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    • 6. 发明公开
    • High resolution three-axis scanning squid microscope
    • Hochauflosender Squid-Mikroskop mit 3-Achsabtastung
    • EP0697602A2
    • 1996-02-21
    • EP95108604.0
    • 1995-06-06
    • International Business Machines Corporation
    • Kirtley, John RobertKetchen, Mark Benjamin
    • G01R33/035
    • G01R33/0206G01R33/0358Y10S505/846
    • The present invention provides a miniature three-axis instrument (70) for measuring the actual magnetic field vector. The novel instrument of the invention has three magnetometers (72,74,76) on a single chip (71) configured such that their pickup elements are coplanar, colinear and in fairly close proximity to each other. The tip of the chip, with the three pickup elements (72,74,76), is fashioned to allow as close an approach to the surface to be scanned as is possible with current single magnetometer scanning microscopes. The different positions of the pickup elements on the chip is compensated for digitally after data acquisition. The z-axis magnetometer (72) has a planar pickup coil structure as is known in the art while the x-axis and y-axis sensing elements (74,76) have a novel multi-turn, thin-film structure in the form of a planar solenoid which is another novel aspect of the present invention.
    • 本发明提供一种用于测量实际磁场矢量的微型三轴仪器(70)。 本发明的新型仪器在单个芯片(71)上具有三个磁力计(72,74,76),其配置成使得它们的拾取元件是共面的,共线的并且彼此相当接近。 具有三个拾取元件(72,74,76)的芯片的尖端被形成为允许与目前的单个磁力计扫描显微镜一样接近要扫描的表面。 在数据采集之后,芯片上的拾取元件的不同位置被数字地补偿。 z轴磁力计(72)具有本领域已知的平面拾取线圈结构,而x轴和y轴感测元件(74,76)具有新颖的多匝薄膜结构 的平面螺线管,这是本发明的另一个新颖的方面。