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    • 10. 发明公开
    • Method for manufacturing piezoelectric material
    • Verfahren zur Herstellung eines piezoelektrischen材料
    • EP1039559A1
    • 2000-09-27
    • EP00106444.3
    • 2000-03-24
    • SEIKO EPSON CORPORATION
    • Qui. HongSumi, KojiNishiwaki,TsutomuOkuyama, MasanoriWei, Zhigiang
    • H01L41/24H01L41/187
    • B41J2/1628B41J2/161B41J2/1629B41J2/1642B41J2/1645B41J2/1646H01L41/1876H01L41/317H01L41/318
    • When a piezoelectric material is manufactured by hydrothermal method, the proper amount of lead contained in the piezoelectric film can be ensured and decreases in piezoelectric characteristics can be prevented. A method for manufacturing a piezoelectric material expressed by the formula ABO 3 , containing an element "a" as the element expressed by A above, and having a perovskite crystal structure, comprises a first step of producing an oxide containing an element "a'", and a second step of producing a piezoelectric material by subjecting the oxide produced in the first step to a hydrothermal processing using an aqueous solution containing the element "a", wherein the amount of the element "a" contained in the piezoelectric material produced in the second step is increased over the amount of the element "a" contained in the oxide produced in the first step.
    • 当通过水热法制造压电材料时,可以确保压电膜中包含的铅的适量,并且可以防止压电特性的降低。 由式ABO3表示的包含元素“a”作为上述A表示的元素并具有钙钛矿晶体结构的压电材料的制造方法包括:制造含有元素“a”的氧化物的第一工序, 以及通过使用含有元素“a”的水溶液对在第一步骤中生成的氧化物进行水热处理来制造压电材料的第二步骤,其中包含在所述压电材料中产生的压电材料中的元素“a”的量 第二步骤比第一步骤生成的氧化物中所含的元素“a”的量增加。