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1. 发明授权

EP1872637B1 VORRICHTUNG UND VERFAHREN ZUR PLASMABESCHICHTUNG 有权
标题翻译：设备和方法等离子涂层
公开(公告)号：EP1872637B1
公开(公告)日：2014-05-07
申请号：EP06722775.1
申请日：2006-04-11
申请人： Dr. Laure Plasmatechnologie Gmbh
发明人： LAURE, Stefan
IPC分类号： H05H1/42 , C23C4/12 , B05B7/22
CPC分类号： B05B7/226 , H05H1/42

2. 发明公开

EP1872637A1 VORRICHTUNG UND VERFAHREN ZUR PLASMABESCHICHTUNG 有权
标题翻译： VORRICHTUNG VERFAHREN ZUR PLASMABESCHICHTUNG
公开(公告)号：EP1872637A1
公开(公告)日：2008-01-02
申请号：EP06722775.1
申请日：2006-04-11
申请人： Dr. Laure Plasmatechnologie Gmbh
发明人： LAURE, Stefan
IPC分类号： H05H1/42 , C23C4/12 , B05B7/22
CPC分类号： B05B7/226 , H05H1/42
摘要： Disclosed are a device and a method for plasma coating parts having a large volume. The inventive device comprises a vacuum chamber (3) with one or several pumps, a mechanism (2) for conveying the part (1, 17) into the vacuum chamber (3), an insulation (4) between the part (1, 17) and the vacuum chamber (3), an oscillating circuit with a high-frequency generator (5), an adjustable capacitor and an adjustable inductor of the oscillating circuit, at least one connection for connecting the oscillating circuit to the part (1), and at least one plasma torch (19) that is joined to the vacuum chamber (3) and is used for processing a coating material for the part (1, 17).
摘要翻译：本发明涉及一种用于等离子体涂覆大体积零件的装置和方法。为此，具有一个或多个泵的真空室（3），用于将部件（1,17）输送到真空室（3）中的输送装置（2），部件（1），17）和真空室（3），具有高频发生器（5）的振荡电路，振荡电路的可调电容和可调电感，至少一个连接振荡电路与部件（1）的连接，并且提供连接到真空室（3）的至少一个等离子体焰炬（19），用于制备用于部件（1,17）的涂层材料。

3. 发明授权

EP2142679B1 VERFAHREN ZUR PLASMAGESTÜTZTEN OBERFLÄCHENBEHANDLUNG GROßVOLUMIGER BAUTEILE 有权
标题翻译：等离子体方法辅助表面处理大批量零件
公开(公告)号：EP2142679B1
公开(公告)日：2013-05-22
申请号：EP08715554.5
申请日：2008-03-10
申请人： Dr. Laure Plasmatechnologie Gmbh
发明人： LAURE, Stefan
IPC分类号： C23C4/10 , C23C4/12 , C23C14/56 , H01J37/32 , H05H1/42 , C23C16/455
CPC分类号： H05H1/46 , C23C4/134 , C23C16/455 , C23C16/509 , C23C16/517 , F26B5/048 , F26B2210/12 , H01J37/32091 , H01J37/32376 , H01J37/3244

4. 发明授权

EP2313538B1 VORRICHTUNG ZUR PLASMAGESTÜTZTEN BESCHICHTUNG DER INNENSEITE VON ROHRFÖRMIGEN BAUTEILEN. 有权
标题翻译：装置等离子基涂层管状构件的内部。
公开(公告)号：EP2313538B1
公开(公告)日：2014-03-05
申请号：EP09776015.1
申请日：2009-07-27
申请人： Dr. Laure Plasmatechnologie GmbH
发明人： LAURE, Stefan
IPC分类号： F27D99/00 , C23C16/04 , C23C16/44
CPC分类号： C23C16/4409 , C23C16/045 , F27D99/0073

