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1. 发明公开

EP0730266A3 Apparatus for plasma-processing a disk substrate and method of manufacturing a magnetic disk 失效
标题翻译：用于制造磁盘用于磁盘基片的等离子体处理和方法的装置
公开(公告)号：EP0730266A3
公开(公告)日：1998-07-01
申请号：EP95105143
申请日：1995-04-05
申请人： HITACHI LTD
发明人： KOKAKU YUICHI , INABA HIROSHI , SASAKI SHINJI , KATAOKA HIROYUKI , HONDA YOSHINORI , TERAKADO MASATOMO , FURUSAWA KENJI
IPC分类号： C30B29/04 , C23C16/26 , C23C16/27 , C23C16/44 , C23C16/458 , C23C16/50 , C23C16/509 , C23C16/54 , G11B5/66 , G11B5/73 , G11B5/84
CPC分类号： H01J37/32082 , C23C16/26 , C23C16/4404 , C23C16/4412 , C23C16/4587 , C23C16/509 , C23C16/54 , G11B5/8404 , H01J37/32541
摘要： A continuous electrode (5) entirely held at substantially the same potential is disposed in a plasma processing chamber (4) to define the inner wall thereof. A disk substrate (1) is placed in the electrode, and a plasma is generated around the disk substrate in a uniform state. A cross-sectional area of the plasma extending over the upper and lower surfaces of the disk substrate is made larger than a combined area of the disk substrate and its holder (2). The plasma uniformly surrounds the outer periphery and a central hole of the disk substrate. Further, a gas exhaust system (10, 32, 33, 331) for exhausting a reactive gas from the plasma processing chamber is made up of a main exhaust path (10) and a bypass exhaust path (33) such that the bypass exhaust path is used to exhaust the reactive gas at a stroke from the plasma processing chamber after plasma processing has been performed on the disk substrate, thus reducing a time required to exhaust the reactive gas. This structure enables a diamond-like carbon (DLC) protective film (36) to be uniformly formed on both surfaces of the disk substrate while improving the productivity of magnetic disk substrates.
摘要翻译：的连续电极（5）在基本相同的电位完全保持在等离子体处理室（4）被布置成限定其内壁。一种磁盘基片（1）以均匀的状态被放置在电极上，并产生等离子体周围的盘基片。等离子体延伸过盘基片的上表面和下表面的截面积比所述盘基片的组合面积和其保持件变得更大（2）。等离子体均匀包围外周边和所述盘基片的中心孔。此外，排气系统（10，32，33，331），用于从该等离子体处理室排出的反应气体由主排气路径（10）和旁通排气通路（33）的检测所做的旁通排气通路用于在从所述等离子体处理室的行程以排出反应气体后等离子体处理已被执行的盘基片，从而减少以排出反应气体所需的时间。该结构使得类金刚石碳（DLC）保护膜（36），以均匀地形成在盘基片的两个表面上，同时提高磁盘用基板的生产率。

2. 发明公开

EP0809238A3 Magnetic recording media and magnetic recording system using the same 失效
标题翻译：一种磁记录介质，和所述支撑用磁记录系统
公开(公告)号：EP0809238A3
公开(公告)日：1998-07-08
申请号：EP97108035
申请日：1997-05-16
申请人： HITACHI LTD
发明人： KANBE TETSUYA , ISHIKAWA AKIRA , TAMAI ICHIRO , YAHISA YOTSUO , HOSOE YUZURU , TANAHASHI KIWAMU , MATSUDA YOSHIBUMI , KATAOKA HIROYUKI , ONO TOSHINORI , FUKAYA SHINJI , URA KAZUHIRO , ENDO NAOTO , YAMAMOTO TOMOO
IPC分类号： G11B5/00 , G11B5/012 , G11B5/39 , G11B5/66 , G11B5/73 , G11B5/64
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/00 , G11B5/012 , G11B5/66 , G11B5/7325 , G11B2005/0016 , G11B2005/3996
摘要： A magnetic recording system includes an in-plane magnetic recording medium (4) having a magnetic layer (23) fabricated on a single underlayer or on a plurality of underlayers (21 - 22) respectively fabricated on a substrate (20); a driver unit for driving the in-plane magnetic recording medium in a write direction; a magnetic head (1) having a read unit and a write unit; a unit (2) for moving the magnetic head relative to the in-plane magnetic recording medium; and a read/write signal processing unit for reading an output signal from the magnetic head and writing an input signal to the magnetic recording media, wherein the read unit of the magnetic head is a magnetoresistive head and the single underlayer or at least one (21) of the plurality of underlayers is made of Co-containing amorphous material or fine crystal material, or is made of alloy material, the alloy material having as the main components at least one element selected from a group consisting of Cr, Mo, V and Ta and containing at least one element selected from a group consisting of B, C, P and Bi. The magnetic recording system can be realized which can read and write high density information and have high reliability.
摘要翻译：一种磁性记录系统包括具有磁性层（23）上的单个底层或上的下层（21 - 22）多个制造面内磁记录介质（4）的基板（20）上分别制造; 用于驱动在写入方向的面内磁记录媒体的驱动器单元; 磁头（1），具有一个读出单元和一个写入单元; 用于相对于所述面内磁记录媒体的磁头移动的单元（2）; 和用于读取关于输出信号从磁头与输入信号的写入到磁性记录介质，worin磁头的读出单元的读/写信号处理单元是磁阻磁头和单个基底层或至少一个（21 ）理解各层的多个由含Co的无定形材料或微细的晶体材料组成，或由合金材料制成的，从一组由Cr，Mo，V和的选择的至少一个元件，其具有作为主要成分的合金材料 Ta和含有选自由B中选出的至少一种元素，所述的磁性记录系统就能实现可以读取和写入的高密度信息并且具有高可靠性C，P和Bi ..

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