14179101.2
申请日：2010-08-24
申请人： Nikon Corporation
发明人： Shibazaki, Yuichi
IPC分类号： G03F7/20 , G03F9/00 , G01B11/27 , H01L21/68
CPC分类号： G03F7/20 , G01B11/27 , G03F7/70133 , G03F7/70358 , G03F7/70483 , G03F7/70516 , G03F7/70725 , G03F7/70775 , G03F9/70 , H01L21/681 , Y10T29/49002
摘要： Within an area (A 0 ) where of four heads (60 1 to 60 4 ) installed on a stage (WST1), heads included in the first head group and the second head group to which three heads each belong that include one head different from each other face the corresponding areas on a scale plate, the stage (WST1) is driven based on positional information which is obtained using the first head group, as well as obtaining the displacement (displacement of position, rotation, and scaling) between the first and second reference coordinate systems (C 1 , C 2 ) corresponding to the first and second head groups using the positional information obtained using the first and second head groups. By using the results and correcting measurement results obtained using the second head group, the displacement between the first and second reference coordinate systems (C 1 , C 2 ) is calibrated, which allows the measurement errors that come with the displacement between the areas on the scale plates where each of the four heads (60 1 to 60 4 ) face to be corrected.

8. 发明公开

EP3093611A2 MEASURING METHOD AND DEVICE TO MEASURE THE STRAIGHTNESS ERROR OF BARS AND PIPES 有权转让
标题翻译： VORRICHTUNG UND VERFAHREN ZUR MESSUNG DES GERADHEITSFEHLERNS VON STANGEN ODER ROHREN
公开(公告)号：EP3093611A2
公开(公告)日：2016-11-16
申请号：EP16169727.1
申请日：2016-05-13
申请人： Q-TECH S.r.l.
发明人： FUMAGALLI, Luca , GREGORELLI, Erika , TOMASSINI, Paolo
IPC分类号： G01B11/245
CPC分类号： G01B11/245 , G01B11/27
摘要： The present invention concerns a measuring device to measure straightness errors of elongated-shape elements, such as bars, pipes and the like, comprising a surface plate on which a bar is arranged in static equilibrium by virtue of its own straightness defect, detecting means to detect the development of the longitudinal axis of the bar, a controlling and processing unit to control and process data acquired by the detecting means. The detecting means acquire the coordinates of a plurality of points of the bar surface next to at least three cross sections and the controlling and processing unit is programmed to calculate the position of the longitudinal axis of the bar next to the three sections, starting from the coordinates of the above mentioned points.
In one embodiment the device comprises movement means to move sensors which, in their turn, comprise: at least one track along which the movable sensors can be translated, and actuators driven by the controlling unit and intended for the movement of the movable sensors to known positions along the track in order to precisely control the position of the sensors along the track.
In another embodiment the surface plate is defined by only one surface or else by a plurality of supports, and wherein the surface plate is combined with a rolling plane, where the bars roll, in its turn defined by only one surface or a plurality of supports, to force the bars to stop, after they initially rolled, in a position of stable equilibrium on the surface plate, the lying plane of the longitudinal axis of each bar being parallel to the surface plate itself in order to cause the straightness error of each bar to lie coplanar with the surface plate.
In another embodiment the surface plate comprises at least one support, preferably at least two supports, each mounted on a respective fulcrum so as to tilt and having at least two bearing elements on opposite sides with respect to the respective fulcrum in order to minimize the static deformation of the bar caused by its own weight.
摘要翻译：本发明涉及一种测量装置，用于测量诸如杆，管等的细长形元件的平直度误差，包括：由于其自身的平直度缺陷而将杆布置在静态平衡中的表面板;检测装置，检测棒的纵轴的发展，控制和处理单元来控制和处理由检测装置获取的数据。检测装置获取与至少三个横截面相邻的条形表面的多个点的坐标，并且控制和处理单元被编程为计算从三个部分开始的条的纵轴的位置，从上述点的坐标。在一个实施例中，该装置包括移动装置，以移动传感器，传感器又包括：可移动传感器可平移的至少一个轨道，以及由控制单元驱动并用于将可移动传感器移动到已知沿着轨道的位置，以便精确地控制沿着轨道的传感器的位置。在另一个实施例中，表面板仅由一个表面限定，或者由多个支撑件限定，并且其中，所述表面板与滚动平面组合在一起，其中，所述条滚动，而所述滚动平面又由仅一个表面或多个支撑，迫使钢筋在最初轧制之后停止在表面板上具有稳定平衡的位置上，每个钢条的纵向轴线的平面平行于表面板本身，以使每个钢板的平直度误差酒吧与平板共面。在另一个实施例中，表面板包括至少一个支撑件，优选地至少两个支撑件，每个支撑件安装在各自的支点上，以便相对于相应的支点在相对侧上倾斜并具有至少两个支承元件，以便最小化静态棒的变形造成其自身重量。