5. 发明公开

EP2313538A1 VORRICHTUNG ZUR PLASMAGESTÜTZTEN BESCHICHTUNG DER INNENSEITE VON ROHRFÖRMIGEN BAUTEILEN 有权
标题翻译：装置等离子基涂层管状构件的内部。
公开(公告)号：EP2313538A1
公开(公告)日：2011-04-27
申请号：EP09776015.1
申请日：2009-07-27
申请人： Dr. Laure Plasmatechnologie GmbH
发明人： LAURE, Stefan
IPC分类号： C23C16/44 , C23C16/04
CPC分类号： C23C16/4409 , C23C16/045 , F27D99/0073
摘要： The invention relates to a device for plasma-assisted coating the inner side of tubular components by means of a high frequency magnetic field. Said device comprises at least two receiving bodies (4) which accommodate a tubular component (3) on the ends thereof, maintains said component and seals the inside of the tubular component (3) with respect to surroundings, an inflatable seal (9) on the receiving body (4) that is arranged about the outer side and/or the front side of a tubular component (3), said seal forming, when inflated, a seal of the transition between the receiving body (4) and the tubular component (3) in relation to the surroundings, a high frequency circuit for producing a high frequency magnetic field, a coil (6) of the high frequency circuit, the windings thereof being coaxial to the longitudinal axis of said device. Said longitudinal axis is predefined by a straight line that extends through both receiving bodies (4), and a drive for the coil (6) and/or the receiving body (4), said drive displacing the coil (6) in relation to the receiving bodies (4) or the receiving body (4) in relation to the coil (6).

6. 发明公开

EP2127503A2 VORRICHTUNG UND EIN VERFAHREN ZUR PLASMAGESTÜTZTEN BESCHICHTUNG UND OBERFLÄCHENBEHANDLUNG GROSSVOLUMIGER BAUTEILE 有权
标题翻译： DEVICE AND METHOD FOR等离子体辅助涂覆和表面处理的大批量零件
公开(公告)号：EP2127503A2
公开(公告)日：2009-12-02
申请号：EP08715522.2
申请日：2008-02-26
申请人： Dr. Laure Plasmatechnologie Gmbh
发明人： LAURE, Stefan
IPC分类号： H05H1/46
CPC分类号： H05H1/46 , C23C16/511
摘要： Disclosed are an apparatus and a method for plasma-assisted coating and surface treatment of voluminous parts. The apparatus features: - a vacuum chamber (3, 20, 32) comprising one or more pumps; - a first resonant circuit comprising a first high-frequency generator (5, 17, 28, 40); - an adjustable capacity and an adjustable inductance of the first resonant circuit; - a first connection for integrating the part (1, 21, 32, 39) in the first resonant circuit; - at least one second resonant circuit comprising a second high-frequency generator (18, 29, 40); - a second connection for integrating the part (1, 21, 32, 39) in the second resonant circuit; - and an adjustable capacity and an adjustable inductance of the second resonant circuit. According to the disclosed method, the inductance and/or the capacity of the first and second resonant circuit is/are adapted to the part (1, 21, 31, 39).

7. 发明公开

EP1884576A2 Vorrichtung zur Plasmabeschichtung von länglichen, zylindrischen Bauteilen 有权
标题翻译： Vorrichtung zur Plasmabeschichtung vonlänglichen，zylindrischen Bauteilen
公开(公告)号：EP1884576A2
公开(公告)日：2008-02-06
申请号：EP07014730.1
申请日：2007-07-26
申请人： Dr. Laure Plasmatechnologie Gmbh
发明人： Laure, Stefan, Dr.
IPC分类号： C23C14/56
CPC分类号： C23C14/56 , C23C4/14 , C23C14/505 , C23C14/566 , C23C16/458 , C23C16/513 , C23C16/54
摘要： Es wird eine Vorrichtung zur Plasmabeschichtung von länglichen, zylindrischen Bauteilen, insbesondere rohrförmigen Bauteilen, vorgeschlagen, welche ausgestattet ist mit einer Prozesskammer (1) mit einer oder mehreren Pumpen (8) zur Evakuierung der Prozesskammer (1), mit einer ersten und einer zweiten länglichen Transferkammer (2. 3), welche durch ein erstes und ein zweites Absperrorgan (5, 6) mit der Prozesskammer (1) verbunden sind, mit einer oder mehreren Pumpen (9) der ersten und der zweiten Transferkammer (2, 3) zur Evakuierung der ersten und der zweiten Transferkammer (2, 3), wobei die Längsachsen der beiden Transferkammern koaxial zueinander verlaufen, mit einem Plasmabrenner (10) in oder an der Prozesskammer (1), dessen Plasmastrahl unter einem von 0° und 180° verschiedenen Winkel gegen die Längsachsen der ersten und zweiten Transferkammer (2, 3) gerichtet ist, mit einer Zufuhreinrichtung (18, 19, 20) in der Prozesskammer (1) für die Zufuhr des Beschichtungswerkstoffs in den Plasmastrahl, und mit einer Transporteinrichtung (11) in der ersten und/ oder der zweiten Transferkammer (2, 3) um das Bauteil der Prozesskammer (1) zuzuführen und aus der Prozesskammer (1) abzuführen.
摘要翻译：该装置具有一个具有一个或多个用于排出处理室的泵（8）的处理室（1），其具有长方形的传送室（2）。传送室通过关闭装置（5）与处理室连接。另一转运室（3）通过另一个截止装置（6）与处理室连接，其纵向轴线同轴地运行到前一转运室。电子手电筒（10）设置在处理室中或其上。在处理室中设置供应机构，用于将涂料供应到等离子体束中。

