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1. 发明授权

EP0772248B1 Microactivity LED with photon recycling 失效
标题翻译： A-发光二极管谐振器光子的回收
公开(公告)号：EP0772248B1
公开(公告)日：2002-05-02
申请号：EP96116891.1
申请日：1996-10-21
申请人： MOTOROLA, INC.
发明人： Ackley, Donald E. , Shieh, Chan-Long , Lebby, Michael S.
IPC分类号： H01L33/00
CPC分类号： H01L33/105 , H01L33/405 , H01L33/465

2. 发明授权

EP0715378B1 Method for making a VCSEL 失效
标题翻译：一种用于制造垂直腔面发射激光器的方法
公开(公告)号：EP0715378B1
公开(公告)日：1999-10-20
申请号：EP95117900.1
申请日：1995-11-14
申请人： MOTOROLA, INC.
发明人： Shieh, Chan-Long , Lebby, Michael S. , Lungo, John
IPC分类号： H01S3/085 , H01L33/00
CPC分类号： H01S5/18308 , H01S5/0422 , H01S5/2063 , H01S5/2081

3. 发明公开

EP0772266A1 Low resistance top emitting ridge VCSEL and method of fabrication 失效
标题翻译： Nach oben abstrahlende Streifen-VCSEL和Herstellungsverfahren
公开(公告)号：EP0772266A1
公开(公告)日：1997-05-07
申请号：EP96116890.3
申请日：1996-10-21
申请人： MOTOROLA, INC.
发明人： Shieh, Chan-Long , Jiang, Wenbin , Lebby, Michael S.
IPC分类号： H01S3/085
CPC分类号： H01S5/18333 , H01S5/18311 , H01S5/18316 , H01S5/2063
摘要： A high efficiency vertical cavity surface emitting laser (30) including first and second mirror stacks (31, 37) with an active region (32) sandwiched therebetween having an optical mode. The second mirror stack (37) is formed into a mesa with exposed end surface and having outer sidewalls and a diametric size substantially greater than the optical mode. A portion (38) of the second mirror stack (37) adjacent the active region (32) has a reduced electrical conductance so as to channel operating current from the second mirror stack (37) into the optical mode of the active region (32).
摘要翻译：具有第一和第二反射镜叠层（31,37）的高效率垂直腔表面发射激光器（30），其中夹在其间的有源区域（32）具有光学模式。第二反射镜叠层（37）形成为具有暴露的端表面并具有外侧壁和径向尺寸基本上大于光学模式的台面。邻近有源区域（32）的第二反射镜叠层（37）的部分（38）具有降低的电导率，以便使来自第二反射镜叠层（37）的工作电流进入有源区域（32）的光学模式，。

4. 发明授权

EP0653823B1 A vertical cavity surface emitting laser and its fabrication method 失效
标题翻译：一种表面发射激光垂直腔及其制造方法
公开(公告)号：EP0653823B1
公开(公告)日：1998-09-02
申请号：EP94117496.3
申请日：1994-11-07
申请人： MOTOROLA, INC.
发明人： Lebby, Michael S. , Shieh, Chan-Long , Davis, Kenneth L.
IPC分类号： H01S3/085 , H01S3/043 , H01L21/58 , H01L23/373
CPC分类号： H01L23/5329 , H01L23/3732 , H01L2924/0002 , H01S5/02484 , H01S5/0282 , H01S5/0422 , H01S5/183 , H01S2301/176 , Y10S148/095 , H01L2924/00

5. 发明公开

EP0772248A2 Microactivity LED with photon recycling 失效
标题翻译：一种发光二极管与谐振器的光子的复用
公开(公告)号：EP0772248A2
公开(公告)日：1997-05-07
申请号：EP96116891.1
申请日：1996-10-21
申请人： MOTOROLA, INC.
发明人： Ackley, Donald E. , Shieh, Chan-Long , Lebby, Michael S.
IPC分类号： H01L33/00
CPC分类号： H01L33/105 , H01L33/405 , H01L33/465
摘要： A microcavity LED (10) with photon recycling including a substrate (12) having at least one layer (14) of material positioned thereon, and a first cladding layer (18), a second cladding layer (22) and an active region (16) sandwiched therebetween forming a mesa (24) on the layer (14) of material. The mesa (24) has generally vertical sides (28) and an upper surface (26) with an electrically conductive and light reflective system (32) positioned on the vertical sides (28) of the mesa (24) and partially covering the upper surface (26) to form a first electrical contact (32) for the LED (10), the electrically conductive and light reflective system (32) defining a centrally located light emitting opening (34) on the surface (26) of the mesa (24), the mesa (24) having a diametric dimension of the surface (26) greater than one time larger than a diametric dimension of the opening (34).

