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1. 发明公开

EP2148939A1 VAKUUMBEHANDLUNGSANLAGE UND VAKUUMBEHANDLUNGSVERFAHREN 有权转让
标题翻译：真空处理厂和真空处理过程
公开(公告)号：EP2148939A1
公开(公告)日：2010-02-03
申请号：EP08736455.0
申请日：2008-04-22
申请人： Oerlikon Trading AG, Trübbach
发明人： RAMM, Jürgen , WIDRIG, Beno , KASEMANN, Stephan , PIMENTA, Marcelo, Dornelles , MASSLER, Orlaw , HANSELMANN, Barbara
IPC分类号： C23C14/06 , C23C14/22 , C23C14/02 , C23C30/00 , C23C28/00 , C23C16/26
CPC分类号： H01J37/3255 , C23C14/325 , C23C16/0245 , C23C16/503 , H01J37/32055
摘要： Vacuum treatment unit and vacuum treatment process for carrying out a plasma process, wherein the treatment is carried out in a vacuum chamber (1) in which an apparatus for producing an electric low-voltage arc discharge (15) (LVAD), comprising a cathode (10) and an anode (13) which can be electrically connected to the cathode via an arc generator, and a workpiece support (7) for accommodating and moving workpieces (2) which can be electrically connected to a bias generator (16) and also at least one feed line (8) for inert and/or reactive gas are arranged. Here, at least part of the surface of the anode is made of graphite and is operated at high temperature.

2. 发明授权

EP2206138B1 METHOD FOR MANUFACTURING A TREATED SURFACE AND VACUUM PLASMA SOURCES 有权转让
标题翻译：制造方法处理过的表面和真空等离子体源
公开(公告)号：EP2206138B1
公开(公告)日：2017-03-22
申请号：EP07822148.8
申请日：2007-11-01
申请人： Oerlikon Trading AG, Trübbach
发明人： RAMM, Juergen , WIDRIG, Beno , KURAPOV, Denis
IPC分类号： H01J37/32 , C23C14/00 , C23C14/22 , C23C14/35 , C23C14/54
CPC分类号： C23C14/54 , C23C14/0036 , C23C14/228 , C23C14/35 , C23C14/351 , H01J37/32009 , H01J37/32055 , H01J37/32477 , H01J37/32541

3. 发明授权

EP1869690B1 VERFAHREN ZUM BETREIBEN EINER GEPULSTEN ARCQUELLE 有权转让
标题翻译：一种用于操作脉冲电弧源
公开(公告)号：EP1869690B1
公开(公告)日：2015-01-14
申请号：EP06705363.7
申请日：2006-03-01
申请人： Oerlikon Trading AG, Trübbach
发明人： RAMM, Jürgen , GSTOEHL, Oliver , WIDRIG, Beno , LENDI, Daniel
IPC分类号： H01J37/32 , H01J37/34 , C23C14/02 , C23C14/06 , C23C14/08 , C23C14/32 , F01D5/28
CPC分类号： H01J37/3444 , C23C14/024 , C23C14/0641 , C23C14/08 , C23C14/081 , C23C14/083 , C23C14/325 , F01D5/288 , F05D2230/313 , H01J37/32055 , H01J37/34

4. 发明授权

EP2456905B1 METHOD FOR PRODUCING COATINGS WITH A SINGLE COMPOSITE TARGET 失效转让
标题翻译：用单一复合目标制造涂层的方法
公开(公告)号：EP2456905B1
公开(公告)日：2017-12-27
申请号：EP10735207.2
申请日：2010-07-16
申请人： Oerlikon Trading AG, Trübbach
发明人： RAMM, Jürgen , WIDRIG, Beno , RUDIGIER, Helmut
IPC分类号： C23C14/32
CPC分类号： C23C14/325 , C23C14/0084 , C23C14/06

