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    • 2. 发明公开
    • METALLIC MATERIAL DEPOSITION MASK FOR OLED PIXEL DEPOSITION, AND METHOD FOR PRODUCING SAME
    • EP4339322A2
    • 2024-03-20
    • EP24155790.9
    • 2018-08-24
    • LG Innotek Co., Ltd.
    • PAIK, Jee HeumKIM, Hae SikJO, Yeong DeukLEE, Sang YuCHO, Su HyeonSON, Hyo Won
    • C23C14/12
    • A metallic material deposition mask for OLED pixel deposition according to an embodiment of the present invention includes a deposition region for forming a deposition pattern and a non-deposition region other than the deposition region. The deposition region includes a plurality of effective portions spaced apart in the longitudinal direction and non-effective portions other than the effective portions. The effective portions include: a plurality of small-area holes formed on one surface; a plurality of large-area holes formed on the reverse surface on the opposite side to the one surface; through-holes through which the small-area holes and large-area holes communicate; and island parts between the plurality of through-holes, wherein the through-holes have a dimeter of no greater than 33 um, the distance between the centers of two neighboring through-holes among the through-holes is no greater than 48 um, which corresponds to a resolution of 500 PPI, the inclination angle of the large-area holes with respect to the reverse surface is 40 degrees to 55 degrees, the average center-line average surface roughness of the non-deposition region in the longitudinal direction and average center-line average surface roughness of the non-deposition region in the widthwise direction are 0.1 um to 0.3 um, the average 10-point average surface roughness (Rz) of the non-deposition region in the longitudinal direction and average 10-point average surface roughness of the non-deposition region in the widthwise direction are 0.5 um to 2.0 um, the deviation of the average center-line average surface roughness value in the longitudinal direction with respect to the average center-line average surface roughness in the widthwise direction is less than 50%, and the deviation of the average 10-point average surface roughness value in the longitudinal direction with respect to the average 10-point average surface roughness in the widthwise direction is less than 50%.
    • 4. 发明公开
    • METALLIC MATERIAL DEPOSITION MASK FOR OLED PIXEL DEPOSITION, AND METHOD FOR PRODUCING SAME
    • EP4339322A3
    • 2024-06-12
    • EP24155790.9
    • 2018-08-24
    • LG Innotek Co., Ltd.
    • PAIK, Jee HeumKIM, Hae SikJO, Yeong DeukLEE, Sang YuCHO, Su HyeonSON, Hyo Won
    • C23C14/04C23C14/12H10K59/35H10K71/16
    • C23C14/042C23C14/12H10K71/166H10K59/35
    • A metallic material deposition mask for OLED pixel deposition according to an embodiment of the present invention includes a deposition region for forming a deposition pattern and a non-deposition region other than the deposition region. The deposition region includes a plurality of effective portions spaced apart in the longitudinal direction and non-effective portions other than the effective portions. The effective portions include: a plurality of small-area holes formed on one surface; a plurality of large-area holes formed on the reverse surface on the opposite side to the one surface; through-holes through which the small-area holes and large-area holes communicate; and island parts between the plurality of through-holes, wherein the through-holes have a dimeter of no greater than 33 um, the distance between the centers of two neighboring through-holes among the through-holes is no greater than 48 um, which corresponds to a resolution of 500 PPI, the inclination angle of the large-area holes with respect to the reverse surface is 40 degrees to 55 degrees, the average center-line average surface roughness of the non-deposition region in the longitudinal direction and average center-line average surface roughness of the non-deposition region in the widthwise direction are 0.1 um to 0.3 um, the average 10-point average surface roughness (Rz) of the non-deposition region in the longitudinal direction and average 10-point average surface roughness of the non-deposition region in the widthwise direction are 0.5 um to 2.0 um, the deviation of the average center-line average surface roughness value in the longitudinal direction with respect to the average center-line average surface roughness in the widthwise direction is less than 50%, and the deviation of the average 10-point average surface roughness value in the longitudinal direction with respect to the average 10-point average surface roughness in the widthwise direction is less than 50%.
    • 10. 发明公开
    • METALLIC MATERIAL DEPOSITION MASK FOR OLED PIXEL DEPOSITION, AND METHOD FOR PRODUCING SAME
    • EP3680949A2
    • 2020-07-15
    • EP18853058.8
    • 2018-08-24
    • LG Innotek Co., Ltd.
    • PAIK, Jee HeumKIM, Hae SikJO, Yeong DeukLEE, Sang YuCHO, Su HyeonSON, Hyo Won
    • H01L51/56H01L51/00H01L21/02C23C14/22H01L21/66H01L27/32H01L21/027
    • A metallic material deposition mask for OLED pixel deposition according to an embodiment of the present invention includes a deposition region for forming a deposition pattern and a non-deposition region other than the deposition region. The deposition region includes a plurality of effective portions spaced apart in the longitudinal direction and non-effective portions other than the effective portions. The effective portions include: a plurality of small-area holes formed on one surface; a plurality of large-area holes formed on the reverse surface on the opposite side to the one surface; through-holes through which the small-area holes and large-area holes communicate; and island parts between the plurality of through-holes, wherein the through-holes have a dimeter of no greater than 33 um, the distance between the centers of two neighboring through-holes among the through-holes is no greater than 48 um, which corresponds to a resolution of 500 PPI, the inclination angle of the large-area holes with respect to the reverse surface is 40 degrees to 55 degrees, the average center-line average surface roughness of the non-deposition region in the longitudinal direction and average center-line average surface roughness of the non-deposition region in the widthwise direction are 0.1 um to 0.3 um, the average 10-point average surface roughness (Rz) of the non-deposition region in the longitudinal direction and average 10-point average surface roughness of the non-deposition region in the widthwise direction are 0.5 um to 2.0 um, the deviation of the average center-line average surface roughness value in the longitudinal direction with respect to the average center-line average surface roughness in the widthwise direction is less than 50%, and the deviation of the average 10-point average surface roughness value in the longitudinal direction with respect to the average 10-point average surface roughness in the widthwise direction is less than 50%.