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1. 发明授权

EP1045460B1 Method for manufacturing piezoelectric element, and piezoelectric element, ink-jet recording head and printer 失效
标题翻译：一种用于生产压电元件，压电元件，喷墨打印头和打印机处理
公开(公告)号：EP1045460B1
公开(公告)日：2013-09-18
申请号：EP00108183.5
申请日：2000-04-13
申请人： Seiko Epson Corporation
发明人： Qiu, Hong , Sumi, Koji , Moriya, Souichi , Shimada, Masato , Nishiwaki, Tsutomu
IPC分类号： H01L41/318 , H01L41/08
CPC分类号： H01L41/0805 , H01L41/0973 , H01L41/1875 , H01L41/318

2. 发明授权

EP1741557B1 Actuator device, liquid-jet head and liquid-jet apparatus 有权
标题翻译：致动器，液体喷射头和装置
公开(公告)号：EP1741557B1
公开(公告)日：2008-11-05
申请号：EP06014159.5
申请日：2006-07-07
申请人： Seiko Epson Corporation
发明人： Takabe, Motoki , Sumi, Koji , Yokoyama, Naoto
IPC分类号： B41J2/14
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14419 , B41J2202/03 , B41J2202/20 , H01L41/0973 , H01L41/1876 , H01L41/318 , H01L41/319

3. 发明授权

EP1707368B1 Piezoelectric element, liquid-jet head and liquid-jet apparatus 有权
标题翻译：一种压电元件，液体喷射头和装置
公开(公告)号：EP1707368B1
公开(公告)日：2008-05-28
申请号：EP06006384.9
申请日：2006-03-28
申请人： Seiko Epson Corporation
发明人： Sumi, Koji , Kazama, Hironobu
IPC分类号： B41J2/14 , B41J2/16
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , H01L41/0973 , H01L41/1876 , H01L41/318

4. 发明公开

EP1880852A2 Piezoelectric device and liquid jet head 审中-公开
标题翻译： Piezoelektrische Vorrichtung undFlüssigkeitsstrahlkopf
公开(公告)号：EP1880852A2
公开(公告)日：2008-01-23
申请号：EP07013247.7
申请日：2007-07-06
申请人： Seiko Epson Corporation
发明人： Noguchi, Motohisa , Sumi, Koji , Takabe, Motoki , Yokoyama, Naoto
IPC分类号： B41J2/14
CPC分类号： B41J2/14233 , H01L41/0973 , H01L41/1876 , H01L41/317 , H01L41/319
摘要： A piezoelectric device including: a substrate (2); a lower electrode (4) formed over the substrate; a piezoelectric layer (6) formed over the lower electrode and including lead zirconate titanate; and an upper electrode (7) formed over the piezoelectric layer, the lead zirconate titanate having a half-width of a peak of a (100) plane measured by an X-ray diffraction rocking curve method of 10 degrees or more and 25 degrees or less.
摘要翻译：一种压电装置，包括：基板（2）; 形成在所述基板上的下电极（4）形成在所述下电极上并包括锆钛酸铅的压电层（6）和形成在所述压电体层上的上电极（7），所述钛酸铅钛酸铅具有通过X射线衍射摇摆曲线法测定的（100）面的半峰宽为10度以上且25度，减。

5. 发明公开

EP1039559A1 Method for manufacturing piezoelectric material 审中-公开
标题翻译： Verfahren zur Herstellung eines piezoelektrischen材料
公开(公告)号：EP1039559A1
公开(公告)日：2000-09-27
申请号：EP00106444.3
申请日：2000-03-24
申请人： SEIKO EPSON CORPORATION
发明人： Qui. Hong , Sumi, Koji , Nishiwaki,Tsutomu , Okuyama, Masanori , Wei, Zhigiang
IPC分类号： H01L41/24 , H01L41/187
CPC分类号： B41J2/1628 , B41J2/161 , B41J2/1629 , B41J2/1642 , B41J2/1645 , B41J2/1646 , H01L41/1876 , H01L41/317 , H01L41/318
摘要： When a piezoelectric material is manufactured by hydrothermal method, the proper amount of lead contained in the piezoelectric film can be ensured and decreases in piezoelectric characteristics can be prevented. A method for manufacturing a piezoelectric material expressed by the formula ABO 3 , containing an element "a" as the element expressed by A above, and having a perovskite crystal structure, comprises a first step of producing an oxide containing an element "a'", and a second step of producing a piezoelectric material by subjecting the oxide produced in the first step to a hydrothermal processing using an aqueous solution containing the element "a", wherein the amount of the element "a" contained in the piezoelectric material produced in the second step is increased over the amount of the element "a" contained in the oxide produced in the first step.
摘要翻译：当通过水热法制造压电材料时，可以确保压电膜中包含的铅的适量，并且可以防止压电特性的降低。由式ABO3表示的包含元素“a”作为上述A表示的元素并具有钙钛矿晶体结构的压电材料的制造方法包括：制造含有元素“a”的氧化物的第一工序，以及通过使用含有元素“a”的水溶液对在第一步骤中生成的氧化物进行水热处理来制造压电材料的第二步骤，其中包含在所述压电材料中产生的压电材料中的元素“a”的量第二步骤比第一步骤生成的氧化物中所含的元素“a”的量增加。

