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    • 4. 发明公开
    • FOWLER-NORDHEIM (F-N) TUNNELING FOR PRE-PROGRAMMING IN A FLOATING GATE MEMORY DEVICE
    • EERER SCHWEBEGATTERSPEICHERANORDNUNG的FOWLER-NORDHEIM-TUNNELING ZUM VORPROGRAMMIEREN
    • EP0925586A4
    • 2000-05-31
    • EP97915919
    • 1997-03-10
    • MACRONIX INT CO LTD
    • HUNG CHUN HSIUNGSHIAU TZENG-HUEICHENG YAO-WULEE I-LONGSHONE FUCHIAWAN RAY-LIN
    • G11C16/02G11C16/04G11C16/16G11C16/34H01L27/115G11C16/10
    • G11C16/107G11C16/0416G11C16/16G11C16/3454G11C16/3459H01L27/115
    • A new flash memory cell structure comprising a floating gate memory cell is made in a semiconductor substrate (10) having a first conductivity type, such as p-type. A first well (11) within the substrate by having a second conductivity type different from the first conductivity is included. A second well (12) within the first well is also included having the first conductivity type. A drain (14) and a source (13) are formed in the second well having the second conductivity type, and spaced away from one another to define a channel area between the drain (14) and the source (13). A floating gate (15) and a control gate (17) structure is included over the channel area. The floating gate memory cell is coupled with circuits that induce F-N tunneling of electrons out of the floating gate (15) into the channel area of the substrate (10) for erasing by applying a positive voltage to the second well (12), such as a voltage higher than the supply voltage, applying a positive voltage to the first well (11), which is substantially equal to the positive voltage of the second well (12), applying a negative voltage to the control gate (17) of the cell, while the substrate (10) is grounded.
    • 包括浮动栅极存储单元的新的闪速存储单元结构在具有第一导电类型的半导体衬底(10)中制成,例如p型。 包括具有不同于第一导电性的第二导电类型的衬底内的第一阱(11)。 第一阱中的第二阱(12)也包括具有第一导电类型。 在具有第二导电类型的第二阱中形成漏极(14)和源极(13),并且彼此间隔开以限定漏极(14)和源极(13)之间的沟道区域。 在通道区域上包括浮动栅极(15)和控制栅极(17)结构。 浮动栅极存储单元与电路耦合,该电路通过向第二阱(12)施加正电压而将电子的FN隧穿从浮动栅极(15)引入到衬底(10)的沟道区域中以进行擦除,例如 电压高于电源电压,向第一阱(11)施加正电压,其基本上等于第二阱(12)的正电压,向电池的控制栅极(17)施加负电压 而衬底(10)接地。