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    • 7. 发明公开
    • ORGANIC SEMICONDUCTOR THIN FILM PRODUCTION METHOD
    • 有机半导体薄膜生产方法
    • EP2991129A1
    • 2016-03-02
    • EP14787747.6
    • 2014-04-23
    • Osaka UniversityPi-Crystal Inc.
    • TAKEYA JunichiSOEDA Junshi
    • H01L51/40B05C5/02B05C11/04H01L21/336H01L21/368H01L29/786H01L51/05
    • H01L51/0003B05C5/02B05C5/0254B05C11/028B05C11/04C30B19/063C30B29/58H01L51/0068H01L51/0508H01L51/0558
    • A raw material solution (6), in which an organic semiconductor material is dissolved in a solvent, is supplied to a substrate (1). The solvent is evaporated so that crystals of the organic semiconductor material are precipitated. Thus, an organic semiconductor thin film (7) is formed on the substrate (1). An edge forming member (2) having a contact face (2a) on one side is used and located opposite the substrate (1) so that the plane of the contact face (2a) intersects the surface of the substrate (1) at a predetermined angle. The raw material solution (6) is supplied to the substrate (1) and formed into a droplet (6a) that comes into contact with the contact face (2a). The substrate (1) and the edge forming member (2) are moved relative to each other in a direction parallel to the surface of the substrate (1) so as to separate the edge forming member (2) from the droplet (6a), and while the raw material solution (6) is supplied so that a change in size of the droplet (6a) with the relative movement is maintained within a predetermined range, the solvent contained in the droplet (6a) is evaporated to form the organic semiconductor thin film (7) on the substrate (1) after the contact face (2a) has been moved. In this manner, a large-area organic semiconductor single crystal thin film having high charge mobility can be manufactured by a simple process using a solvent evaporation method based on droplet formation.
    • 将其中有机半导体材料溶解在溶剂中的原料溶液(6)供应到基板(1)。 溶剂蒸发使得有机半导体材料的晶体沉淀。 由此,在基板(1)上形成有机半导体薄膜(7)。 使用在一侧具有接触面(2a)的边缘形成构件(2),并将其定位在与基底(1)相对的位置,使得接触面(2a)的平面与基底(1)的表面以预定的角度 角度。 原料溶液(6)供给至基板(1),并形成与接触面(2a)接触的液滴(6a)。 使基板1和边缘形成构件2在与基板1的表面平行的方向上相对移动,从而使边缘形成构件2与液滴6a分离, 并且在提供原料溶液(6)以使相对移动时液滴(6a)的尺寸变化保持在预定范围内时,使包含在液滴(6a)中的溶剂蒸发以形成有机半导体 在所述接触面(2a)移动之后,在所述基板(1)上形成薄膜(7)。 以这种方式,具有高电荷迁移率的大面积有机半导体单晶薄膜可以通过使用基于液滴形成的溶剂蒸发方法的简单工艺来制造。