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1. 发明公开

EP3174689A1 MIKROMECHANISCHE KOMPONENTE UND VERFAHREN ZU IHRER HERSTELLUNG 有权
公开(公告)号：EP3174689A1
公开(公告)日：2017-06-07
申请号：EP15745164.2
申请日：2015-07-14
申请人： Fraunhofer-ges. zur Förderung der Angewandten Forschung E.V.
发明人： SCHIEBEL, Felix , EBERL, Christoph , BERWIND, Matthew , GUMBSCH, Peter
IPC分类号： B29C67/00 , B81C99/00
CPC分类号： B81C1/00373 , B29C64/135 , B33Y10/00 , B33Y80/00 , B81B7/0074 , B81B2201/038 , B81B2201/047 , B81B2203/0315 , B81B2203/0392 , B81C3/001 , B81C99/0095 , B81C2201/0188 , B81C2203/038
摘要： The invention relates to a method for producing micromechanical components (1), wherein a liquid starting material (2) which can be cured by means of irradiation is applied onto a substrate, and a partial volume (21) of the starting material is cured by means of a local irradiation process using a first radiation source in order to produce at least one three-dimensional structure. The three-dimensional structure delimits at least one closed cavity (10), in which at least one part of the liquid starting material (2) is enclosed. The invention further relates to a micromechanical component that contains a liquid starting material (2), which is partly cured by means of irradiation, and at least one cavity (10), in which the liquid starting material (2) is enclosed.
摘要翻译：本发明涉及一种用于制造微机械部件（1）的方法，其中通过照射可以固化的液体原料（2）被施加到基板上，并且部分体积（21）的原材料通过为了产生至少一个三维结构，使用第一辐射源的局部照射过程的装置。三维结构限定了至少一个封闭空腔（10），其中封闭了液体原料（2）的至少一部分。本发明还涉及一种微机械部件，该微机械部件含有通过照射而部分固化的液体原料（2）和至少一个封闭液体原料（2）的空腔（10）。

2. 发明授权

EP2322971B1 Methods and Apparatus for Actuating Displays 有权
标题翻译：用于驱动显示器的方法和装置
公开(公告)号：EP2322971B1
公开(公告)日：2014-04-30
申请号：EP10177223.4
申请日：2006-02-23
申请人： Pixtronix, Inc.
发明人： Hagood, Nesbitt W. , Steyn, Jasper Lodewyk
IPC分类号： G02B26/02 , G09G3/34
CPC分类号： G09G3/3433 , B81B3/0054 , B81B2201/032 , B81B2201/038 , B81B2201/045 , B81B2203/051 , G02B26/02 , G02B26/0841 , G09G2300/0809 , G09G2310/0262

3. 发明公开

EP2712428A1 MEMS ANCHOR AND SPACER STRUCTURE 审中-公开
标题翻译： MEMS锚与架结构
公开(公告)号：EP2712428A1
公开(公告)日：2014-04-02
申请号：EP12724490.3
申请日：2012-05-18
申请人： Pixtronix, Inc.
发明人： BROSNIHAN, Timothy J. , ANDERSSON, Mark B. , FIKE III, Eugene E. , STEYN, Jasper Lodewyk , WU, Joyce
IPC分类号： G02B26/02 , B81C1/00 , B81B7/00 , G09G3/34
CPC分类号： G02B26/02 , B81B7/0067 , B81B2201/038 , B81B2201/047 , B81C1/00 , B81C1/00039 , B81C1/00261 , B81C2203/054 , G09G3/3413 , G09G3/3433 , G09G3/3466 , G09G2320/041 , G09G2360/144 , H01L23/544 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/32 , H01L24/73 , H01L24/81 , H01L24/83 , H01L24/97 , H01L2223/54426 , H01L2224/1132 , H01L2224/114 , H01L2224/11462 , H01L2224/131 , H01L2224/16238 , H01L2224/2612 , H01L2224/29011 , H01L2224/32238 , H01L2224/73201 , H01L2224/81121 , H01L2224/81192 , H01L2224/81815 , H01L2224/83007 , H01L2224/83121 , H01L2924/01029 , H01L2924/12041 , H01L2924/12042 , H01L2924/12043 , H01L2924/12044 , H01L2924/1461 , H01L2924/15788 , Y10T428/24157 , Y10T428/24744 , H01L2924/014 , H01L2924/00014 , H01L2924/00
摘要： A display apparatus includes a first substrate, a plurality of microelectromechanical systems (MEMS) light modulators formed from a structural material coupled to the first substrate and a second substrate separated from the first substrate. A plurality of spacers extend from the first substrate to keep the second substrate a minimum distance away from the plurality of light modulators. The spacers include a first polymer layer having a surface in contact with the first substrate, a second polymer layer encapsulating the first polymer layer and a layer of the structural material encapsulating the second polymer layer. The spacers can be used as fluid barriers and configured to surround more than one but less than all of the MEMS light modulators in the display apparatus.

