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1. 发明公开

EP0862046A1 Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：EP0862046A1
公开(公告)日：1998-09-02
申请号：EP98301473.9
申请日：1998-02-27
申请人： Jeol Ltd.
发明人： Kitamura, Shinichi , Sueyoshi, Takashi
IPC分类号： G01B7/34 , G01R33/038
CPC分类号： G01Q60/08 , G01B7/00 , G01Q60/32 , G01Q60/52 , G01R33/0385 , Y10S977/865
摘要： There is disclosed a scanning probe microscope capable of producing a topographic image and a magnetic image of a surface of a sample in one measurement. The microscope has a probe tip made of a magnetic material. A physical force such as an atomic force is exerted between the probe tip and the sample. When this physical force does not act on the probe tip, it vibrates at a first vibrational frequency. Displacements of the probe tip are detected by a photodetector. A topograhic information-extracting portion including a voltage-to-current converter, a phase shifter, an FM demodulator, a low-pass filter, and an error amplifier extracts a signal representive of topographic information from the output from the photodetector. A magnetic distribution-extracting portion including an oscillator and a lock-in amplifier extracts information about the magnetism of the sample from the output from the photodetector.

2. 发明授权

EP0924529B1 Method of producing magnetic force image and scanning probe microscope 有权
标题翻译：一种用于生产磁力图像和扫描探针显微镜方法
公开(公告)号：EP0924529B1
公开(公告)日：2005-01-26
申请号：EP98309648.8
申请日：1998-11-25
申请人： Jeol Ltd.
发明人： Kitamura, Shinichi
IPC分类号： G01R33/038 , G01B7/34
CPC分类号： G01Q30/04 , G01Q60/08 , G01R33/0385 , Y10S977/852 , Y10S977/865

3. 发明公开

EP0924529A1 Method of producing magnetic force image and scanning probe microscope 有权
标题翻译： Verfahren zur Herstellung eines Magnetkraftbildes und Rastersondenmikroskop
公开(公告)号：EP0924529A1
公开(公告)日：1999-06-23
申请号：EP98309648.8
申请日：1998-11-25
申请人： Jeol Ltd.
发明人： Kitamura, Shinichi
IPC分类号： G01R33/038 , G01B7/34
CPC分类号： G01Q30/04 , G01Q60/08 , G01R33/0385 , Y10S977/852 , Y10S977/865
摘要： There is disclosed a scanning probe microscope for producing a topographic image of a surface of a sample by non-contact AFM (atomic force microscopy). First, a first topographic image of the sample undergoing magnetic effects is produced from the resonance frequency of a cantilever by FM detection. Then, a second topographic image of the sample free of magnetic effects is produced from the amplitude of the cantilever by slope detection. The difference between these two topographic images is taken. Thus, a magnetic force image is produced.
摘要翻译：公开了一种扫描探针显微镜，用于通过非接触式AFM（原子力显微镜）产生样品表面的地形图像。首先，通过FM检测从悬臂的共振频率产生经历磁效应的样品的第一个地形图像。然后，通过斜率检测从悬臂的幅度产生没有磁效应的样品的第二地形图像。采用这两种地形图像之间的区别。因此，产生磁力图像。

4. 发明授权

EP0862046B1 Scanning probe microscope 失效
标题翻译： Rastersondemikroskop
公开(公告)号：EP0862046B1
公开(公告)日：2004-04-28
申请号：EP98301473.9
申请日：1998-02-27
申请人： Jeol Ltd.
发明人： Kitamura, Shinichi , Sueyoshi, Takashi
IPC分类号： G01B7/34 , G01R33/038
CPC分类号： G01Q60/08 , G01B7/00 , G01Q60/32 , G01Q60/52 , G01R33/0385 , Y10S977/865

5. 发明授权

EP0890820B1 Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：EP0890820B1
公开(公告)日：2004-03-24
申请号：EP98305412.3
申请日：1998-07-08
申请人： Jeol Ltd.
发明人： Kitamura, Shinichi , Sueyoshi, Takashi
IPC分类号： G01B7/34 , G01N27/00 , G01N27/22
CPC分类号： G01Q60/32 , G01Q60/30 , Y10S977/851 , Y10S977/852 , Y10S977/86 , Y10S977/873

6. 发明公开

EP0890821A1 Scanning probe microscope 失效
标题翻译： Rastersondenmikroskop
公开(公告)号：EP0890821A1
公开(公告)日：1999-01-13
申请号：EP98305530.2
申请日：1998-07-10
申请人： Jeol Ltd.
发明人： Kitamura, Shinichi
IPC分类号： G01B7/34 , G01N27/00 , G01N27/22
CPC分类号： G01Q60/30 , Y10S977/849 , Y10S977/852 , Y10S977/86 , Y10S977/868 , Y10S977/871 , Y10S977/873
摘要： There is disclosed a scanning probe microscope capable of producing a topographic image at a high resolution with a cantilever of a large spring constant and, at the same time, a surface potential image at a high resolution. This microscope can take the form of an atomic force microscope that detects the surface potential of a sample, using a gradient of the force acting between the probe tip and a sample. The gradient is represented by the output from a frequency-to-voltage converter. The frequency of an AC voltage applied across the probe tip and the sample is so set that a z-signal fed back to the cantilever to maintain constant the shift in the resonance frequency of the cantilever can sufficiently follow the AC voltage.
摘要翻译：公开了一种扫描探针显微镜，其能够以高弹性常数的悬臂以高分辨率产生地形图像，同时以高分辨率产生表面电位图像。该显微镜可以采用原子力显微镜的形式，其使用在探针尖端和样品之间作用的力的梯度来检测样品的表面电位。梯度由频率 - 电压转换器的输出表示。跨越探针尖端和样品施加的交流电压的频率被设定为使得反馈到悬臂的z信号保持不变，悬臂的谐振频率的偏移可以充分地跟随交流电压。

7. 发明公开

EP0890820A1 Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：EP0890820A1
公开(公告)日：1999-01-13
申请号：EP98305412.3
申请日：1998-07-08
申请人： Jeol Ltd.
发明人： Kitamura, Shinichi , Sueyoshi, Takashi
IPC分类号： G01B7/34 , G01N27/00 , G01N27/22
CPC分类号： G01Q60/32 , G01Q60/30 , Y10S977/851 , Y10S977/852 , Y10S977/86 , Y10S977/873
摘要： There is disclosed a scanning probe microscope capable of producing a topographic image at a high resolution with a cantilever of a large spring constant and, at the same time, a surface potential image at a high resolution. This microscope can take the form of an atomic force microscope that detects the surface potential of a sample, using a force gradient acting between the probe tip and a sample. The gradient is represented by the output from a frequency-to-voltage converter.
摘要翻译：公开了一种扫描探针显微镜，其能够以大弹簧常数的悬臂以高分辨率产生地形图像，并且同时以高分辨率产生表面电位图像。这种显微镜可以采用原子力显微镜的形式，使用探针尖端和样品之间的力梯度来检测样品的表面电位。梯度由频率 - 电压转换器的输出表示。

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