6. 发明公开

EP0715378A1 Method for making a VCSEL 失效
标题翻译：激光器激光雷达
公开(公告)号：EP0715378A1
公开(公告)日：1996-06-05
申请号：EP95117900.1
申请日：1995-11-14
申请人： MOTOROLA, INC.
发明人： Shieh, Chan-Long , Lebby, Michael S. , Lungo, John
IPC分类号： H01S3/085
CPC分类号： H01S5/18308 , H01S5/0422 , H01S5/2063 , H01S5/2081
摘要： A substrate (103) with a surface, the surface having disposed thereon a first stack of distributed Bragg reflectors (105), an active area (107), a second stack of distributed Bragg reflectors (109), a contact region (111), and a dielectric layer (115) is provided. A first isolation trench (201) is formed that extends through the dielectric layer (115), the contact region (111), and into a portion of the second distributed Bragg reflectors (109). A dielectric layer is disposed on the substrate (304). A second isolation trench (307) is formed through the nitride layer (304), the contact region (111), the second distributed Bragg reflectors (109), the active region (107) and a portion of the first distributed Bragg reflectors (105), wherein the second isolation trench (307) encircles the first isolation trench (201). A first electrical contact is formed on the first distributed Bragg reflectors and a second electrical contact (604) is formed on the contact region (111).
摘要翻译：（I）用于制造脊垂直腔表面发射激光器的方法包括以下步骤：a）为基板提供具有分布布拉格反射器的第一叠层的表面，有源区，分布布拉格反射器的第二叠层，接触区和介电层。第一反射器堆叠在表面上，有源区域在第一堆叠上，第二堆叠在有源区域上，接触区域在第二堆叠上，并且电介质位于接触区域上。 b）通过电介质，接触区域和进入第二反射器叠层的一部分的第一隔离沟槽图案化，形成脊。第一隔离沟槽包围电介质的一部分，接触部分和第二反射体层的一部分。 c）使通过电介质，接触，第二反射体叠层，有源区和第一反射体叠层的一部分围绕第一隔离沟槽的第二隔离沟槽图案化。 d）在第一叠反射体上形成第一电接点。 e）在脊的接触区域上形成第二电接触。（II）还要求保护的是（i）的方法，其中f）在接触区域上形成氮化硅膜作为电介质，并且衬底表面被注入形成约束区域g），随后是第二层氮化物被掩模和蚀刻以去除暴露的第二氮化物层，接触，第二堆叠，有源区和第一堆叠的部分以形成第二隔离区。 h）在第一堆叠上形成金属接触，形成隔离沟槽。 i）在衬底上形成第三层氮化物，进行掩模蚀刻以暴露台面。 j）将导电材料沉积在基底上并进行掩模蚀刻以从台面去除导体。 k）在掩模和蚀刻的基板上形成抗反射涂层以暴露一部分导电材料。

7. 发明公开

EP0751392A3 Biosensor or chemical sensor with indicator film 失效
标题翻译：与指示层生物传感器或化学传感器
公开(公告)号：EP0751392A3
公开(公告)日：1997-11-19
申请号：EP96109961.1
申请日：1996-06-20
申请人： MOTOROLA, INC.
发明人： Ackley, Donald E. , Shieh, Chan-Long
IPC分类号： G01N27/414
CPC分类号： G01N27/414 , Y10S436/806
摘要： A chemical sensor (10) includes a thin film transistor (15) with a gate (16) positioned on one side. An insulating layer (42) is positioned on the opposite side and an indicator film (17) is positioned on the insulating layer (42) in generally opposed relationship to the gate (16). Induced charge in the indicator film (17) caused by a biological or chemical species changes the channel current in the transistor (15). A potential on the gate (16) is then used to null out the resulting change in channel current. The potential used to null out the current change is an extremely sensitive measure of the induced charge.