4. 发明授权

EP2023357B1 A method for fabricating a capacitor and a capacitor 有权
标题翻译：一种用于制造电容器和电容器的制造方法
公开(公告)号：EP2023357B1
公开(公告)日：2011-05-25
申请号：EP07015541.1
申请日：2007-08-07
申请人： Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.
发明人： Schmidt, Oliver, Prof. Dr.
IPC分类号： H01G4/32 , H01G4/30 , B81C1/00
CPC分类号： H01G4/32 , B81B2201/038 , B81C1/0019 , H01G4/30 , Y10T29/435 , Y10T29/49002 , Y10T29/49128 , Y10T29/49155 , Y10T156/1044

5. 发明公开

EP2287110A2 Methods and apparatus for actuating displays 有权
标题翻译： VERFAHREN UND VORRICHTUNG ZURBETÄTIGUNGVON ANZEIGEN
公开(公告)号：EP2287110A2
公开(公告)日：2011-02-23
申请号：EP10176478.5
申请日：2006-02-23
申请人： Pixtronix Inc.
发明人： Hagood, Nesbitt W. , Steyn, Jasper Lodewyk
IPC分类号： B81B3/00 , G02B26/04 , G09G3/22 , B81B7/04 , G02B26/08
CPC分类号： G09G3/3433 , B81B3/0054 , B81B2201/032 , B81B2201/038 , B81B2201/045 , B81B2203/051 , G02B26/02 , G02B26/0841 , G09G2300/0809 , G09G2310/0262
摘要： A display apparatus comprises a modulator for selectively interacting with light in an optical path to form an image on the display apparatus. A controllable first electrostatic actuator provides a first mechanical support for the modulator, the first mechanical support providing a supportive connection from a first location on the modulator to a surface over which the modulator is supported. A second mechanical support provides a supportive connection from a second location on the modulator to the surface. The first electrostatic actuator drives the modulator in a plane substantially parallel to the surface.
摘要翻译：显示装置包括用于选择性地与光路中的光相互作用以在显示装置上形成图像的调制器。可调节的第一静电致动器为调制器提供第一机械支撑，第一机械支撑件提供从调制器上的第一位置到支撑调制器的表面的支撑连接。第二机械支撑件提供从调制器上的第二位置到表面的支撑连接。第一静电致动器驱动调制器在大致平行于表面的平面中。

6. 发明公开

EP2023357A1 A method for fabricating a capacitor and a capacitor 有权
标题翻译： Verfahren zur Herstellung eines Kondensators und Kondensator
公开(公告)号：EP2023357A1
公开(公告)日：2009-02-11
申请号：EP07015541.1
申请日：2007-08-07
申请人： Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.
发明人： Schmidt, Oliver, Prof. Dr.
IPC分类号： H01G4/32 , H01G4/30 , B81C1/00
CPC分类号： H01G4/32 , B81B2201/038 , B81C1/0019 , H01G4/30 , Y10T29/435 , Y10T29/49002 , Y10T29/49128 , Y10T29/49155 , Y10T156/1044
摘要： The method comprises fabricating a layer stack on a substrate, the layer stack comprising at least two electrically conducting layers and at least one electrically insulating layer arranged between the two electrically conducting layers, and displacing a first portion of the layer stack away from its original position, the first portion comprising an edge portion of the layer stack, and bending the first portion back towards a second portion of the layer stack. The bending may comprise a rolling-up of the first portion of the layer stack.
摘要翻译：该方法包括在衬底上制造层叠层，所述层堆叠包括至少两个导电层和布置在两个导电层之间的至少一个电绝缘层，以及使层堆叠的第一部分远离其原始位置所述第一部分包括所述层堆叠的边缘部分，并且将所述第一部分向所述层堆叠的第二部分弯曲。弯曲可以包括层叠体的第一部分的卷起。

