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1. 发明公开

EP2642505A1 FIELD EMISSION APPARATUS AND HAND-HELD NONDESTRUCTIVE INSPECTION APPARATUS 审中-公开
标题翻译： FELDEMISSIONSVORRICHTUNG SOWIE TRAGBARE VORRICHTUNGFÜRZERSTÖRUNGSFREIEPRÜFUNGEN
公开(公告)号：EP2642505A1
公开(公告)日：2013-09-25
申请号：EP11839819.7
申请日：2011-06-08
申请人： Micro-X Japan Ltd.
发明人： ISHIGURO, Yoshihisa , HABA, Masanori
IPC分类号： H01J5/02 , G21K5/00 , G21K5/02 , H01J1/46 , H01J7/24 , H01J35/16 , H05G1/04
CPC分类号： H01J19/54 , H01J19/42 , H01J35/065 , H01J2201/30469 , H01J2235/062 , H01J2237/16
摘要： In the present invention, heat dissipation is improved by extending the creepage distance in a vacuum vessel according to the size of a flange portion, without lengthening the vacuum vessel in the direction in which an electron beam is emitted.
A vacuum vessel (20) in which a flange portion (20a) having a hollow portion between a cold cathode (9) and an anode (11) is formed is used.
One example is a vacuum vessel (20) in which a cold cathode vessel (21) and an anode vessel (22), both cylindrically shaped, are communicated with each other and a hollow flange portion (20a) is formed between the vessels (21, 22).
A focusing electrode (14) and a getter material (15), for example, are disposed in the hollow portion of the flange portion (20a).
A cold cathode (9) which has a guard electrode on the outer side of the periphery of a carbon film structure (10) formed on a substrate (7) may be used. The carbon film structure (10) may be formed in the middle of an electrode surface of the substrate (7).
摘要翻译：在本发明中，通过根据凸缘部分的尺寸扩大真空容器中的爬电距离，而不会使电子束发射方向上的真空容器延长，从而提高散热。使用其中形成有在冷阴极（9）和阳极（11）之间具有中空部分的凸缘部分（20a）的真空容器（20）。一个例子是真空容器（20），其中两个圆柱形的冷阴极容器（21）和阳极容器（22）彼此连通，并且在容器（21）之间形成中空的凸缘部分（20a），22）。例如，聚光电极（14）和吸气材料（15）设置在凸缘部分（20a）的中空部分中。可以使用在基板（7）上形成的碳膜结构（10）的外周的外侧具有保护电极的冷阴极（9）。碳膜结构（10）可以形成在基板（7）的电极表面的中间。

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