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    • 4. 发明公开
    • LIQUID TREATMENT DEVICE WITH STORAGE TANK AND DELIVERY TANK
    • 装置上使用的储存罐液体处理和供给船
    • EP1093042A1
    • 2001-04-18
    • EP00906688.7
    • 2000-03-03
    • RikenS. T. Research Co., Ltd.
    • YAMAGATA, YutakaOZAKI, Tsunehiko RikenMOROZOV, VictorINOUE, Kozo S. T. Research Co., Ltd.
    • G05D9/12
    • G05D9/12Y10T137/7287Y10T137/7303Y10T137/731Y10T137/7313
    • In a liquid treating equipment to maintain a small amount of liquid to a desired liquid level with constantly supplying an additional liquid into a small capacity vessel, a storage vessel 13 to store the small amount of liquid, an injection tube 16 to inject the small amount of liquid into the storage vessel 16, liquid supplying apparatus 23-25 to supply the small amount of liquid into the storage vessel through the injection tube, a flow path 15 of which one end is joined with the storage vessel, a discharge vessel 14, joined with the storage vessel 13 via the flow path, having a larger surface area than that of the storage vessel, a discharge tube 17 of which the discharging inlet is positioned at the same level position as a desired liquid level of the small amount of liquid in the storage vessel and liquid discharging apparatus 27-29 to discharge the liquid from the discharge vessel through the discharge tube are provided. Even though the liquid level in the discharge vessel is largely fluctuated, the liquid level in the storage vessel is almost never done.
    • 在液体处理设备保持的液体量小到期望的液面与不断供应附加液体到一个小容量的容器中,储存容器13存储的液体的量小,注入管16注入少量 的液体到储存容器16中,液体供给装置通过23-25注射管到的少量液体供应到储存容器中,流路15,其一端被接合与储存容器,排出容器14, 经由流路内的存储容器13连接,具有比所述存储容器,其中所述放电入口设置在相同的水平位置定位为液体的少量的所期望的液面的排出管17的更大的表面积 在储存容器和液体排出装置通过27-29放电管放电从放电容器中的液体被提供。 即使在放电管内的液面高度变动大,在储存容器内的液面高度几乎从来没有做过。
    • 9. 发明公开
    • PROBE TYPE SHAPE MEASUREMENT SENSOR, AND NC MACHINING DEVICE AND SHAPE MEASURING METHOD USING THE SENSOR
    • 特别GRAND FORMMESSAUFNEHMER与加工设备和形状测量方法使用测量变换器
    • EP1134543A1
    • 2001-09-19
    • EP00906598.8
    • 2000-03-01
    • RikenYamagata, Yutaka
    • YAMAGATA, YutakaMORIYASU, SeiOHMORI, HitoshiMORITA, Shinya
    • G01B21/20
    • G01B21/20G01B11/007G01B11/2441
    • A probe head 10 and a laser interferometric displacement meter 20 are provided. The probe head supports a probe 2 that is capable of contacting a workpiece 1, that is free to move in the direction of the workpiece, and drives the probe towards the workpiece. The displacement meter measures the displacement of the probe with a high accuracy without contact. The probe head 10 is also provided with a probe shaft 12 with steps 11a, 11b at intermediate portions thereof and air bearings 14a, 14b that support the probe shaft on each side of the steps. The air bearings have a high stiffness in the radial direction, and the probe shaft is made to float by using compressed air, thus the resistance of the shaft to sliding is reduced. In addition, another compressed air is supplied to the location of the step and produces a driving force in the direction of the workpiece due to the difference of cross sectional areas on each side of the step, that provides a very small load within a predetermined range. Thereby, the measuring pressure can be adjusted to a constant very small load without reducing the stiffness of the bearings of the probe, and the measuring pressures can be varied freely. Therefore, a sub-micron accuracy of about 0.1 µ m can be obtained, and the equipment can be made compact and is easily applied to on-machine measurements.
    • 本发明提供一种探针头10以及激光干涉位移计20。 探针头支持试验2确实能够接触工件1的,所做的是游离在工件的方向上移动,并驱动朝向工件的探针。 位移计措施无接触高精度样品的位移。 因此,探针头10设置有一个探针轴12的步骤11A,11B在其中间部分和空气轴承14A,14B确实支持的步骤每一侧上的探针轴。 空气轴承具有在径向方向上具有高刚性,并且探针轴由通过使用压缩空气浮起,从而阻力轴滑动被降低的, 另外,另一种将压缩空气供给到该步骤的位置,并且由于横截面面积的所述步骤的每一侧上的差是工件的方向的驱动力,确实提供了一个预定的范围内的非常小的负载 , 从而,测量压力可以调节到一个常数非常小的负载而不减少样品的轴承的刚度,并且该测量的压力可以自由地改变。 因此,约0.1微米亚微米精度可以得到,且设备能够小型化,并且容易地应用于在机测量。
    • 10. 发明公开
    • CAPACITIVE FORCE GAUGE
    • KAPAZITIVER KRAFTWANDLER
    • EP1077367A1
    • 2001-02-21
    • EP00906687.9
    • 2000-03-03
    • RikenS. T. Research Co., Ltd.
    • YAMAGATA, YutakaOZAKI, TsunehikoMOROZOV, VictorINOUE, Kozo
    • G01L1/14G01B7/16G01D5/24
    • G01L1/144G01D5/2417G01L1/142
    • A sensor unit (11) comprises an elastic part (12) and a base part (13), united integrally, which include opposed electrodes on their sides to form a capacitor, of which the change in capacitance is utilized to measure the force acting on a probe (14) attached to the end of the elastic part. These electrodes are connected with a resonance circuit of a high-frequency oscillator (22), and a digital frequency counter (23) measures the output signal from the high-frequency oscillator for a predetermined time to measure the change in resonance frequency with the varying force. A capacitive force gauge having such a structure exhibits an extremely high sensitivity to measure minute force independently of changes in temperature or humidity, and the sensitivity will not change with time.
    • 传感器单元(11)包括弹性部分(12)和基部(13),整体结合在一起,其两侧包括相对的电极以形成电容器,其中电容的变化用于测量作用于 附接到弹性部分的端部的探针(14)。 这些电极与高频振荡器(22)的谐振电路连接,并且数字频率计数器(23)在预定时间内测量来自高频振荡器的输出信号,以测量谐振频率随着变化的变化 力。 具有这种结构的电容式力计表现出独立于温度或湿度变化测量微小力的极高灵敏度,并且灵敏度不会随时间而变化。