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1. 发明授权

EP0298126B1 OPTICAL CVD PROCESS 失效
标题翻译：光CVD法。
公开(公告)号：EP0298126B1
公开(公告)日：1994-06-15
申请号：EP88900591.4
申请日：1987-12-25
申请人： KAWASAKI STEEL CORPORATION
发明人： OHTA, Tomohiro , SASAKI, Hiroaki , MITOMO, Tohru , KUBOTA, Naoki
IPC分类号： C23C16/48
CPC分类号： C23C16/483 , H01L21/268
摘要： In order to solve the technical problems such as an increase in a film formation speed in an optical CVD process, an improvement in film quality and elimination of restrictions imposed to a light source and a starting gas, the present invention provides an optical CVD process which can be applied particularly advantageously to the fabrication of semiconductors by conjoint use of a pulsating laser beam and continuous light, by application of a plurality of laser beams for applying a second pulsating laser beam to between pulses of a first pulse train and by introduction of an additional gas into a reaction vessel besides the starting gas in order to promote photo decomposition of the starting gas.

2. 发明公开

EP0298126A1 OPTICAL CVD PROCESS 失效
标题翻译： OPTISCHES CVD-VERFAHREN。
公开(公告)号：EP0298126A1
公开(公告)日：1989-01-11
申请号：EP88900591.4
申请日：1987-12-25
申请人： KAWASAKI STEEL CORPORATION
发明人： OHTA, Tomohiro , SASAKI, Hiroaki , MITOMO, Tohru , KUBOTA, Naoki
IPC分类号： C23C16/48
CPC分类号： C23C16/483 , H01L21/268
摘要： In order to solve the technical problems such as an increase in a film formation speed in an optical CVD process, an improvement in film quality and elimination of restrictions imposed to a light source and a starting gas, the present invention provides an optical CVD process which can be applied particularly advantageously to the fabrication of semiconductors by conjoint use of a pulsating laser beam and continuous light, by application of a plurality of laser beams for applying a second pulsating laser beam to between pulses of a first pulse train and by introduction of an additional gas into a reaction vessel besides the starting gas in order to promote photo decomposition of the starting gas.
摘要翻译：光学CVD（化学气相沉积）工艺提高了成膜速度和薄膜质量。将底板放置在引入起始气体的反应容器中。起始气体包括气体膜的成分形成在基板上。起始气体通过用脉冲激光束照射分解。产生的光分解活性气体物质布置在基板上以形成膜。连续光也用于照射起始气体，并且可以用于照射底板以及所生产的膜层。梁是可见的。从一个或两个激光器。如果使用两个激光器，则它们产生具有不同相位的脉冲串。可以向起始气体中加入另外的气体以促进起始气体的光分解。该附加气体吸收波长185nm以上的光。起始气体被规定为含有至少一种烃类气体，含氧气体。或卤化烃或硅烷。额外的气体被规定为含有至少一种类型的卤素，卤素或氧分子的气体。

3. 发明授权

EP0098306B1 WELDING METHOD USING LASER BEAM 失效
标题翻译：使用激光束的焊接方法
公开(公告)号：EP0098306B1
公开(公告)日：1986-10-15
申请号：EP83900278.9
申请日：1983-01-07
申请人： KAWASAKI STEEL CORPORATION
发明人： SASAKI, Hiroaki , NISHIYAMA, Noboru , KAMADA, Akio
IPC分类号： B23K26/00
CPC分类号： B23K26/147 , B23K1/0056 , B23K26/18 , B23K26/211 , B23K26/24 , B23K2203/04 , B23K2203/05

4. 发明公开

EP0098306A1 WELDING METHOD USING LASER BEAM 失效
标题翻译：使用激光束的焊接方法
公开(公告)号：EP0098306A1
公开(公告)日：1984-01-18
申请号：EP83900278.9
申请日：1983-01-07
申请人： KAWASAKI STEEL CORPORATION
发明人： SASAKI, Hiroaki , NISHIYAMA, Noboru , KAMADA, Akio
IPC分类号： B23K26/00
CPC分类号： B23K26/147 , B23K1/0056 , B23K26/18 , B23K26/211 , B23K26/24 , B23K2203/04 , B23K2203/05
摘要： A welding method which has the steps of butting, for example, as shown in Figs. 3(a), 3(b) and 4, the edges of a pair of metal materials (3) to be welded together, such as steel plates, to form a through opening (10) such as an I-shaped opening formed by the gap therebetween, and feeding a filler wire (9) into the opening (10) for laser welding, thereby increasing and improving the allowable value of the gap of the through opening. More particularly, a laser beam (1) is focused by an optical system such as a lens or the like, the focus (11) of the beam (1) is positioned at the same level as the surface of the materials (3) above the opening (10) with a power density of more than 5 x 10 5 W/cm', and the materials are welded together by bringing the point of insertion of the wire (9) into the focus (11) of the beam (1) or into the focus (11) of the beam (1) on the upper surface of the wire (9) in the opening (10). in this case, the end of the wire (9) is melted by the laser beam to form a molten droplet which moves into the opening (10), thereby heating both side walls (12) of the opening and welding the materials together.
摘要翻译：例如，具有对接的步骤的焊接方法如图1和2所示。如图3（a），3（b）和4所示，将一对金属材料（3）的边缘焊接在一起，例如钢板，以形成通孔（10），例如由I形开口并将填充焊丝（9）送入开口（10）进行激光焊接，由此增加并改善了通孔的间隙的允许值。更具体地说，通过诸如透镜等的光学系统聚焦激光束（1），光束（1）的焦点（11）被定位在与上述材料（3）的表面相同的水平功率密度大于5×105W / cm'的开口（10），并且通过将导线（9）插入到光束（1）的焦点（11）中而将材料焊接在一起，或进入梁（1）的焦点（11）在开口（10）中的金属丝（9）的上表面上。在这种情况下，导线9的端部被激光束熔化以形成移动到开口10中的熔滴，由此加热开口的两个侧壁12并将材料焊接在一起。

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