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    • 7. 发明公开
    • MICROLENS PRODUCTION METHOD
    • HERSTELLUNGSVERFAHRENFÜRMIKROLINSEN
    • EP2530494A1
    • 2012-12-05
    • EP11734721.1
    • 2011-01-20
    • Nissan Chemical Industries, Ltd.
    • ARASE, ShinyaSAKAGUCHI, Takahiro
    • G02B3/00H01L27/14
    • G02B3/0012G02B3/0056H01L27/14627H01L27/14685
    • There is provided a solid-state imaging device excellent in eliminating gaps between the lenses adjacent to each other during the microlens formation and forming an overlap structure between the lenses, excellent in lens curvature controlling property, and having a high effective sensitivity by enhancing microlens formation stability; and a production method thereof. A production method of a solid-state imaging device in which microlenses are arranged adjacent to each other on a substrate, comprising: a first process of forming first microlenses on a surface of the substrate leaving space therebetween for providing second microlenses; and a second process of applying an overcoating material onto the surface of the substrate on which the first microlenses are formed, drying the overcoating material, exposing the overcoating material to light using a gray scale mask, and developing the exposed overcoating material, so as to form second microlenses in the space between the first microlenses adjacent to each other.
    • 提供了一种在微透镜形成期间消除彼此相邻的透镜之间的间隙的优异的固态成像装置,并且在透镜之间形成重叠结构,透镜曲率控制特性优异,并且通过增强微透镜形成具有高有效灵敏度 稳定性; 及其制造方法。 一种固态成像装置的制造方法,其中微透镜在衬底上彼此相邻地布置,包括:第一工艺,在衬底的表面上形成第一微透镜,在其间留下空间以提供第二微透镜; 以及将外涂层材料施加到其上形成有第一微透镜的基板的表面上的第二过程,干燥外涂层材料,使用灰度掩模将外涂层材料暴露于光,并显影外露的外涂层材料,以便 在彼此相邻的第一微透镜之间的空间中形成第二微透镜。