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    • 10. 发明公开
    • Ni-X, NI-Y, and NI-X-Y alloys with or without oxides as sputter targets for perpendicular magnetic recording
    • Ni-X,NI-Y-和NI-X-Y-Legierungen mit和ohne als Sputtertargetsfürsenkrechte Magnetaufzeichnung
    • EP1930884A1
    • 2008-06-11
    • EP07250678.5
    • 2007-02-19
    • Heraeus, Inc.
    • Das, AnirbanKennedy, Steven RogerRacine, Michael Gene
    • G11B5/84G11B5/73C23C14/34
    • G11B5/732C23C14/025C23C14/165C23C14/3414G11B5/656G11B5/8404G11B5/851
    • The various embodiments of the present invention generally relate to the deposition of a seedlayer for a magnetic recording medium used for perpendicular magnetic recording (PMR) applications, where the seedlayer provides for grain size refinement and reduced lattice mis-fit for a subsequently deposited underlayer or granular magnetic layer, and where the seedlayer is deposited using a nickel (Ni) alloy based sputter target. The nickel (Ni) alloy can be binary (NiX; Ni-Y) or ternary (Ni-X-Y). In addition, the binary (Ni-X; Ni-Y) or ternary (Ni-X-Y) nickel (Ni) based alloys can be further alloyed with metal oxides, thus forming seedlayer thin films with a granular microstructure containing metallic grains, surrounded by an oxygen rich grain boundary. The nickel-based alloys (with or without metal oxides) of the various exemplary embodiments can be made by powder metallurgical technique or by melt-casting techniques, with or without thermo-mechanical working.
    • 本发明的各种实施方案通常涉及用于垂直磁记录(PMR)应用的磁记录介质的种子层的沉积,其中籽晶层提供晶粒尺寸细化并减少随后沉积的底层的晶格错配,或 粒状磁性层,并且其中使用基于镍(Ni)合金的溅射靶沉积种子层。 镍(Ni)合金可以是二元(NiX; Ni-Y)或三元(Ni-X-Y)。 此外,二元(Ni-X; Ni-Y)或三元(Ni-XY)镍(Ni)基合金可以进一步与金属氧化物合金化,从而形成具有包含金属颗粒的颗粒状微观结构的层状薄膜, 富氧晶界。 各种示例性实施例的镍基合金(具有或不具有金属氧化物)可以通过粉末冶金技术或通过熔体流延技术制造,具有或不具有热机械加工。