9. 发明授权

EP2857902B1 Immersion exposure apparatus, immersion exposure method, and device fabricating method 有权
标题翻译： Immersionsbelichtungsvorrichtung，Immersionsbelichtungsverfahren，und Verfahren zur Herstellung einer Vorrichtung
公开(公告)号：EP2857902B1
公开(公告)日：2016-04-20
申请号：EP14191452.3
申请日：2007-01-19
申请人： Nikon Corporation
发明人： Shibazaki, Yuichi
IPC分类号： G03F7/20
CPC分类号： G03F7/70725 , G01B11/27 , G01D5/26 , G01D5/266 , G01D18/002 , G03F7/70141 , G03F7/70341 , G03F7/70483 , G03F7/70516 , G03F7/70716 , G03F7/70775 , G03F7/70975 , Y10T29/49826
摘要： Positional information of a movable body (RST) in a Y-axis direction is measured using an interferometer (16y) and an encoder ((24A, 26A 1 ), (24B, 26B 1 )) whose short-term stability of measurement values excels when compared with the interferometer, and based on the measurement results, a predetermined calibration operation for obtaining correction information for correcting measurement values of the encoder is performed. Accordingly, by using measurement values of the interferometer, correction information for correcting the measurement values of the encoder whose short-term stability of the measurement values excels the interferometer is obtained. Then, based on the measurement values of the encoder and the correction information, the movable body is driven in the Y-axis direction with good precision.
摘要翻译：使用干涉仪（16y）和测量值的短期稳定性优异的编码器（（24A，26A 1），（24B，26B 1））来测量Y轴方向上的移动体（RST）的位置信息当与干涉仪相比，并且基于测量结果，执行用于获得用于校正编码器的测量值的校正信息的预定校准操作。因此，通过使用干涉仪的测量值，获得用于校正测量值的短期稳定性优于干涉仪的编码器的测量值的校正信息。然后，基于编码器的测量值和校正信息，使移动体在Y轴方向上以高精度被驱动。

10. 发明公开

EP2963498A1 EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD 有权
标题翻译：曝光装置，曝光方法以及一种用于生产设备
公开(公告)号：EP2963498A1
公开(公告)日：2016-01-06
申请号：EP15178235.6
申请日：2007-01-19
申请人： Nikon Corporation
发明人： Shibazaki, Yuichi
IPC分类号： G03F7/20
CPC分类号： G03F7/70725 , G01B11/27 , G01D5/26 , G01D5/266 , G01D18/002 , G03F7/70141 , G03F7/70341 , G03F7/70483 , G03F7/70516 , G03F7/70716 , G03F7/70775 , G03F7/70975 , Y10T29/49826
摘要： Positional information of a movable body (RST) in a Y-axis direction is measured using an interferometer (16y) and an encoder ((24A, 26A 1 ), (24B, 26B 1 )) whose short-term stability of measurement values excels when compared with the interferometer, and based on the measurement results, a predetermined calibration operation for obtaining correction information for correcting measurement values of the encoder is performed. Accordingly, by using measurement values of the interferometer, correction information for correcting the measurement values of the encoder whose short-term stability of the measurement values excels the interferometer is obtained. Then, based on the measurement values of the encoder and the correction information, the movable body is driven in the Y-axis direction with good precision.

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