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    • 5. 发明公开
    • PIEZOELECTRIC CERAMIC, PROCESS FOR PRODUCING THE PIEZOELECTRIC CERAMIC, AND PIEZOELECTRIC DEVICE
    • 压电陶瓷元件,方法陶瓷压电元件和压电元件的制造
    • EP2316804A1
    • 2011-05-04
    • EP09809793.4
    • 2009-08-10
    • Taiyo Yuden Co., Ltd.
    • HATANO, KeiichiKISHIMOTO, SumiakiDOSHIDA, Yutaka
    • C04B35/00H01L41/083H01L41/187H01L41/22H01L41/24H03H9/17
    • H01L41/1873C04B35/495C04B35/62685C04B2235/3201C04B2235/3203C04B2235/3294C04B2235/3427C04B2235/656C04B2235/768C04B2235/784C04B2235/785C04B2235/786C04B2235/80C04B2235/81H01L41/083H01L41/43
    • As a piezoelectric ceramic having an alkaline-containing niobic acid-perovskite structure which contains no lead and which has high piezoelectric properties, a piezoelectric ceramic which is dense and which has fine and homogeneous internal polycrystalline structure is provided without performing firing under a high pressure, firing in a specific atmosphere, and precise control of firing conditions, and in addition a manufacturing method of the piezoelectric ceramic and a piezoelectric device using the piezoelectric ceramic are also provided. The piezoelectric ceramic contains [K 1-x Na x ] 1-y Li y [Nb 1-z-w Ta z Sb w ]O 3 (x, y, z, and w each indicate a molar ratio, and 0≤x 3 Nb 3 O 6 Si 2 O 7 as a subphase. In addition, the manufacturing method of the piezoelectric ceramic includes a step of obtaining a composition (or materials thereof) used as the primary phase, a step of obtaining a composition used as the subphase, a step of mixing the above two, and a step of molding and firing a mixture therebetween. Furthermore, in a piezoelectric device in which first electrodes and second electrodes face each other with piezoelectric ceramic layers interposed therebetween, the piezoelectric ceramic layers are each formed of the above piezoelectric ceramic.
    • 作为压电陶瓷,其含有碱性的铌酸系钙钛矿结构,其中包含不含铅,并且具有高的压电特性的压电陶瓷的所有其是致密的并且具有微细且均匀的内部的多晶结构,而不执行高的压力下烧制被提供, 烧制在一个特定的气氛中,和的烧制条件的精确控制,因此,除了被设置在压电陶瓷和使用该压电陶瓷的压电器件的制造方法。 压电陶瓷含有[K 1-x的Na X] 1-Y栗Y [1的Nb-ZW的TaŽ的Sb w]的O 3(X,Y,Z和W分别表示摩尔比,和0‰¤x< 1,0‰¤y<1,0‰¤z<1,且0‰¤w<1个保持)作为主相和K 3 Nb的3 O 6的Si 2 O 7作为副相。 另外,压电陶瓷的制造方法,包括获得作为主相,获得用作子阶段,混合上述两种的步骤的组合物的步骤的组合物(或其材料)的步骤,以及步骤 的模制和烧制之间的混合物存在。 进一步,在第一电极和第二电极相对海誓山盟与之间插入有压电陶瓷层的压电元件,压电陶瓷层,在上述各压电陶瓷形成。