7. 发明公开

EP1170248A3 Microelectromechanical actuators including sinuous beam structures 审中-公开
标题翻译：含有微机械致动器sinusformige振动杆结构
公开(公告)号：EP1170248A3
公开(公告)日：2003-03-12
申请号：EP01305660.1
申请日：2001-06-29
申请人： JDS Uniphase Corporation
发明人： Hill, Edward Arthur , Dhuler, Vijaykumar Rudrappa , Cowen, Allen Bruce , Mahadevan, Ramaswamy , Wood, Robert L
IPC分类号： B81B3/00 , H01H1/00 , H01H59/00 , F16K31/00 , F03G7/06
CPC分类号： B81B3/0051 , B81B2201/038 , B81B2203/0109 , B81B2203/056 , H01H1/0036 , H01H61/00 , H01H2061/006
摘要： In embodiments of the present invention, a microelectromechanical actuator includes a beam having respective first and second ends attached to a substrate and a body disposed between the first and second ends having a sinuous shape. The body includes a portion operative to engage a object of actuation and apply a force thereto in a direction perpendicular to the beam responsive to at least one of a compressive force and a tensile force on the beam. The sinuous shape may be sinusoidal, e.g., a shape approximating a single period of a cosine curve or a single period of a sine curve. The beam may be thermally actuated or driven by another actuator. In other embodiments, a rotary actuator includes first and second beams, a respective one of which has first and second ends attached to a substrate and a body disposed between the first and second ends. Each body includes first and second oppositely inflected portions. The bodies of the first and second beams intersect one another at points at which the first and second oppositely inflected portions of the first and second bodies meet. The bodies of the first and second beams are operative to engage the object of actuation and rotate the object of actuation around the point of intersection responsive to at least one of compressive force and tensile force on the first and second beams. Related methods are also described.

8. 发明公开

EP1089109A2 Mems variable optical attenuator 有权
标题翻译： MEMS变速器选择器Abschwächer
公开(公告)号：EP1089109A2
公开(公告)日：2001-04-04
申请号：EP00307696.5
申请日：2000-09-06
申请人： JDS Uniphase Inc.
发明人： Dhuler, Vijayakumar R. , Hill, Edward A. , Mahadevan, Ramaswamy , Walters, Mark David , Wood, Robert L.
IPC分类号： G02B26/02 , B81B3/00
CPC分类号： G02B26/0841 , B81B3/0054 , B81B2201/038 , B81B2201/047 , G02B6/266
摘要： A MEMS (Micro Electro Mechanical System) variable optical attenuator is provided that is capable of optical attenuation over a full range of optical power. The MEMS variable optical attenuator comprises a microelectronic substrate, a MEMS actuator and an optical shutter. The MEMS variable optical attenuator may also comprise a clamping element capable of locking the optical shutter at a desired attenuation position. The variable light attenuator is capable of attenuating optical beams that have their optical axis running parallel and perpendicular to the substrate. Additionally, the MEMS actuator of the present invention may comprise an array of MEMS actuators capable of supplying the optical shutter with greater displacement distances and, thus a fuller range of optical attenuation. In one embodiment of the invention, the MEMS actuator comprises a thermal arched beam actuator. Additionally, the variable optical attenuator of the present invention may be embodied in a thermal bimorph cantilever structure. This alternate embodiment includes a microelectronic substrate and a thermal bimorph cantilever structure having at least two materials of different thermal coefficient of expansion. The thermal bimorph is responsive to thermal activation and moves in the direction of the material having the lower thermal coefficient expansion. Upon activation, the thermal bimorph intercepts the path of the optical beam and provides for the desired level of optical attenuation. The invention also provides for a method of optical attenuation and a method for fabricating an optical attenuator in accordance with the described structures.
摘要翻译：提供了能够在全光范围内进行光衰减的MEMS（微机电系统）可变光衰减器。 MEMS可变光衰减器包括微电子衬底，MEMS致动器和光学快门。 MEMS可变光衰减器还可以包括能够将光学快门锁定在期望的衰减位置的夹紧元件。可变光衰减器能够使其光轴平行且垂直于衬底的光束衰减。此外，本发明的MEMS致动器可以包括MEMS致动器的阵列，其能够向光学快门提供更大的位移距离，并且因此具有更宽的光学衰减范围。在本发明的一个实施例中，MEMS致动器包括热拱形梁致动器。此外，本发明的可变光衰减器可以以热双压电晶片悬臂结构体现。该替代实施例包括具有不同热膨胀系数的至少两种材料的微电子衬底和热双压电晶片悬臂结构。热双压电晶体响应于热激活并沿具有较低热系数膨胀的材料的方向移动。在激活时，热双压电晶片截取光束的路径，并提供所需的光衰减水平。本发明还提供了一种光衰减的方法以及根据所述结构制造光衰减器的方法。