8. 发明授权

EP1884576B1 Vorrichtung zur Plasmabeschichtung von länglichen, zylindrischen Bauteilen 有权
标题翻译：一种用于细长的圆柱形部件的等离子体涂覆设备
公开(公告)号：EP1884576B1
公开(公告)日：2012-09-12
申请号：EP07014730.1
申请日：2007-07-26
申请人： Dr. Laure Plasmatechnologie Gmbh
发明人： Laure, Stefan, Dr.
IPC分类号： C23C14/56 , C23C14/50 , C23C16/458 , C23C4/14
CPC分类号： C23C14/56 , C23C4/14 , C23C14/505 , C23C14/566 , C23C16/458 , C23C16/513 , C23C16/54

9. 发明授权

EP2127503B1 VORRICHTUNG UND EIN VERFAHREN ZUR PLASMAGESTÜTZTEN BESCHICHTUNG UND OBERFLÄCHENBEHANDLUNG GROSSVOLUMIGER BAUTEILE 有权
标题翻译： DEVICE AND METHOD FOR等离子体辅助涂覆和表面处理的大批量零件
公开(公告)号：EP2127503B1
公开(公告)日：2011-05-11
申请号：EP08715522.2
申请日：2008-02-26
申请人： Dr. Laure Plasmatechnologie Gmbh
发明人： LAURE, Stefan
IPC分类号： H05H1/46
CPC分类号： H05H1/46 , C23C16/511
摘要： Disclosed are an apparatus and a method for plasma-assisted coating and surface treatment of voluminous parts. The apparatus features: - a vacuum chamber (3, 20, 32) comprising one or more pumps; - a first resonant circuit comprising a first high-frequency generator (5, 17, 28, 40); - an adjustable capacity and an adjustable inductance of the first resonant circuit; - a first connection for integrating the part (1, 21, 32, 39) in the first resonant circuit; - at least one second resonant circuit comprising a second high-frequency generator (18, 29, 40); - a second connection for integrating the part (1, 21, 32, 39) in the second resonant circuit; - and an adjustable capacity and an adjustable inductance of the second resonant circuit. According to the disclosed method, the inductance and/or the capacity of the first and second resonant circuit is/are adapted to the part (1, 21, 31, 39).

10. 发明公开

EP2142679A2 VERFAHREN UND VORRICHTUNG ZUR PLASMAGESTÜTZTEN OBERFLÄCHENBEHANDLUNG GROßVOLUMIGER BAUTEILE 有权
标题翻译：等离子体方法辅助表面处理大批量零件
公开(公告)号：EP2142679A2
公开(公告)日：2010-01-13
申请号：EP08715554.5
申请日：2008-03-10
申请人： Dr. Laure Plasmatechnologie Gmbh
发明人： LAURE, Stefan
IPC分类号： C23C4/10 , C23C4/12 , C23C14/56 , H01J37/32 , H05H1/42 , C23C16/455
CPC分类号： H05H1/46 , C23C4/134 , C23C16/455 , C23C16/509 , C23C16/517 , F26B5/048 , F26B2210/12 , H01J37/32091 , H01J37/32376 , H01J37/3244
摘要： The invention relates to a method and a device for the plasma-assisted surface treatment of large-volume components. The component (1) is arranged in a vacuum chamber and the vacuum chamber (3) evacuated. The component (1) is connected to at least one resonant circuit (7) comprising a high-frequency generator (5), and the inductance and/or the capacitance of the resonant circuit (7) is adapted to the component (1). The high-frequency generator is switched on and the plasma ignited. At least one nitrogen oxide is introduced into the vacuum chamber (3) as a working gas and/or as a carrier gas. The reaction of the nitrogen oxide in the plasma burning on the surface of the component generates electromagnetic radiation and/or free electrons. To this end, the device is provided with a vacuum chamber (3), at least one resonant circuit (7) comprising a high-frequency generator (5), the capacitance and inductance of the resonant circuit (7) being adjustable, at least one connection (8) for connecting the resonant circuit (7) to the component (1), and a device (17) for introducing nitrogen oxide into the vacuum chamber (3).

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