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    • 1. 发明公开
    • REACTION FORCE ISOLATION SYSTEM FOR A PLANAR MOTOR
    • REAKTIONSKRAFTSISOLIERUNGSSYSTEMFÜREINEN PLANAREN MOTOR
    • EP1105780A4
    • 2002-10-02
    • EP99943701
    • 1999-08-12
    • NIPPON KOGAKU KK
    • HAZELTON ANDREW JHAYASHI YUTAKATANAKA KEIICHIITO NOBUKAZU
    • G12B5/00F16F15/02G03F7/20G03F9/00G12B9/08H01L21/027H01L21/68H02K41/03G05B5/01B64C17/06F16F15/00G05B11/01H02K3/24
    • G03F7/70358F16F15/02G03F7/70716G03F7/70758G03F7/70833G03F7/709
    • The present invention provides a structure for isolating the reaction forces generated by a planar motor. Specifically, the fixed portion of the reaction motor, which is subject to reaction forces, is structurally isolated from the rest of the system in which the planar motor is deployed. In accordance with one embodiment of the present invention, the fixed portion of the planar motor is separated from the rest of the system and coupled to ground. The rest of the system is isolated from ground by deploying vibration isolation means. Alternatively or in addition, the fixed portion of the planar motor may be structured to move (e.g., on bearings) in the presence of reaction forces, so as to absorb the reaction forces with its inertia. In a further embodiment of the present invention, the fixed portion of the planar motor and the article to be moved are supported by the same frame, with the fixed portion of the planar motor movable on bearings.
    • 本发明提供了用于隔离由平面电动机产生的反作用力的结构。 具体地,反应电动机的受到反作用力的固定部分与其中布置有平面电动机的系统的其余部分结构地隔离。 根据本发明的一个实施例,平面电动机的固定部分与系统的其余部分分离并耦合到地面。 系统的其余部分通过部署隔振装置与地面隔离。 或者或另外,平面电动机的固定部分可以被构造成在反作用力的存在下移动(例如,在轴承上),以便以其惯性吸收反作用力。 在本发明的另一实施例中,平面电动机的固定部分和待移动的物品由相同的框架支撑,平面电动机的固定部分可在轴承上移动。