5. 发明公开

EP2718481A1 ENTSCHICHTUNGSVERFAHREN FÜR HARTE KOHLENSTOFFSCHICHTEN 有权转让
标题翻译： ENTSCHICHTUNGSVERFAHRENFÜRHARTE KOHLENSTOFFSCHICHTEN
公开(公告)号：EP2718481A1
公开(公告)日：2014-04-16
申请号：EP12725315.1
申请日：2012-05-31
申请人： Oerlikon Trading AG, Trübbach
发明人： RAMM, Jürgen , WIDRIG, Beno
IPC分类号： C23G5/00
CPC分类号： C23G5/00
摘要： The invention relates to a method for removing carbon layers, in particular ta-C layers, from substrate surfaces of tools and components. The substrate to be de-coated is accordingly arranged on a substrate support in a vacuum chamber, the vacuum chamber is charged with at least one reactive gas assisting the evacuation of carbon in gaseous form and a low-voltage plasma discharge is created in the vacuum chamber to activate the reactive gas and hence assist the required chemical reaction or reactions to de-coat the coated substrate. The low-voltage plasma discharge is a dc low-volt arc discharge, the substrate surfaces to be de-coated are bombarded substantially exclusively with electrons and oxygen, nitrogen and hydrogen are used as reactive gas.
摘要翻译：该方法包括将衬底布置在真空室（6）中的衬底保持器上。将反应性气体进料到真空室中以除去气体形式的碳。在真空室中进行等离子体放电过程以支持用于剥离涂覆的基底上的碳的化学反应。等离子体放电产生为低电压直流电弧放电，放电电流为20-1000A或50-300A，放电电压为120V或20-80V。反应气体为氢，氧或氮气。

6. 发明授权

EP1863947B1 HARTSTOFFSCHICHT 有权
标题翻译： HARTSTOFFTECHNIK LAYER
公开(公告)号：EP1863947B1
公开(公告)日：2011-10-05
申请号：EP06700563.7
申请日：2006-01-19
申请人： Oerlikon Trading AG, Trübbach
发明人： RAMM, Jürgen , WIDRIG, Beno , KALSS, Wolfgang
IPC分类号： C23C14/32 , H01J37/32 , C23C14/28
CPC分类号： C23C14/083 , C23C14/024 , C23C14/0641 , C23C14/08 , C23C14/081 , C23C14/325 , F01D5/288 , F05D2230/313
摘要： The invention relates to a hard material layer, deposited on a workpiece (30) as a functional layer (32) by means of an arc-PVD method. Said layer is essentially embodied by an electrically insulating oxide of at least one of the metals (Me) of the transition metals of the sub-groups IV, V, VI of the periodic table and Al, Si, Fe, Co, Ni, Co, or Y and the functional layer (32) contains no noble gas or halogen.

7. 发明公开

EP2082079A1 SCHICHTSYSTEM MIT ZUMINDEST EINER MISCHKRISTALLSCHICHT EINES MEHRFACHOXIDS 有权转让
标题翻译：与多氧化物中的至少一种化合物的液晶层的层系统
公开(公告)号：EP2082079A1
公开(公告)日：2009-07-29
申请号：EP07803181.2
申请日：2007-09-03
申请人： Oerlikon Trading AG, Trübbach
发明人： RAMM, Jürgen , WIDRIG, Beno , ANTE, Michael , WOHLRAB, Christian
IPC分类号： C23C30/00 , C23C14/08 , C23C14/32
摘要： A PVD layer system for coating workpieces comprises at least one mixed crystal layer of a polyoxide with the following composition: (Me1 1-xMe2x)2O3. Me1 and Me2 are at least one of the elements Al, Cr, Fe, Li, Mg, Mn, Nb, Ti, Sb or V. The elements of Me1 and Me2 are each different. The crystal lattice of the mixed crystal layer in the PVD layer system has a corundum structure, which is characterized by at least three lines associated with the corundum structure in a spectrum of the mixed crystal layer, measured by means of X-ray diffractometry. A vacuum deposition method for the production of a mixed crystal layer of a polyoxide and accordingly coated tools and components are also disclosed.

