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2. 发明公开

EP3168857A4 COVERING MATERIAL STRIPPING METHOD AND STRIPPING DEVICE USING ION IRRADIATION 有权转让
标题翻译： ABDECKMATERIALABLÖSUNGSVERFAHRENUNDABLÖSUNGSVORRICHTUNGMIT IONENBESTRAHLUNG
公开(公告)号：EP3168857A4
公开(公告)日：2017-07-12
申请号：EP16776446
申请日：2016-03-29
申请人： SHINMAYWA IND LTD
发明人： UEMURA KENSUKE , REMNEV G ALEXEY
IPC分类号： H01J37/30 , C23C14/02 , H01J37/32 , H01J37/36
CPC分类号： H01J37/3053 , C23C14/022 , C23C16/0245 , H01J37/08 , H01J37/30 , H01J2237/006 , H01J2237/0825 , H01J2237/20214 , H01J2237/3114 , H01J2237/3132 , H01J2237/3151
摘要： A de-coating method capable of recycling a tool or a mechanical part coated with an inorganic material such as PCD (poly-crystalline diamond) is provided. According to the de-coating method, a substrate to be subjected to de-coating (coated body) is less likely to have a dead area during ion irradiation, a brittle phase is less likely to be formed in the substrate (metal body) in terms of temperature, and de-coating can be performed at an economical speed. The problems can be solved by the de-coating method including: exposing the coated body in which a coating made of an inorganic material is formed on a surface of the metal body to ion flows to peel off the coating from the metal body, wherein the coated body is placed at an ion flow-concentrated portion where two or more ion flows overlap each other, and is exposed to the ion flows without addition of a positive or negative bias to the coated body. As gases for use in generating ions from plasma, oxygen and CF 4 that promote de-coating through a chemical reaction are preferably used in addition to Ar that performs de-coating under the physical action of ion collision and stabilizes plasma.
摘要翻译：提供了能够再循环涂覆有无机材料如PCD（多晶金刚石）的工具或机械部件的去涂层方法。根据脱涂法，待离子化的基板（被覆体）在离子照射时难以产生死区，在基板（金属体）内不易形成脆性相温度条件和脱涂层可以以经济的速度进行。这些问题可以通过脱涂方法来解决，该脱涂方法包括：将在其中形成有由无机材料制成的涂层的涂覆体暴露在金属体的表面上以离子流动，以从金属体上剥离涂层，其中将涂布体置于两个或更多个离子流彼此重叠的离子流集中部分处，并且暴露于离子流而不向涂布体施加正偏压或负偏压。作为用于从等离子体产生离子的气体，除了在离子碰撞的物理作用下进行去涂层并使等离子体稳定的Ar之外，优选使用促进通过化学反应进行去涂层的氧和CF 4。

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