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1. 发明授权

EP1388369B1 Capillary-channel probes for liquid pickup, transportation and dispense using spring beams 有权
标题翻译： Kapillarkanalsonden使用弹簧臂接收，运输和分配液体的
公开(公告)号：EP1388369B1
公开(公告)日：2015-04-29
申请号：EP03254696.2
申请日：2003-07-28
申请人： Xerox Corporation
发明人： Hantschel, Thomas , Fork, David K. , Rosa, Michael A. , DeBruyer, Dirk , Chow, Eugene M.
IPC分类号： B01L3/02 , B01L3/00 , B81B3/00 , B01J19/00 , G01N35/10 , B41J2/16 , B41J2/14 , C40B60/14 , G03F7/00 , G01N35/00 , B82Y40/00 , B82Y10/00
CPC分类号： G01N35/1074 , B01J2219/00387 , B01L3/0244 , B01L3/0255 , B01L3/502715 , B01L2300/0819 , B01L2400/025 , B01L2400/0406 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1643 , C40B60/14 , G01N35/1009 , G01N2035/00237 , G01N2035/1037 , G03F7/0002 , Y10T436/2575

2. 发明公开

EP2311567A1 Capillary-channel probes for liquid pickup, transportation and dispense using spring beams 有权
标题翻译： Kapillarkanalsonden使用弹簧臂接收，运输和分配液体的
公开(公告)号：EP2311567A1
公开(公告)日：2011-04-20
申请号：EP10181968.8
申请日：2003-07-28
申请人： Xerox Corporation
发明人： Hantschel, Thomas , Fork, David K , Rosa, Michael A , DeBruyker, Dirk , Chow, Eugene M
IPC分类号： B01L3/02 , B01L3/00 , B81B3/00 , B01J19/00 , G01N35/10 , G01N35/00
CPC分类号： G01N35/1074 , B01J2219/00387 , B01L3/0244 , B01L3/0255 , B01L3/502715 , B01L2300/0819 , B01L2400/025 , B01L2400/0406 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1643 , C40B60/14 , G01N35/1009 , G01N2035/00237 , G01N2035/1037 , G03F7/0002 , Y10T436/2575
摘要： Fluidic conduits (330A), which can be used in microarraying systems (300), dip pen nanolithography systems, fluidic circuits, and microfluidic systems, are disclosed that use channel spring probes (350) that include at least one capillary channel (351). Formed from spring beams (e.g., stressy metal beams) that curve away from the substrate when released, channels (351) can either be integrated into the spring beams (300) or formed on the spring beams. Capillary forces produced by the narrow channels (351) allow liquid to be gathered, held, and dispensed by the channel spring probes. Because the channel spring beams can be produced using conventional semiconductor processes, significant design flexibility and cost efficiencies can be achieved.
摘要翻译：流体导管（330A），其可在microArraying系统（300），蘸笔纳米光刻系统，流体回路，和微流体系统中使用，但盘游离缺失确实使用了信道弹簧探针（350）确实包括至少一个毛细通道（351）。从弹簧束形成（例如，stressy金属梁）做曲线从所述基板离开当释放时，通道（351）可以被集成到无论是弹簧杆（300）或形成在弹性梁。由窄的通道（351）中产生的毛细管力使液体被收集，英雄，并且由信道弹簧探针分配。因为信道弹簧杆可使用常规的半导体工艺来制造，显著设计灵活性和成本效率得以实现。

3. 发明公开

EP1351256A3 Scanning probe system with spring probe 审中-公开
标题翻译：扫描探针装置与弹簧探针
公开(公告)号：EP1351256A3
公开(公告)日：2006-05-17
申请号：EP03007302.7
申请日：2003-03-31
申请人： Xerox Corporation
发明人： Hantschel, Thomas , Chow, Eugene M. , Fork, David
IPC分类号： G01N13/10 , G01N13/16 , G12B21/02 , G12B21/08 , B81B3/00 , B81B1/00
CPC分类号： G01Q70/10 , G01Q70/06 , G01Q70/16 , G01R1/06727 , Y10S977/873
摘要： Scanning probe systems, which include scanning probe microscopes (SPMs), atomic force microscope (AFMs), or profilometers, are disclosed that use cantilevered spring (e.g., stressy metal) probes formed on transparent substrates. When released, a free end bends away from the substrate to form the cantilevered spring probe, which has an in-plane or out-of-plane tip at its free end. The spring probe is mounted in a scanning probe system and is used to scan or otherwise probe a substrate surface-. A laser beam is directed through the transparent substrate onto the probe to measure tip movement during scanning or probing. Other detection schemes can also be used (e.g., interferometry, capacitive, piezoresistive). The probes are used for topography, electrical, optical and thermal measurements. The probes also allow an SPM to operate as a depth gauge.

