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1. 发明公开

EP4419866A1 PROCÉDÉ DE CARACTÉRISATION FONCTIONNELLE D'OBJECTIFS OPTIQUES 审中-实审
公开(公告)号：EP4419866A1
公开(公告)日：2024-08-28
申请号：EP22808730.0
申请日：2022-10-21
申请人： Fogale Nanotech
发明人： LEGROS, Eric , PETITGRAND, Sylvain
IPC分类号： G01B11/24 , G01M11/02
CPC分类号： G01M11/0271 , G01B11/2441 , G01B9/0209

2. 发明授权

EP3475036B1 DISPOSITIF DE DÉTECTION MULTI-DISTANCES POUR UN ROBOT, ET ROBOT EQUIPÉ DE TEL(S) DISPOSITIF(S) 有权
公开(公告)号：EP3475036B1
公开(公告)日：2020-01-08
申请号：EP18759892.5
申请日：2018-08-16
申请人： Fogale Nanotech
发明人： ROZIERE, Didier , COURTEVILLE, Alain
IPC分类号： B25J13/08 , B25J19/02 , B25J19/06

3. 发明公开

EP3175428A1 PROCÉDÉ D'EXTRACTION DE MOTIFS NON PÉRIODIQUES MASQUES PAR DES MOTIFS PÉRIODIQUES, ET DISPOSITIF METTANT EN OEUVRE LE PROCÉDÉ 审中-公开
标题翻译：提取方法不是周期性变化的规律的周期性模式掩码和设备用于实施过程
公开(公告)号：EP3175428A1
公开(公告)日：2017-06-07
申请号：EP15749755.3
申请日：2015-07-29
申请人： Fogale Nanotech
发明人： THOUY, Benoît
IPC分类号： G06T7/00 , G06K9/00 , H01L23/544 , H01L21/67
CPC分类号： G06T7/0004 , G06K9/00503 , G06K9/0051 , G06K9/36 , G06K19/06009 , G06T5/002 , G06T5/10 , G06T2207/20048 , G06T2207/20056 , G06T2207/30141 , G06T2207/30148 , H01L21/67294 , H01L23/544 , H01L2223/544 , H01L2223/54406 , H01L2223/54413 , H01L2223/54433 , H01L2223/54453 , H01L2924/0002 , H01L2924/00
摘要： The present invention relates to a method for extracting information of interest from a measurement signal including a periodical interference pattern, including the steps of: (i) generating a filtering function, representing the frequency components of the interference pattern, by implementing an analysis of an amplitude spectrum of the measurement signal based on morphological criteria; (ii) applying said filtering function to the measurement signal so as to generate an interference signal essentially consisting of the interference pattern; and (iii) calculating a filtered signal by determining a difference between the measurement signal and the interference signal. The invention also relates to a device implementing the method.
摘要翻译：因此，本发明涉及实现该方法的装置。

4. 发明公开

EP3077873A1 DISPOSITIF ET PROCEDE DE POSITIONNEMENT DE MASQUE DE PHOTOLITHOGRAPHIE PAR METHODE OPTIQUE SANS CONTACT 失效转让
标题翻译： DEVICE AND METHOD FOR定位光刻掩膜由非接触式光学方法来
公开(公告)号：EP3077873A1
公开(公告)日：2016-10-12
申请号：EP14814785.3
申请日：2014-11-28
申请人： Fogale Nanotech
发明人： FRESQUET, Gilles , RIBETTE, Guenael
IPC分类号： G03F9/00
CPC分类号： G03F7/70733 , G03F9/703 , G03F9/7038 , G03F9/7088
摘要： The present invention relates to a device for positioning a mask (10) in relation to the surface of a wafer (11), with a view to exposing said wafer to light (11). Said device includes: (i) first positioning means (20) capable of holding and moving said mask (10) and said wafer (11), relative to one another; (ii) imaging means (20, 22, 23, 30) capable of producing at least one image of the mask (10) and of the surface of the wafer (11) along at least one visual field (14), such as to simultaneously image, within said visual field (14), reference points (12, 13) for positioning said mask (10) and said wafer (11); and (iii) at least one optical distance sensor (26) capable of producing a distance measurement between the surface of the wafer (11) and the mask (10), within said visual field(s) (14), using a measurement beam (15, 28) that passes at least partially through the imaging means. The invention also relates to a method, implemented in said device, and to an apparatus.
摘要翻译：一种用于相对于晶片的表面的掩模，以期定位到晶片，其中包括：（i）适合于保持和移动所述掩模和相对于海誓山盟晶片第一定位结构的曝光装置; （二）成像结构适用于生产所述掩模的至少一个图像和晶片雅丁到的视图的至少一个字段的表面，从而将掩模的图像定位标记和晶片的同时在视场 ; 和适合于制造水的表面和掩模之间的距离的测量中的视场（S），与测量光束，它通过成像结构至少部分地通过（iii）至少一个光学距离传感器。

