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    • 3. 发明公开
    • Non volatile memory electronic device integrated on a semiconductor substrate
    • 在ein Halbleitersubstrat integrierte elektronische Vorrichtung mitnichtflüchtigemSpeicher
    • EP1804289A2
    • 2007-07-04
    • EP06026787.9
    • 2006-12-22
    • STMicroelectronics S.r.l.
    • Servalli, GiorgioCapetti, GianfrancoCantú, Pietro
    • H01L21/8247H01L27/115
    • H01L27/115H01L27/11519H01L27/11521
    • A non volatile memory device is described being integrated on semiconductor substrate (11, 110) and comprising a matrix of non volatile memory cells (12, 120) organised in rows, called word lines, and columns, called bit lines, the device comprising:
      - a plurality of active areas (13, 130) formed on the semiconductor substrate (11, 110) comprising a first and a second group (G1, G2; G3, G4) of active areas,
      - the non volatile memory cells (12, 120) being integrated in the first group (G1, G3) of active areas, each non volatile memory cell (12, 120) comprising a source region, a drain region and a floating gate electrode coupled to a control gate electrode, at least one group (14, 140) of the memory cells (12, 120) sharing a common source region (15, 150) integrated on the semiconductor substrate (11, 110), the device being characterised in that:

      - said plurality of active areas (13, 130) are equidistant from each other,
      - a contact region (16, 160) is integrated in the second group (G2, G4) of active areas (13, 130) and is provided with at least one common source contact (17, 170) of said common source region (15, 150).
    • 描述了非易失性存储器件集成在半导体衬底(11,110)上,并且包括被称为位线的称为字线的行的非易失性存储器单元(12,120)的矩阵,所述器件包括: - 形成在半导体衬底(11,110)上的多个有源区(13,130),包括有源区的第一和第二组(G1,G2; G3,G4), - 非易失性存储单元(12, 120)集成在有源区的第一组(G1,G3)中,每个非易失性存储单元(12,120)包括耦合到控制栅极的源极区,漏极区和浮栅,至少一个 所述存储单元(12,120)的组(14,140)共享共同的半导体衬底(11,110)上的公共源极区域(15,150),所述器件的特征在于: - 所述多个有源区域 13,130)彼此等距, - 接触区域(16,160)被集成在第二组(G2 ,G4)的有源区域(13,130),并且设置有所述公共源极区域(15,150)的至少一个公共源极触点(17,170)。