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1. 发明公开

EP1832339A1 SUPPORT UNIT FOR MICRO FLUID SYSTEM AND PROCESS FOR PRODUCING THE SAME 审中-公开
标题翻译： TRAGEINHEITFÜRMIKROFLUIDSYSTEM UND HERSTELLUNGSVERFAHRENDAFÜR
公开(公告)号：EP1832339A1
公开(公告)日：2007-09-12
申请号：EP05814263.9
申请日：2005-12-09
申请人： Hitachi Chemical Co., Ltd.
发明人： AKAI, Kunihiko c/o Hitachi Chemical Co.,Ltd , KAWAZOE, Hiroshi c/o Hitachi Chemical Co., Ltd.
IPC分类号： B01J19/00 , B81B1/00 , B81C3/00 , G01N37/00
CPC分类号： B81B3/0067 , B01L3/502707 , B01L2200/025 , B01L2200/12 , B01L2300/0838 , B01L2300/0874 , B81B2201/051 , B81B2203/0338 , Y10T428/24612 , Y10T428/24752 , Y10T428/249921
摘要： The present invention relates to a microfluid-system-supporting unit, comprising a fixing layer formed on a substrate, a protective layer or a fixing layer, wherein part of at least one hollow filament in any shape is placed and fixed in the fixing layer. Thus, it provides a microfluid-system-supporting unit lower in surface irregularity even when there are multiple hollow filaments different in external diameter or the hollow filaments crosses each other and resistant to positional deviation of the hollow filament in the crossing regions, and a production method thereof.
摘要翻译：本发明涉及一种微流体系统支撑单元，其包括形成在基板上的固定层，保护层或固定层，其中至少一个任何形状的中空丝的一部分被放置并固定在固定层中。因此，即使存在外径不同的多个中空丝，也不会使中空丝彼此交叉，并且能够抵抗交叉区域中的中空丝的位置偏差，因此提供了表面不规则性较低的微流体系支撑单元，方法。

2. 发明公开

EP1696206A1 Method for manufacturing vibrating gyrosensor and vibrating element 有权
标题翻译： Produktionsverfahren eines Vibrationskreiselsensors
公开(公告)号：EP1696206A1
公开(公告)日：2006-08-30
申请号：EP06003942.7
申请日：2006-02-27
申请人： SONY CORPORATION
发明人： Inaguma, Teruo Sony Corporation , Honda, Junichi Sony Corporation , Suzuki, Koji Sony Corporation , Takahashi, Kazuo Sony Corporation , Nakashio, Eiji Sony Corporation
IPC分类号： G01C19/56 , G01P9/04
CPC分类号： B81B3/0067 , B81B2201/0285 , B81B2203/0118 , G01C19/5663 , G01P15/0802
摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and a vibrating element mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a plurality of terminals, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer, which are formed on the substrate-facing surface in that order. Furthermore, a reinforcing part is formed at the base end of the vibrator part so that the sectional area of the vibrator part gradually increases toward the base part.
摘要翻译：振动陀螺传感器包括：支撑基板，其上形成有多个平台的布线图案;以及振动元件，安装在支撑基板的表面上。所述振动元件包括基部，所述基部具有安装表面，多个端子和振动器部分以悬臂方式从所述基部的一个侧面整体地突出，并且具有与所述基板的安装表面共面的基板对向表面的基础部分。振子部分具有第一电极层，压电层和第二电极层，它们以依次形成在面向基板的表面上。此外，在振子部的基端形成有加强部，使得振动部的截面积朝向基部逐渐增大。

3. 发明授权

EP1921484B1 Oscillator device, optical deflector and optical instrument using the same 有权
标题翻译：振荡器，光偏转器和光学仪器与此
公开(公告)号：EP1921484B1
公开(公告)日：2009-09-09
申请号：EP08151979.5
申请日：2007-06-05
申请人： Canon Kabushiki Kaisha
发明人： Kato, Takahisa , Furukawa, Yukio , Akiyama, Takahiro
IPC分类号： G02B26/08 , B81B3/00
CPC分类号： G02B26/085 , B81B3/0067 , B81B2201/042 , B81B2203/0181 , Y10T29/42 , Y10T29/49005 , Y10T29/4908 , Y10T156/1052