8. 发明公开

EP0751392A2 Biosensor or chemical sensor with indicator film 失效
标题翻译：生物传感器和化学传感器
公开(公告)号：EP0751392A2
公开(公告)日：1997-01-02
申请号：EP96109961.1
申请日：1996-06-20
申请人： MOTOROLA, INC.
发明人： Ackley, Donald E. , Shieh, Chan-Long
IPC分类号： G01N27/414
CPC分类号： G01N27/414 , Y10S436/806
摘要： A chemical sensor (10) includes a thin film transistor (15) with a gate (16) positioned on one side. An insulating layer (42) is positioned on the opposite side and an indicator film (17) is positioned on the insulating layer (42) in generally opposed relationship to the gate (16). Induced charge in the indicator film (17) caused by a biological or chemical species changes the channel current in the transistor (15). A potential on the gate (16) is then used to null out the resulting change in channel current. The potential used to null out the current change is an extremely sensitive measure of the induced charge.
摘要翻译：化学传感器（10）包括具有位于一侧的栅极（16）的薄膜晶体管（15）。绝缘层（42）位于相对侧，并且指示膜（17）以大致相对于栅极（16）的关系定位在绝缘层（42）上。由生物或化学物质引起的指示膜（17）中的诱导电荷改变晶体管（15）中的沟道电流。然后使用门（16）上的电位来消除所导致的通道电流变化。用于消除当前变化的潜力是感应电荷的极其敏感的测量。

9. 发明公开

EP0715379A1 Vertical cavity surface emitting laser having continuous grading 失效
标题翻译：激光镭射激光镭射
公开(公告)号：EP0715379A1
公开(公告)日：1996-06-05
申请号：EP95118364.9
申请日：1995-11-22
申请人： MOTOROLA, INC.
发明人： Shieh, Chan-Long , Lebby, Michael S. , Lee, Hsing-Chung , Grodzinski, Piotr
IPC分类号： H01S3/085
CPC分类号： H01S5/183 , B82Y20/00 , H01S5/3054 , H01S5/3215 , H01S5/34313
摘要： A first stack of distributed Bragg mirrors (106) having alternating layers of aluminum gallium arsenide differing in concentrations of an aluminum are disposed on a surface (104) of a substrate (103) with a first plurality of continuous gradient layers (110) positioned between the alternating layers of differing aluminum concentrations to dynamically move the aluminum concentration from one of the alternating layer to another alternating layers. A first cladding region (113) is disposed on the first stack of distributed Bragg mirrors (106). An active region (118) is disposed on the first cladding region (113) with a second cladding region (128) being dispose on the active region. A second stack of distributed Bragg mirrors (137) having alternating layers of aluminum gallium arsenide differing concentrations of aluminum are disposed on the second cladding region with a second plurality of continuous gradient layers (145) being positioned between the alternating layers of differing aluminum concentrations to dynamically change the aluminum concentration from one of the altering layers to another alternating layers.
摘要翻译：具有不同于铝浓度的铝砷化镓的交替层的分布布拉格反射镜（106）的第一堆叠被布置在基板（103）的表面（104）上，第一多个连续梯度层（110）位于不同铝浓度的交替层，以动态地将铝浓度从交替层之一移动到另一个交替层。第一包层区域（113）设置在分布布拉格反射镜（106）的第一堆叠上。有源区（118）设置在第一包层区（113）上，第二包层区（128）设置在有源区上。具有不同浓度铝的交替铝砷化镓层的分布布拉格反射镜（137）的第二堆叠被布置在第二包层区域上，第二多个连续梯度层（145）位于不同铝浓度的交替层之间动态地将铝浓度从改变层之一改变为另一个交替层。

10. 发明公开

EP0653823A2 A semiconductor device with high heat conductivity 失效
标题翻译：半导体器件具有高的热导率。
公开(公告)号：EP0653823A2
公开(公告)日：1995-05-17
申请号：EP94117496.3
申请日：1994-11-07
申请人： MOTOROLA, INC.
发明人： Lebby, Michael S. , Shieh, Chan-Long , Davis, Kenneth L.
IPC分类号： H01S3/085 , H01S3/043 , H01L21/58 , H01L23/373
CPC分类号： H01L23/5329 , H01L23/3732 , H01L2924/0002 , H01S5/02484 , H01S5/0282 , H01S5/0422 , H01S5/183 , H01S2301/176 , Y10S148/095 , H01L2924/00
摘要： A VCSEL having a first mirror stack (12) positioned on the surface of a substrate (10), an active region (13) positioned on the first mirror stack and substantially coextensive therewith, and a second mirror stack (14) positioned on the active region, the second mirror stack forming a ridge or mesa (16) having a side surface (31). A metal contact layer (40) is positioned on the side surface of the ridge or mesa and on portions of an end of the ridge or mesa to define a light emitting area (45), and a layer of diamond-like material (50) is electrolytically plated on the metal contact layer so as to form a heat conductor to remove heat from the laser.

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