8. 发明公开

EP1869690A2 VERFAHREN ZUM BETREIBEN EINER GEPULSTEN ARCQUELLE 有权转让
标题翻译：一种用于操作脉冲电弧源
公开(公告)号：EP1869690A2
公开(公告)日：2007-12-26
申请号：EP06705363.7
申请日：2006-03-01
申请人： Oerlikon Trading AG, Trübbach
发明人： RAMM, Jürgen , GSTOEHL, Oliver , WIDRIG, Beno , LENDI, Daniel
IPC分类号： H01J37/32
CPC分类号： H01J37/3444 , C23C14/024 , C23C14/0641 , C23C14/08 , C23C14/081 , C23C14/083 , C23C14/325 , F01D5/288 , F05D2230/313 , H01J37/32055 , H01J37/34
摘要： Operating an arc source by generating an electric spark discharge on the surface of a target, where the spark discharge is supplied simultaneously with direct current and pulsed or alternating current, comprises covering the surface of the target with an insulating layer. Independent claims are also included for: (1) operating an arc source by generating an electric spark discharge on the surface of a target, where the spark discharge is supplied simultaneously with direct current and pulsed or alternating current and the direct current component is 100-300% of the holding current; (2) operating an arc source by generating an electric spark discharge on the surface of a target, where the spark discharge is supplied simultaneously with direct current and pulsed or alternating current and the direct current component is 30-90 A; (3) coating process in which an arc source as above is driven to deposit one or more layers on a workpiece; (4) etching process in which an arc source as above is driven to etch a workpiece with metal ions while applying a direct, pulsed or alternating current bias; (5) arc source with a target and at least one counterelectrode and a current supply unit connected to the target, where the current supply unit comprises a pulsed high-amperage current supply and another current supply; (6) arc source with a target and at least one counterelectrode and a current supply unit connected to the target, where the current supply unit comprises a secondary current supply whose signal is modulated so as to apply a DC holding current on which is superimposed a pulsed or AC signal; (7) arc source with a target and at least one counterelectrode and a current supply unit connected to the target, where the current supply unit comprises a primary current supply whose signal is modulated so as to apply a DC holding current on which is superimposed a pulsed or AC signal.

9. 发明公开

EP1864314A2 VERFAHREN ZUM BETRIEB EINER GEPULSTEN ARCVERDAMPFERQUELLE SOWIE EINE VAKUUMPROZESSANLAGE MIT GEPULSTER ARCVERDAMPFUNGSQUELLE 有权
标题翻译：一种用于操作脉冲电弧蒸发源和脉冲ARCVERDAMPFUNGSQUELLE真空处理厂
公开(公告)号：EP1864314A2
公开(公告)日：2007-12-12
申请号：EP06705365.2
申请日：2006-03-01
申请人： Oerlikon Trading AG, Trübbach
发明人： RAMM, Jürgen , WIDRIG, Beno , LENDI, Daniel , DERFLINGER, Volker , REITER, Andreas
IPC分类号： H01J37/32
CPC分类号： C23C14/083 , C23C14/024 , C23C14/0641 , C23C14/08 , C23C14/081 , C23C14/325 , F01D5/288 , F05D2230/313
摘要： The invention relates to a vacuum process system for surface-treating work pieces (3) using an arc evaporation source (5). Said system comprises a first electrode (5') connected to a DC power source (13) and a second electrode (3, 18, 20), disposed separately from the arc evaporation source (5). The two electrodes (5', 3, 18, 20) are operated while being connected to a single pulsed power supply (16).

10. 发明授权

EP2697817B1 KOHLENSTOFFFUNKENVERDAMPFUNG 有权转让
标题翻译：碳无线电扩展
公开(公告)号：EP2697817B1
公开(公告)日：2015-03-11
申请号：EP12718058.6
申请日：2012-03-26
申请人： Oerlikon Trading AG, Trübbach
发明人： RAMM, Jürgen , WIDRIG, Beno , RUHM, Kurt
IPC分类号： H01J37/32
CPC分类号： H01J37/32055 , C23C14/325 , H01J37/32064 , H05B7/148 , H05B7/20 , H05H2001/4682

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