4. 发明公开

EP1234799A2 Tiltable-body apparatus and method of fabricating the same 有权
标题翻译：可倾斜的身体装置及其制造方法
公开(公告)号：EP1234799A2
公开(公告)日：2002-08-28
申请号：EP02003900.4
申请日：2002-02-21
申请人： CANON KABUSHIKI KAISHA
发明人： Yasuda, Susumu , Mizutani, Hidemasa , Yagi, Takayuki , Shimada, Yasuhiro , Hirose, Futoshi , Kato, Takahisa
IPC分类号： B81B3/00 , B81C1/00 , G02B26/10
CPC分类号： G02B26/105 , B81B3/0051 , B81B3/0067 , B81B2201/038 , B81B2201/042 , B81B2203/0181 , B81B2203/058 , B81C2201/0133 , G02B26/0841 , Y10S359/90 , Y10S359/904
摘要： The tiltable-body apparatus including a frame member, a tiltable body, and a pair of torsion springs having a twisting longitudinal axis. The torsion springs are disposed along the twisting longitudinal axis opposingly with the tiltable body being interposed, support the tiltable body flexibly and rotatably about the twisting longitudinal axis relative to the frame member, and include a plurality of planar portions, compliant directions of which intersect each other when viewed along a direction of the twisting longitudinal axis. A center of gravity of the tiltable body is positioned on the twisting longitudinal axis of the torsion springs.
摘要翻译：该倾斜主体装置包括框架构件，可倾斜主体和具有扭转纵轴的一对扭转弹簧。扭转弹簧沿着扭转纵向轴线与插入可倾斜主体相对设置，将可倾斜主体围绕扭转纵向轴线相对于框架构件柔性地和可旋转地支撑，并且包括多个平面部分，其顺应方向分别与每个平面部分相交其他沿着扭曲的纵向轴线的方向观察时。可倾斜主体的重心位于扭力弹簧的扭转纵轴上。

5. 发明公开

EP1921484A1 Oscillator device, optical deflector and optical instrument using the same 有权
标题翻译：奥斯特灵器，选择放大器和光学仪器
公开(公告)号：EP1921484A1
公开(公告)日：2008-05-14
申请号：EP08151979.5
申请日：2007-06-05
申请人： Canon Kabushiki Kaisha
发明人： Kato, Takahisa , Furukawa, Yukio , Akiyama, Takahiro
IPC分类号： G02B26/08 , B81B3/00
CPC分类号： G02B26/085 , B81B3/0067 , B81B2201/042 , B81B2203/0181 , Y10T29/42 , Y10T29/49005 , Y10T29/4908 , Y10T156/1052
摘要： The invention relates to a method of producing an oscillator device having an oscillating member. This method comprises a step of forming the oscillating member with a movable element having a plurality of protrusions for adjusting a mass of the oscillating member, the protrusions extending from the movable element in a direction parallel to the oscillation axis and being formed in pairs, each pair being disposed at positions symmetrical with respect to the oscillation axis, wherein a sectional area of each protrusion along a plane perpendicular to the oscillation axis is constant in the oscillation axis direction, and a step of projecting a laser beam to a cutting position of each of protrusions to be cut, so as to partly remove the movable element, including a portion of the protrusion ranging from the cutting position to a tip end of the protrusion which portion is not irradiated by the laser beam. The protrusions are so cut that the sum of the lengths removed from the protrusions by the cutting becomes equal to a predetermined length to thereby adjust an inertia moment of the oscillating member.
摘要翻译：本发明涉及一种制造具有摆动部件的振荡器装置的方法。该方法包括用具有多个用于调节摆动部件的质量的突起的可动元件形成振荡部件的步骤，该突起部沿着与振动轴线平行的方向从可动元件延伸并成对成形配置在相对于摆动轴对称的位置处，其中沿着垂直于振动轴的平面的每个突起的截面积在振荡轴方向上是恒定的，并且将激光束投射到每个的切割位置的步骤以便部分地移除可移动元件，该可移动元件包括从切割位置到突起的尖端的一部分，该部分不被激光束照射。突起被切割，使得通过切割从突起去除的长度的总和等于预定长度，从而调节振荡部件的惯性矩。

6. 发明公开

EP1865358A1 Oscillator device, optical deflector and optical instrument using the same 有权
标题翻译：奥斯特灵器，选择放大器和光学仪器
公开(公告)号：EP1865358A1
公开(公告)日：2007-12-12
申请号：EP07109640.8
申请日：2007-06-05
申请人： CANON KABUSHIKI KAISHA
发明人： Kato, Takahisa , Furukawa, Yukio , Akiyama, Takahiro
IPC分类号： G02B26/08 , B81B3/00
CPC分类号： G02B26/085 , B81B3/0067 , B81B2201/042 , B81B2203/0181 , Y10T29/42 , Y10T29/49005 , Y10T29/4908 , Y10T156/1052
摘要： An oscillator device and a method of producing the same, that enables adjustment of an inertia moment or a gravity center position of an oscillating member through wide range and at high speed, wherein the oscillating member oscillates about an oscillation axis 17 and it includes a movable element 11 and a mass adjusting member 19, a cavity 30 being defined between the movable member 11 and a portion of the mass adjusting member 19, such that, in response to irradiation of the mass adjusting member 19 with a laser beam, a material of the mass adjusting member contiguous to the cavity 30 is partly removed, the material being removed thereby including a portion of the mass adjusting member not irradiated with the laser beam.
摘要翻译：一种振荡器装置及其制造方法，其能够通过宽范围和高速度调节摆动构件的惯性矩或重心位置，其中振荡构件围绕振荡轴线17摆动，并且其包括可移动元件11和质量调节构件19，空腔30限定在可动构件11和质量调节构件19的一部分之间，使得响应于用激光束照射质量调节构件19，材料部分地去除与空腔30相邻的质量调节构件，从而被去除的材料包括未被激光束照射的质量调节构件的一部分。

