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1. 发明授权

EP0580212B1 Variable axis stigmator 失效
标题翻译：可变轴象散校正
公开(公告)号：EP0580212B1
公开(公告)日：1999-12-29
申请号：EP93201985.4
申请日：1993-07-07
申请人： International Business Machines Corporation
发明人： Langer, Guenther Otto , Petric, Paul F.
IPC分类号： H01J37/153 , H01J37/141 , H01J37/30
CPC分类号： H01J37/141 , H01J37/153 , H01J37/3007

2. 发明公开

EP0484260A3 Compensation of mutual inductance in multi-channel deflection yokes 失效
标题翻译：多通道偏转线圈中互补电感的补偿
公开(公告)号：EP0484260A3
公开(公告)日：1992-06-03
申请号：EP91480147.7
申请日：1991-09-26
申请人： International Business Machines Corporation
发明人： Gaston, Charles A. , Ho, Cecil T. , Langner, Guenther O. , Petric, Paul F. , Sturans, Maris A.
IPC分类号： H01J29/76 , H01J37/147
CPC分类号： H01J37/1475 , H01J29/76 , H01J2237/1504
摘要： A method and apparatus for providing compensation for mutual inductance between co-directional coils of a multichannel yoke utilizes a transformer to impose a voltage on a slow response time driver circuit of a first coil which corresponds to the current in a second coil. The voltage deliberately coupled to the driver circuit of the first coil opposes the induced voltage in the first coil and effectively inhibits current disturbances from being induced in the driver circuit so as to prevent the slow response time driver circuit from attempting to correct such a disturbance and extending the duration of the disturbance. The improvement in settling time thus achieved allows realization of the full potential of multi-channel generation of magnetic fields, particularly as applied to charged particle beam deflection arrangements such as in cathode ray tubes and electron beam lithography devices. Utilization of the invention also allows avoidance of geometrical constraints on the relative location of coils to alter their mutual inductance.

3. 发明公开

EP0580212A1 Variable axis stigmator 失效
标题翻译： Stigmator mit variabler Achse。
公开(公告)号：EP0580212A1
公开(公告)日：1994-01-26
申请号：EP93201985.4
申请日：1993-07-07
申请人： International Business Machines Corporation
发明人： Langer, Guenther Otto , Petric, Paul F.
IPC分类号： H01J37/153 , H01J37/141 , H01J37/30
CPC分类号： H01J37/141 , H01J37/153 , H01J37/3007
摘要： The magnetic axis of a stigmation yoke is varied from the mechanical axis of the stigmation yoke by differentially driving pairs of coils in a quadrupole configuration with currents which differ from a nominal stigmation current by approximately equal amounts, applied in opposite senses. Set-up procedures for electron beam deflection systems, such as in e-beam tools, are automated by emulating manual procedures in combination with electrical alteration of the magnetic axis of the stigmator yoke. Stigmation errors can also be collected under automated set- up procedure control to allow dynamic correction of astigmatism in electron beam deflection system. Electrically variability of the magnetic axis of the stigmator yoke also allows the placement of the stigmator yoke at a position in the electron optical column other than prior to deflection stages as well as improved freedom from positional and aberrational errors.
摘要翻译：通过以四极配置差异驱动线圈对，电流不同于以相反的方向施加的额定极化电流大约相等的电流，柱形磁轭的磁轴线从标称磁轭的机械轴线变化。用于电子束工具的电子束偏转系统的设置程序通过模拟手动过程与喷枪轭的磁轴的电气变化相结合而自动化。也可以在自动设置程序控制下收集标记误差，以允许电子束偏转系统中的散光动态校正。柱状磁轭的磁轴的电学可变性还允许将标称磁轭放置在电子光学柱的位置之外，而不是在偏转阶段之前，以及改进的位置和像差误差的自由度。

4. 发明公开

EP0484260A2 Compensation of mutual inductance in multi-channel deflection yokes 失效
标题翻译：多通道偏转线圈中的互感补偿
公开(公告)号：EP0484260A2
公开(公告)日：1992-05-06
申请号：EP91480147.7
申请日：1991-09-26
申请人： International Business Machines Corporation
发明人： Gaston, Charles A. , Ho, Cecil T. , Langner, Guenther O. , Petric, Paul F. , Sturans, Maris A.
IPC分类号： H01J29/76 , H01J37/147
CPC分类号： H01J37/1475 , H01J29/76 , H01J2237/1504
摘要： A method and apparatus for providing compensation for mutual inductance between co-directional coils of a multichannel yoke utilizes a transformer to impose a voltage on a slow response time driver circuit of a first coil which corresponds to the current in a second coil. The voltage deliberately coupled to the driver circuit of the first coil opposes the induced voltage in the first coil and effectively inhibits current disturbances from being induced in the driver circuit so as to prevent the slow response time driver circuit from attempting to correct such a disturbance and extending the duration of the disturbance. The improvement in settling time thus achieved allows realization of the full potential of multi-channel generation of magnetic fields, particularly as applied to charged particle beam deflection arrangements such as in cathode ray tubes and electron beam lithography devices. Utilization of the invention also allows avoidance of geometrical constraints on the relative location of coils to alter their mutual inductance.
摘要翻译：用于提供对多通道磁轭的同向线圈之间的互感的补偿的方法和设备利用变压器将电压施加到第一线圈的对应于第二线圈中的电流的慢响应时间驱动器电路。故意耦合到第一线圈的驱动器电路的电压与第一线圈中的感应电压相反并且有效地抑制了驱动器电路中感应的电流干扰，从而防止响应时间缓慢的驱动器电路尝试校正这种干扰并且延长干扰的持续时间。由此实现的稳定时间的改善允许实现多通道磁场生成的全部潜力，特别是应用于诸如阴极射线管和电子束光刻设备中的带电粒子束偏转布置。本发明的利用还允许避免对线圈的相对位置的几何约束以改变它们的互感。

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