6. 发明公开

EP0980103A2 Piezoelectric actuator, ink jet printing head, printer, method for manufacturing piezoelectric actuator, and method for manufacturing ink jet printing head 有权
标题翻译：压电致动器，喷墨头打印机中，制造喷墨头的压电促动器的制造方法的方法
公开(公告)号：EP0980103A2
公开(公告)日：2000-02-16
申请号：EP99115906.2
申请日：1999-08-12
申请人： SEIKO EPSON CORPORATION
发明人： Qiu, Hong , Sumi, Koji , Shimada, Masato , Nishiwaki, Tsutomu , Okuyama, Masanori, Osaka University Graduate Schoo , Wei, Zhi Quiang, Osaka University Graduate Schoo
IPC分类号： H01L41/22 , H01L41/08 , H01L41/187 , B41J2/045
CPC分类号： B41J2/1646 , B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1645 , B41J2002/14387 , H01L41/0805 , H01L41/0973 , H01L41/317
摘要： This invention provides a piezoelectric actuator, concerning which a substrate and a piezoelectric film layer will never erode, the area of which can be enlarged, and which has a flat top surface, and this invention provides an ink jet printing head, a printer, a method for manufacturing a piezoelectric actuator, and a method for manufacturing an ink jet printing head.
A piezoelectric actuator comprising a piezoelectric film held between a lower electrode and an upper electrode is characterized in that columnar crystal grains of piezoelectric ceramic which composes the piezoelectric actuator are random-oriented in a film thickness direction, and that a mean diameter of the columnar crystal grains is in the range of 100 nm to 15000 nm.
The step of forming precursor films (411, 412,...), which are composed of metal and oxygen, over a lower electrode (32) is followed by the step of giving hydrothermal treatment by dipping the precursor films (411, 412,...) in an alkaline solution (101), which has 2 M[mol/l] or less, more preferably 0.1 M[mol/l] or less, concentration of a given alkaline solute, and by promoting the crystallization under certain conditions. Since a strong alkaline solution is not used, there is no fear that a substrate or a piezoelectric film layer may erode.
摘要翻译：本发明提供一种压电致动器，关于哪一个基板和压电薄膜层永远不会侵蚀，其面积可以增大，并且具有平坦的顶表面，并且本发明提供了在喷墨打印头，打印机，一种用于制造压电致动器，以及用于制造喷墨打印头的方法。包括下电极之间，并上部电极上的压电膜英雄的压电传动器的特征在于，在没有用来构成压电致动器被随机定向在膜厚度方向上的压电陶瓷的柱状晶粒，并做了平均直径柱状晶粒的是在100nm至15000纳米。形成前体膜（411，412，...），它们是由金属和氧的，在下部电极的步骤（32 ）通过的通过浸渍前体膜（411,412，...），得到水热处理的步骤，随后（在101碱性溶液中），其具有2MÄmol/略或更小，更优选为0.1MÄmol/略或更小，一个给定的碱性溶质的浓度，并通过电视节目预告婷某些条件下的结晶。由于不使用强碱性溶液，所以不必担心做了衬底或者压电性薄膜层可侵蚀。