7. 发明授权

EP1234799B1 Tiltable-body apparatus and method of fabricating the same 有权
标题翻译：装置与一个折叠构件和它们的制备方法
公开(公告)号：EP1234799B1
公开(公告)日：2006-06-07
申请号：EP02003900.4
申请日：2002-02-21
申请人： CANON KABUSHIKI KAISHA
发明人： Yasuda, Susumu , Mizutani, Hidemasa , Yagi, Takayuki , Shimada, Yasuhiro , Hirose, Futoshi , Kato, Takahisa
IPC分类号： B81B3/00 , B81C1/00 , G02B26/10
CPC分类号： G02B26/105 , B81B3/0051 , B81B3/0067 , B81B2201/038 , B81B2201/042 , B81B2203/0181 , B81B2203/058 , B81C2201/0133 , G02B26/0841 , Y10S359/90 , Y10S359/904

8. 发明授权

EP1696206B1 Method for manufacturing vibrating gyrosensor 有权
标题翻译：振动陀螺仪传感器的生产
公开(公告)号：EP1696206B1
公开(公告)日：2011-10-26
申请号：EP06003942.7
申请日：2006-02-27
申请人： Sony Corporation
发明人： Inaguma, Teruo Sony Corporation , Honda, Junichi Sony Corporation , Suzuki, Koji Sony Corporation , Takahashi, Kazuo Sony Corporation , Nakashio, Eiji Sony Corporation
IPC分类号： G01C19/56 , G01P9/04
CPC分类号： B81B3/0067 , B81B2201/0285 , B81B2203/0118 , G01C19/5663 , G01P15/0802
摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and a vibrating element mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a plurality of terminals, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer, which are formed on the substrate-facing surface in that order. Furthermore, a reinforcing part is formed at the base end of the vibrator part so that the sectional area of the vibrator part gradually increases toward the base part.

9. 发明授权

EP1865358B1 Oscillator device, optical deflector and optical instrument using the same 有权
标题翻译：振荡器装置，光学偏转器和使用其的光学仪器
公开(公告)号：EP1865358B1
公开(公告)日：2009-10-21
申请号：EP07109640.8
申请日：2007-06-05
申请人： CANON KABUSHIKI KAISHA
发明人： Kato, Takahisa , Furukawa, Yukio , Akiyama, Takahiro
IPC分类号： G02B26/08 , B81B3/00
CPC分类号： G02B26/085 , B81B3/0067 , B81B2201/042 , B81B2203/0181 , Y10T29/42 , Y10T29/49005 , Y10T29/4908 , Y10T156/1052

10. 发明公开

EP1783095A1 Excitation in micromechanical devices 审中-公开
标题翻译： Erregung在mikromechanischen Bauelementen
公开(公告)号：EP1783095A1
公开(公告)日：2007-05-09
申请号：EP05256843.3
申请日：2005-11-04
申请人： Infineon Technologies SensoNor AS
发明人： Westby, Eskild R
IPC分类号： B81B3/00 , G01P15/14 , G01C19/56
CPC分类号： B81B3/0067 , B81B2201/0271 , B81B2203/0109 , G01C19/5712
摘要： A resonant structure for a micromechanical device. The resonant structure comprises a beam and at least one mass attached to the beam. The resonant structure is arranged to have a predominantly rotational excitation mode and an excitation plane in which motion of the excited resonant structure predominantly takes place in use, the at least one mass having a geometry such that none of the principal axes of the rotational inertia tensor of the resonant structure are normal to the excitation plane.
摘要翻译：微机械装置的谐振结构。谐振结构包括梁和附接到梁的至少一个质量。谐振结构被布置为具有主要旋转激励模式和激励平面，其中激发谐振结构的运动主要在使用中发生，所述至少一个质量具有几何形状，使得旋转惯性张量的主轴的谐振结构垂直于激励平面。

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