5. 发明公开

EP2943851A2 VIRTUAL SENSOR SYSTEMS AND METHODS 有权转让
标题翻译：虚拟传感器的系统和方法
公开(公告)号：EP2943851A2
公开(公告)日：2015-11-18
申请号：EP13846260.1
申请日：2013-12-30
申请人： Ayotle
发明人： YBANEZ ZEPEDA, José, Alonso
IPC分类号： G06F3/01 , G06F3/0484 , G06F3/0481 , G06F3/03
CPC分类号： G06F3/01 , G06F3/017 , G06F3/0304 , G06F3/04815 , G06F3/04842
摘要： Methods and systems for detecting activation of a virtual sensor in a scene are proposed, wherein the virtual sensor comprises data representing a geometric form, data representing a position in the scene and data representing one or several trigger conditions. A data representation of the scene is captured, and a determination of whether a virtual sensor trigger condition is fulfilled is made, based on an analysis of the captured data representation in an area corresponding to the geometric form and position of the virtual sensor.

6. 发明授权

EP3580521B1 LIGNE A RETARD OPTIQUE, INTERFEROMETRE A FAIBLE COHERENCE IMPLEMENTANT CETTE LIGNE, DISPOSITIF ET PROCEDE DE MESURE METTANT EN OEUVRE CET INTERFEROMETRE 有权
公开(公告)号：EP3580521B1
公开(公告)日：2021-11-24
申请号：EP18706418.3
申请日：2018-02-02
发明人： COURTEVILLE, Alain
IPC分类号： G01B9/02 , G01B11/06

7. 发明公开

EP3676061A1 ROBOT DOTÉ D'UNE TÊTE FONCTIONNELLE AVEC UNE DÉTECTION MULTI-DISTANCES 无效转让
公开(公告)号：EP3676061A1
公开(公告)日：2020-07-08
申请号：EP18759893.3
申请日：2018-08-16
申请人： Fogale Nanotech
发明人： ROZIERE, Didier , COURTEVILLE, Alain
IPC分类号： B25J15/00 , B25J19/02 , B25J13/08 , B25J9/16

