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    • 5. 发明授权
    • MAGNETIC SENSOR AND ITS SENSITIVITY MEASURING METHOD
    • 磁性传感器及其灵敏度测量方法
    • EP2131205B1
    • 2018-05-02
    • EP08722634.6
    • 2008-03-21
    • Asahi Kasei EMD Corporation
    • YAMASHITA, MasayaYAMAGATA, Yo
    • G01R33/07G01R33/02G01R35/00
    • G01R33/07G01R33/0206G01R35/005
    • The present invention relates to a magnetic sensor with a sensitivity measuring function and a sensitivity measuring device and a method thereof having a magnetic substance on a semiconductor substrate provided with a plurality of Hall elements. Magnetic sensitivity surfaces (31) detect flux density, and a switching unit (32) extracts magnetic field intensity information of each axis, and inputs it to a sensitivity calculating unit (34) via an amplifier unit (33). The sensitivity calculating unit (34) calculates the sensitivity from the magnetic field intensity information about the individual axes from the magnetic sensitivity surfaces (31). The sensitivity calculating unit includes an axial component analyzing unit (34a) for analyzing the flux density from the magnetic sensitivity surfaces (31) into magnetic components of the individual axes; a sensitivity decision unit (34b) for deciding the sensitivity by comparing the individual axial components of the magnetic field intensity from the axial component analyzing unit (34a) with a reference value; and a sensitivity correction unit (34c) for carrying out sensitivity correction in accordance with the sensitivity information from the sensitivity decision unit (34b). A sensor diagnostic unit (39) carries out self-diagnosis of the validity of the sensitivity of the magnetic sensor according to the sensitivity information, and performs self-sensitivity correction (adjustment).
    • 9. 发明公开
    • MAGNETIC DETECTION DEVICE AND METHOD FOR PRODUCING SAME
    • MAGNETDETEKTOR UND VERFAHREN ZUR HERSTELLUNG DAVON
    • EP3141920A1
    • 2017-03-15
    • EP15789848.7
    • 2015-03-12
    • Aichi Steel Corporation
    • YAMAMOTO MichiharuNAGAO Tomohiko
    • G01R33/02G01C17/30H01L43/00
    • G01R33/063G01C17/30G01R33/0052G01R33/02G01R33/0206H01L27/22H01L43/00H01L43/02H01L43/12
    • An object is to provide a magnetic detection device that can be reduced in size and thickness. The magnetic detection device (1) of the present invention comprises: a substrate (S); and a first magneto-impedance element (MI element) disposed at one surface side of the substrate and comprising a first magneto-sensitive wire (W1) and a first detection coil (C1). The first magneto-sensitive wire senses an external magnetic field component in a first axis direction in which the first magneto-sensitive wire extends. The first detection coil loops around the first magneto-sensitive wire. The first detection coil according to the present invention comprises a left-side coil part (C11) and a right-side coil part (C12) that coexist along the first magneto-sensitive wire, and is provided with a magnetic field direction changing body (F1) composed of a soft magnetic material of which at least a part is disposed at another surface side of the substrate or in the substrate above an intermediate position between the left-side coil part and the right-side coil part. The magnetic field direction changing body is able to change an external magnetic field component in a third axis direction intersecting the substrate to a measurement magnetic field component in the first axis direction. The external magnetic field component in the third axis direction is able to be detected on the basis of a left-side output obtained from the left-side coil part and a right-side output obtained from the right-side coil part.
    • 目的在于提供能够减小尺寸和厚度的磁检测装置。 本发明的磁检测装置(1)包括:基板(S); 以及设置在所述基板的一个表面侧的包括第一磁敏线(W1)和第一检测线圈(C1)的第一磁阻元件(MI元件)。 第一感磁线感测第一磁敏线延伸的第一轴方向上的外部磁场分量。 第一检测线圈围绕第一感磁线环绕。 根据本发明的第一检测线圈包括沿着第一磁敏线共存的左侧线圈部分(C11)和右侧线圈部分(C12),并且设置有磁场方向改变体( F1),其由至少一部分设置在基板的另一表面侧或在基板的左侧线圈部和右侧线圈部之间的中间位置之上的软磁性材料构成。 磁场方向变换体能够将与基板相交的第三轴方向的外部磁场成分变更为第一轴方向的测定磁场成分。 可以根据从左侧线圈部分获得的左侧输出和从右侧线圈部分获得的右侧输出来检测第三轴方向上的外部磁场分量。
    • 10. 发明公开
    • SINGLE-CHIP AND THREE-AXIS LINEAR MAGNETIC SENSOR AND MANUFACTURING METHOD THEREFOR
    • DREIACHSIGER线性传感器MIT EINZELCHIP UND HERSTELLUNGSVERFAHRENDAFÜR
    • EP3133412A1
    • 2017-02-22
    • EP15779547.7
    • 2015-04-14
    • Multidimension Technology Co., Ltd.
    • DEAK, James Geza
    • G01R33/09G01R33/04
    • G01R33/0206G01R33/0011G01R33/0052G01R33/04G01R33/09H01L28/20
    • A monolithic three-axis linear magnetic sensor and manufacturing method thereof, the sensor comprises an X-axis sensor (3), a Y-axis sensor (4) and a Z-axis sensor (5). Wherein, the X-axis sensor (3) comprises a referenced bridge and at least two X ferromagnetic flux guides (8). The Y-axis sensor (4) comprises a push-pull bridge and at least two Y ferromagnetic flux guides (23, 24). The Z-axis sensor (5) comprises a push-pull bridge and at least one Z ferromagnetic flux guide (10). The bridge arms of the referenced bridge and push-pull bridge are each formed by one or more magnetoresistive elements (13, 14, 15, 16) that are electrically interconnected. The directions of the sensing axes and the directions of magnetization of the pinned layers of the magnetoresistive elements (13, 14, 15, 16) are all oriented along the X-axis. This manufacturing method comprises first depositing a magnetoresistive thin film on a wafer, and then performing several processes such as magnetic annealing, photolithography, etching, coating, and the like in order to realize a sensor. This monolithic three-axis linear magnetic sensor has the advantages of low cost, easy manufacturability, good linearity, and high sensitivity.
    • 一种单片三轴线性磁传感器及其制造方法,该传感器包括X轴传感器(3),Y轴传感器(4)和Z轴传感器(5)。 其中,X轴传感器(3)包括参考桥和至少两个X铁磁通量引导件(8)。 Y轴传感器(4)包括推挽桥和至少两个Y铁磁通量引导件(23,24)。 Z轴传感器(5)包括推挽桥和至少一个Z铁磁通量引导件(10)。 参考桥和推挽桥的桥臂各自由一个或多个电连接的磁阻元件(13,14,15,16)形成。 感测轴的方向和磁阻元件(13,14,15,16)的被钉扎层的磁化方向都沿着X轴取向。 该制造方法包括首先在晶片上沉积磁阻薄膜,然后进行诸如磁性退火,光刻,蚀刻,涂覆等的几个工艺,以便实现传感器。 该单片三轴线性磁传感器具有成本低,易制造,线性好,灵敏度高的优点。