4. 发明授权

EP2311567B1 Capillary-channel probes for liquid pickup, transportation and dispense using spring beams 有权
标题翻译： Kapillarkanalsonden使用弹簧臂接收，运输和分配液体的
公开(公告)号：EP2311567B1
公开(公告)日：2013-05-08
申请号：EP10181968.8
申请日：2003-07-28
申请人： Xerox Corporation
发明人： Hantschel, Thomas , Fork, David K. , Rosa, Michael A. , DeBruyker, Dirk , Chow, Eugene M.
IPC分类号： B81B3/00 , B01J19/00 , G01N35/10 , B41J2/14 , B41J2/16 , G03F7/00 , B01L3/02 , B01L3/00 , G01N35/00
CPC分类号： G01N35/1074 , B01J2219/00387 , B01L3/0244 , B01L3/0255 , B01L3/502715 , B01L2300/0819 , B01L2400/025 , B01L2400/0406 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1643 , C40B60/14 , G01N35/1009 , G01N2035/00237 , G01N2035/1037 , G03F7/0002 , Y10T436/2575

5. 发明公开

EP1388369A3 Capillary-channel probes for liquid pickup, transportation and dispense using spring beams 有权
标题翻译： Kapillarkanalsonden使用弹簧臂接收，运输和分配液体的
公开(公告)号：EP1388369A3
公开(公告)日：2004-12-29
申请号：EP03254696.2
申请日：2003-07-28
申请人： Xerox Corporation
发明人： Hantschel, Thomas , Fork, David K. , Rosa, Michael A. , DeBruyer, Dirk , Chow, Eugene M.
IPC分类号： B01L3/02 , B01L3/00 , B81B3/00 , B01J19/00 , G01N35/10
CPC分类号： G01N35/1074 , B01J2219/00387 , B01L3/0244 , B01L3/0255 , B01L3/502715 , B01L2300/0819 , B01L2400/025 , B01L2400/0406 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1643 , C40B60/14 , G01N35/1009 , G01N2035/00237 , G01N2035/1037 , G03F7/0002 , Y10T436/2575
摘要： Fluidic conduits (330A), which can be used in microarraying systems (300), dip pen nanolithography systems, fluidic circuits, and microfluidic systems, are disclosed that use channel spring probes (350) that include at least one capillary channel (351). Formed from spring beams (e.g., stressy metal beams) that curve away from the substrate when released, channels (351) can either be integrated into the spring beams (300) or formed on the spring beams. Capillary forces produced by the narrow channels (351) allow liquid to be gathered, held, and dispensed by the channel spring probes. Because the channel spring beams can be produced using conventional semiconductor processes, significant design flexibility and cost efficiencies can be achieved.

6. 发明公开

EP2287624A3 Scanning Probe System 审中-公开
标题翻译：扫描探针系统
公开(公告)号：EP2287624A3
公开(公告)日：2011-03-23
申请号：EP10190901.8
申请日：2003-03-31
申请人： Xerox Corporation
发明人： Hantschel, Thomas , Chow, Eugene M. , Fork, David
IPC分类号： G01Q70/06 , G01Q70/10 , G01Q70/16
CPC分类号： G01Q70/10 , G01Q70/06 , G01Q70/16 , G01R1/06727 , Y10S977/873
摘要： A scanning probe system (100) for probing a sample (115), the scanning probe system comprising a stage (110) having a surface for mounting the sample; a probe assembly (120) including a substrate (122) and a spring probe (125) having a fixed end (210) attached to the substrate, a central section (220) separated from the substrate, and a free end (230) including a probe tip (235) positioned adjacent to the stage surface; and a measurement device (160) for measuring deformation of the spring probe caused by interaction between the probe tip and the sample, wherein the spring probe comprises a stress-engineered spring material film (520) having an internal stress gradient.
摘要翻译： 1。一种用于探测样本（115）的扫描探针系统（100），所述扫描探针系统包括具有用于安装所述样本的表面的台（110）包括衬底（122）和弹簧探针（125）的探针组件（120），所述弹簧探针具有附接到所述衬底的固定端（210），与所述衬底分离的中央部分（220）以及自由端（230），所述自由端包括位于所述台面附近的探针尖端（235）和测量装置（160），用于测量由探针尖端和样本之间的相互作用引起的弹簧探针的变形，其中弹簧探针包括具有内部应力梯度的应力设计的弹簧材料膜（520）。

7. 发明公开

EP2287624A2 Scanning Probe System 审中-公开
标题翻译： Federsonde Rastersondenvorrichtung
公开(公告)号：EP2287624A2
公开(公告)日：2011-02-23
申请号：EP10190901.8
申请日：2003-03-31
申请人： Xerox Corporation
发明人： Hantschel, Thomas , Chow, Eugene M. , Fork, David
IPC分类号： G01Q70/06 , G01Q70/10 , G01Q70/16
CPC分类号： G01Q70/10 , G01Q70/06 , G01Q70/16 , G01R1/06727 , Y10S977/873
摘要： A scanning probe system (100) for probing a sample (115), the scanning probe system comprising a stage (110) having a surface for mounting the sample; a probe assembly (120) including a substrate (122) and a spring probe (125) having a fixed end (210) attached to the substrate, a central section (220) separated from the substrate, and a free end (230) including a probe tip (235) positioned adjacent to the stage surface; and a measurement device (160) for measuring deformation of the spring probe caused by interaction between the probe tip and the sample, wherein the spring probe comprises a stress-engineered spring material film (520) having an internal stress gradient.
摘要翻译： 1.一种用于探测样品（115）的扫描探针系统（100），所述扫描探针系统包括具有用于安装样品的表面的台（110）包括衬底（122）和具有附接到所述衬底的固定端（210）的弹簧探针（125）的探针组件（120），与所述衬底分离的中心部分（220）以及包括位于所述台表面附近的探针尖端（235）; 以及测量装置（160），用于测量由探针尖端和样品之间的相互作用引起的弹簧探针的变形，其中弹簧探针包括具有内部应力梯度的应力工程弹簧材料膜（520）。