8. 发明公开

EP2842018A1 DISPOSITIF DE DETECTION CAPACITIVE AVEC ARRANGEMENT DE PISTES DE LIAISON, ET PROCEDE METTANT EN OEUVRE UN TEL DISPOSITIF 审中-公开
标题翻译： DEVICE电容式感应与安排，使用这种设备的连接通道和方法
公开(公告)号：EP2842018A1
公开(公告)日：2015-03-04
申请号：EP13721285.8
申请日：2013-04-16
申请人： Fogale Nanotech
发明人： ROZIERE, Didier , BLONDIN, Christophe
IPC分类号： G06F3/044 , G06F3/041
CPC分类号： G06F3/044 , G06F3/0416 , G06F3/0418 , G06F3/0484 , G06F2203/04104 , G06F2203/04107 , G06F2203/04108
摘要： The invention relates to a man-machine interface device exhibiting a transparent detection zone and an access zone, this device comprising: - a surface of electrodes made of a material which is transparent and conducting in the detection zone, - conducting connection tracks disposed in the access zone and connected to the surface of electrodes, - a first conducting surface made of a transparent material, present in the transparent zone, and used as guard for the electrodes surface. The conducting connection tracks are disposed sandwich-like between a second and a third conducting surface used as second and third guards for these conducting connection tracks. The device also comprises linking tracks made of a transparent conducting material for linking the conducting connection tracks to electrodes of the electrodes surface, these linking tracks being: - positioned between the electrodes when these linking tracks are situated on the detection surface, and - positioned between the second and third guards when these linking tracks are situated in the access zone.
摘要翻译：人机界面装置提供了一种具有透明检测区和访问区域，并且包括具有从检测区中的导电透明材料制成的电极的表面上，导电连接印制线设置在接入区和连接到具有表面电极在透明区域中的第一导电表面由透明材料制成，并用作用于具有表面电极的保护。连接轨道被布置在第二和用作用于合成连接线路的第二和第三防护装置的第三导电表面之间的夹层。连接轨道由透明导电材料制成的连接线路连接到电极上的具有表面电极。链接轨迹电极当论文联轨道位于检测表面上定位之间; 以及第二和第三防护装置之间定位成当论文联的轨道是在接入区。

9. 发明公开

EP2828730A1 DISPOSITIF DE DETECTION CAPACITIVE INTEGRANT UNE PISTE METALLIQUE SUR UNE GARDE TRANSPARENTE 审中-公开
标题翻译： KAPAZITIVE MESSVORRICHTUNG MIT EINEM METALLSTREIFEN AUF EINER TRANSPARENTEN SCHUTZVORRICHTUNG
公开(公告)号：EP2828730A1
公开(公告)日：2015-01-28
申请号：EP13719028.6
申请日：2013-03-22
申请人： Fogale Nanotech
发明人： NEEL, Christian , BLONDIN, Christophe
IPC分类号： G06F3/044
摘要： The invention relates to a human-machine interface device (AP) having a transparent area (SD) for viewing a display screen (EC) and an access area (SND) in which there is at least one metal connector (CF) connected to at least two planes arranged above the display screen, said planes being: an electrode plane (E, PT) made of a transparent resistive conductive material, said plane being present in the transparent area, a conductor plane (G) made of a transparent resistive conductive material used as an active guard (G) for the electrode plane, said active guard being present in the transparent area and extending into the access area. The device according to the invention comprises at least one metal strip (PM), referred to as the guard strip (PM), for reducing the resistance of the guard, said guard strip being arranged within the access area (SND) and connected to the active guard (G) and to the metal connector (CF), the latter being connected to the electrode plane (E, PT) such that the conductor plane (G) and the electrode plane (E, PT) are at substantially the same potential.
摘要翻译：提供一种人机界面装置，其具有用于观看显示屏的透明区域和包括连接到布置在显示屏上方的至少两个平面的至少一个金属连接器的访问区域，所述平面包括由透明电阻制成的电极平面导电材料，位于透明区域中的平面，由用作电极平面的主动防护件的透明电阻导电材料制成的导体平面，主动防护件位于透明区域中并延伸到通路区域。本装置包括至少一个保护条，用于减小防护装置的电阻，防护条布置在通路区域内并连接到主动防护件和金属连接器，金属连接器连接到电极平面，使得导体平面和电极平面处于基本相同的电位。

10. 发明授权

EP3980715B1 DISPOSITIF ET PROCÉDÉ DE MESURE D'INTERFACES D'UN ÉLÉMENT OPTIQUE 有权
公开(公告)号：EP3980715B1
公开(公告)日：2024-08-28
申请号：EP19779530.5
申请日：2019-06-07
IPC分类号： G01B11/24 , G01B9/0209 , G01B9/02015 , G01B9/02 , G01B11/00 , G01B11/06 , G01B11/14 , G01M11/02 , G02B27/62 , G02B13/00
CPC分类号： G01B9/0209 , G01B11/002 , G01B11/0675 , G01B11/14 , G02B27/62 , G01B11/2441 , G01B9/02027 , G01B9/02047 , G01B9/02084 , G01M11/0271 , G02B13/001

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