7. 发明公开

EP0867952A1 Piezoelectric element and process for producing the same 失效
标题翻译：元素和Verfahren zu dessen Herstellung
公开(公告)号：EP0867952A1
公开(公告)日：1998-09-30
申请号：EP98105408.3
申请日：1998-03-25
申请人： SEIKO EPSON CORPORATION
发明人： Qui, Hong , Moriya, Soichi , Kamel, Hiroyuki , Sumi, Koji , Murai, Masami , Nishiwaki, Tsutomu
IPC分类号： H01L41/24 , C23C18/12
CPC分类号： C23C18/1254 , C23C18/1216 , C23C18/1225 , H01L41/1876 , H01L41/318 , Y10T29/42
摘要： A piezoelectric element having a piezoelectric film where the difference in the quantity of lead along the thickness of the film is minimized. The film is obtained by first applying, at least once, a first sol for use in forming a PZT film on a substrate having a lower electrode formed thereon. Second, applying a second sol having the greater lead content than the first sol. Third, subjecting these films to heat treatment at a predetermined temperature at least once. The second sol has a composition capable of forming a piezoelectric film having a Perovskite structure expressed generally by A x B y O 3 , and the content of material constituting the A site of the first sol is greater than what constitutes the A site of the second sol.
摘要翻译：具有压电膜的压电元件，其中沿着膜的厚度的铅的量的差最小化。通过首先在其上形成有下电极的基板上施加至少一次用于形成PZT膜的第一溶胶来获得膜。第二，应用比第一溶胶具有更大铅含量的第二溶胶。第三，使这些膜在预定温度下进行至少一次的热处理。第二溶胶具有能够形成具有通常由AxByO3表示的钙钛矿结构的压电膜的组合物，构成第一溶胶的A位置的材料的含量大于构成第二溶胶的A位置的材料的含量。

8. 发明公开

EP2819196A1 Piezoelectric material, piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic sensor, piezoelectric motor, and power generator 有权
标题翻译： Piezoelektrisches材料，压电元件Element，Flüssigkeitsausstoßkopf，flüssigkeitsausstoßendeVorrichtung，Ultraschallsensor，piezoelektrischer Motor，und Stromgenerator
公开(公告)号：EP2819196A1
公开(公告)日：2014-12-31
申请号：EP14161858.7
申请日：2014-03-26
申请人： Seiko Epson Corporation
发明人： Sumi, Koji , Kitada, Kazuya , Sakai, Tomohiro , Hamada, Yasuaki , Isshiki, Tetsuya , Kimura, Satoshi , Ito, Akio , Handa, Tsuneo
IPC分类号： H01L41/187 , C04B35/468 , C04B35/475 , B41J2/14
CPC分类号： H01L41/183 , B06B1/06 , B41J2/045 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2202/03 , C04B35/462 , C04B35/4682 , C04B35/475 , C04B2235/3201 , C04B2235/3208 , C04B2235/3213 , C04B2235/3215 , C04B2235/3234 , C04B2235/3236 , C04B2235/3255 , C04B2235/3298 , C04B2235/441 , C04B2235/76 , C04B2235/765 , C04B2235/768 , H01L41/187 , H01L41/1871 , H01L41/1873 , H01L41/1878 , H02N2/001 , H02N2/181
摘要： A piezoelectric material contains a first component that is a rhombohedral crystal that is configured to have a complex oxide with a perovskite structure and Curie temperature is set to be Tc1, a second component that is a crystal other than a rhombohedral crystal that is configured to have a complex oxide with the perovskite structure and Curie temperature is set to be Tc2, and a third component that is configured to have a complex oxide with the perovskite structure in which the component is formed as the same crystal system as the second component, and Curie temperature is set to be Tc3, in which Tc1 is higher than Tc2, and Tc3 is equal to or higher than Tc1.
摘要翻译：压电材料包含第一组分，其是菱形结晶，其被配置为具有钙钛矿结构的复合氧化物和居里温度设定为Tc1，第二组分是除了菱形晶体以外的结晶，其被配置为具有具有钙钛矿结构和居里温度的复合氧化物设定为Tc2，第三成分被配置为具有与其中所述成分相同的钙钛矿结构的复合氧化物与第二成分相同的晶体系，居里居温度设定为Tc3，其中Tc1高于Tc2，Tc3等于或高于Tc1。