8. 发明公开

EP1388369A2 Capillary-channel probes for liquid pickup, transportation and dispense using spring beams 有权
标题翻译： Kapillarkanalsonden使用弹簧臂接收，运输和分配液体的
公开(公告)号：EP1388369A2
公开(公告)日：2004-02-11
申请号：EP03254696.2
申请日：2003-07-28
申请人： Xerox Corporation
发明人： Hantschel, Thomas , Fork, David K. , Rosa, Michael A. , DeBruyer, Dirk , Chow, Eugene M.
IPC分类号： B01L3/02 , B01L3/00 , B81B3/00 , B01J19/00 , G01N35/10
CPC分类号： G01N35/1074 , B01J2219/00387 , B01L3/0244 , B01L3/0255 , B01L3/502715 , B01L2300/0819 , B01L2400/025 , B01L2400/0406 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1643 , C40B60/14 , G01N35/1009 , G01N2035/00237 , G01N2035/1037 , G03F7/0002 , Y10T436/2575
摘要： Fluidic conduits (330A), which can be used in microarraying systems (300), dip pen nanolithography systems, fluidic circuits, and microfluidic systems, are disclosed that use channel spring probes (350) that include at least one capillary channel (351). Formed from spring beams (e.g., stressy metal beams) that curve away from the substrate when released, channels (351) can either be integrated into the spring beams (300) or formed on the spring beams. Capillary forces produced by the narrow channels (351) allow liquid to be gathered, held, and dispensed by the channel spring probes. Because the channel spring beams can be produced using conventional semiconductor processes, significant design flexibility and cost efficiencies can be achieved.
摘要翻译：流体导管（330A），其可在microArraying系统（300），蘸笔纳米光刻系统，流体回路，和微流体系统中使用，但盘游离缺失确实使用了信道弹簧探针（350）确实包括至少一个毛细通道（351）。从弹簧束形成（例如，stressy金属梁）做曲线从所述基板离开当释放时，通道（351）可以被集成到无论是弹簧杆（300）或形成在弹性梁。由窄的通道（351）中产生的毛细管力使液体被收集，英雄，并且由信道弹簧探针分配。因为信道弹簧杆可使用常规的半导体工艺来制造，显著设计灵活性和成本效率得以实现。

9. 发明授权

EP1359118B1 Microelectromechanical actuator system 有权
标题翻译：微机电致动系统
公开(公告)号：EP1359118B1
公开(公告)日：2010-09-15
申请号：EP03252493.6
申请日：2003-04-17
申请人： Xerox Corporation
发明人： Dunec, John L. , Volkel, Armin R. , Peeters, Eric , Rosa, Michel A. , DeBruyker, Dirk , Hantschel, Thomas
IPC分类号： B81B3/00
CPC分类号： B81B3/0008 , B81B3/0021 , B81B2201/042 , B81B2201/045 , B81B2203/0118 , B81B2203/058 , G02B26/0841 , H02N1/002

10. 发明公开

EP1359118A2 Microelectromechanical actuator system 有权
标题翻译： MikroelektromechanisechesBetätigungssystem
公开(公告)号：EP1359118A2
公开(公告)日：2003-11-05
申请号：EP03252493.6
申请日：2003-04-17
申请人： Xerox Corporation
发明人： Dunec, John L. , Volkel, Armin R. , Peeters, Eric , Rosa, Michel A. , DeBruyker, Dirk , Hantschel, Thomas
IPC分类号： B81B3/00
CPC分类号： B81B3/0008 , B81B3/0021 , B81B2201/042 , B81B2201/045 , B81B2203/0118 , B81B2203/058 , G02B26/0841 , H02N1/002
摘要： A MEMS system including a fixed electrode (504) and a suspended moveable electrode (508) that is controllable over a wide range of motion. In traditional systems where an fixed electrode (504) is positioned under the moveable electrode (508), the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode (508) moves too close to the fixed electrode (504). By repositioning the fixed electrode (504) from being directly underneath the moving electrode (508), a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.
摘要翻译：一种MEMS系统，包括可在宽的运动范围内控制的固定电极（504）和悬挂的可移动电极（508）。在固定电极（504）位于可移动电极（508）下方的传统系统中，由于当可移动电极（508）移动得太靠近固定电极时，支撑可移动电极的支撑结构变得不稳定，所以运动范围受到限制（504）。通过将固定电极（504）重新定位在移动电极（508）的正下方，可实现更宽范围的可控制运动。宽范围的可控运动在光开关应用中尤为重要。

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