9. 发明公开

EP3412625A1 PROCEDE DE FABRICATION D'UNE PIECE MICROMECANIQUE 审中-公开
公开(公告)号：EP3412625A1
公开(公告)日：2018-12-12
申请号：EP17174415.4
申请日：2017-06-05
申请人： Nivarox-FAR S.A.
发明人： Cretenet, Davy
IPC分类号： B81C99/00
CPC分类号： B81C99/008 , B81B2201/035 , B81B2201/038
摘要： L'invention se rapporte à un procédé de fabrication d'une pièce mécanique (51) comportant les étapes suivantes :
- se munir (3) d'un substrat (53) en un matériau micro-usinable ;
- graver (5) par photolithographie, dans la totalité de l'épaisseur dudit substrat, un motif (50) comportant ladite pièce avec au moins un pont de matière (57) ;
caractérisé en ce qu'il comporte en outre les étapes suivantes :
- réaliser (13) une fragilisation à coeur du pont de matière (91) afin de former une amorce de rupture (91) le long d'une ligne de rupture (L) du pont de matière (57) ;
- libérer (11) la pièce (51) du substrat (53) afin de la monter dans un dispositif.

10. 发明公开

EP2847789A1 COMPLIANT MICRO DEVICE TRANSFER HEAD 有权转让
标题翻译：符合转移头的微型器件
公开(公告)号：EP2847789A1
公开(公告)日：2015-03-18
申请号：EP13788027.4
申请日：2013-05-01
申请人： Luxvue Technology Corporation
发明人： BIBL, Andreas , HIGGINSON, John A. , HU, Hsin-Hua
IPC分类号： H01L21/677 , H01L21/50 , B65G49/07
CPC分类号： B41J2/385 , B25J15/0052 , B25J15/0085 , B41J2/39 , B81B2201/038 , B81C99/002 , H01L21/67144 , H01L21/6835 , H01L24/75 , H01L24/83 , H01L24/97 , H01L25/0753 , H01L33/0079 , H01L2221/68322 , H01L2221/68354 , H01L2221/68363 , H01L2221/68381 , H01L2224/29036 , H01L2224/29101 , H01L2224/2919 , H01L2224/7565 , H01L2224/7598 , H01L2224/83815 , H01L2224/83855 , H01L2224/97 , H01L2924/12041 , H01L2924/00 , H01L2224/83 , H01L2924/00014
摘要： A compliant micro device transfer head and head array are disclosed. In an embodiment a micro device transfer head includes a spring portion that is deflectable into a space between a base substrate and the spring portion.

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