9. 发明公开

EP2819195A2 Piezoelectric material, piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic sensor, piezoelectric motor, and power generator 审中-公开
标题翻译： Piezoelektrisches材料，压电元件，Flüssigkeitsausstoßkopf，Flüssigkeitsausstoßvorrichtung，Ultraschallsensor，piezoelektrischer Motor und Stromgenerator
公开(公告)号：EP2819195A2
公开(公告)日：2014-12-31
申请号：EP14161857.9
申请日：2014-03-26
申请人： Seiko Epson Corporation
发明人： Sumi, Koji , Kitada, Kazuya , Sakai, Tomohiro , Hamada, Yasuaki , Isshiki, Tetsuya , Kimura, Satoshi , Ito, Akio , Handa, Tsuneo
IPC分类号： H01L41/187 , C04B35/475 , C04B35/495 , B41J2/14
CPC分类号： H01L41/16 , B41J2/045 , B41J2/14233 , C04B35/475 , C04B35/495 , C04B2235/3201 , C04B2235/3203 , C04B2235/3208 , C04B2235/3224 , C04B2235/3227 , C04B2235/3232 , C04B2235/3234 , C04B2235/3251 , C04B2235/3255 , C04B2235/3298 , C04B2235/76 , C04B2235/765 , C04B2235/768 , G10K9/122 , H01L41/047 , H01L41/08 , H01L41/0973 , H01L41/187 , H01L41/1873 , H01L41/1878 , H02N2/001 , H02N2/181
摘要： A piezoelectric material contains a first component that is a rhombohedral crystal that is configured to have a complex oxide with a perovskite structure and Curie temperature is set to be Tc1 and a second component that is a crystal other than a rhombohedral crystal that is configured to have a complex oxide with the perovskite structure and Curie temperature is set to be Tc2, in which the absolute value of the difference between Tc1 and Tc2 |Tc1-Tc2| is equal to or lower than 50°C, and a composition near an MPB line is provided in a phase diagram that employs a composition ratio of a first component to a second component for the horizontal axis and temperature for the vertical axis.
摘要翻译：压电材料包含第一组分，其是配置为具有钙钛矿结构的复合氧化物和居里温度设定为Tc1的第一组分和除了菱形晶体以外的晶体的第二组分，其被配置为具有具有钙钛矿结构和居里温度的复合氧化物被设定为Tc2，其中Tc1和Tc2之间的差绝对值Tc1-Tc2 | 等于或低于50℃，并且在采用水平轴的第一分量与第二分量的组成比和垂直轴的温度的相图中提供MPB线附近的组成。

10. 发明公开

EP2623323A1 Liquid ejection head and liquid ejection apparatus 有权
标题翻译：液体喷射头和液体喷射装置
公开(公告)号：EP2623323A1
公开(公告)日：2013-08-07
申请号：EP13153508.0
申请日：2013-01-31
申请人： Seiko Epson Corporation
发明人： Hirai, Eiju , Yazaki, Shiro , Sumi, Koji , Takabe, Motoki , Kato, Jiro , Ito, Hiroshi , Shimizu, Toshihiro , Kamijo, Takahiro , Torimoto, Tatsuro , Kojima, Chikara
IPC分类号： B41J2/14 , B41J2/16
CPC分类号： B41J2/14233 , B41J2/045 , B41J2/14201 , B41J2/14274 , B41J2/161 , B41J2/1626 , B41J2/1631 , B41J2/1646 , B41J2002/14258 , B41J2002/14491 , H01L41/0471 , H01L41/0805
摘要： A liquid ejection head includes a substrate in which a pressure generating chamber that communicates with a nozzle opening is formed; and a piezoelectric element having a piezoelectric layer, a first electrode that is formed on a surface of the piezoelectric layer on a side of the substrate so as to correspond to the pressure generating chamber, and a second electrode that is formed on a surface of the piezoelectric layer opposite to the side on which the first electrode is formed so as to extend over a plurality of the pressure generating chambers, wherein the second electrode is formed to extend to an outside of the pressure generating chamber in a longitudinal direction of the pressure generating chamber.
摘要翻译：液体喷射头包括：基板，在该基板中形成有与喷嘴开口连通的压力产生室; 以及压电元件，其具有压电层，第一电极和第二电极，所述第一电极形成在所述压电层的所述基板的一侧上的表面上以对应于所述压力产生室，所述第二电极形成在所述与形成有所述第一电极的一侧相反的压电体层，以遍布多个所述压力产生室，其中，所述第二电极形成为在所述压力产生的纵向方向上延伸到所述压力产生室的外部室。

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