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1. 发明公开

EP0376286A3 Method and apparatus for fine movement of specimen stage of electron microscope 失效
标题翻译：电子显微镜样品精细运动的方法和装置
公开(公告)号：EP0376286A3
公开(公告)日：1990-09-12
申请号：EP89124031.9
申请日：1989-12-27
申请人： HITACHI, LTD.
发明人： Kobayashi, Hiroyuki , Izawa, Shigeru , Ukiana, Motohide
IPC分类号： G05D3/20 , H01J37/20
CPC分类号： G05B19/231 , G05B2219/35459 , G05B2219/45182 , H01J37/20
摘要： Method and apparatus for fine movement of a specimen stage (7) of an electron microscope wherein a value of enlargement magnification M of the electron microscope is set, a manipulation unit (14) adapted to move an image enlarged by the electron microscope in X or Y direction is then manipulated, a pulse signal PX2 or PY2 which accords with a manipulation amount of the manipulation unit is delivered, the specimen stage is moved in the X or Y direction in accordance with the delivered pulse signal, a pulse signal PX1 or PY1 which accords with a moving distance of the specimen stage in the X or Y direction is delivered, and the operation of movement of the specimen stage is stopped when the relation represented by PX2 · K/M = PX1 or the relation represented by PY2 · K/M = PY1 stands, where K is a constant.

2. 发明公开

EP0510618A1 Electron microscope 失效
标题翻译： Elektronenmikroskop。
公开(公告)号：EP0510618A1
公开(公告)日：1992-10-28
申请号：EP92106891.2
申请日：1992-04-22
申请人： HITACHI, LTD. , Hitachi Instrument Engineering Co., Ltd.
发明人： Ukiana, Motohide , Kobayashi, Hiroyuki , Yotsuji, Takafumi
IPC分类号： H01J37/20
CPC分类号： H01J37/20
摘要： A transmission type electron microscope in accordance with an embodiment of the present invention comprises a main body. The main body includes a sample carrying means (10) for carrying a plurality of samples (4) to allow sequential observation of the samples. Although a carrier means in the prior art is of a manual type, the carrier means in the present invention can be operated from a distance place on a remote control basis, thus securing a safety in its sample observation works. Further, since an acceleration voltage and other measuring conditions as well as a means for finely moving a sample in the main body can be controlled from a location away from the main body, a plurality of users can commonly use the main body.
摘要翻译：根据本发明实施例的透射型电子显微镜包括主体。主体包括用于承载多个样品（4）以允许连续观察样品的样品携带装置（10）。虽然现有技术中的承载装置是手动式的，但是本发明的承载装置可以在遥控基础上从远距离的地方进行操作，从而确保其样品观察工作的安全性。此外，由于可以从远离主体的位置控制加速电压和其他测量条件以及用于精细移动主体中的样本的装置，所以多个用户可以共同使用主体。

3. 发明授权

EP0376286B1 Method and apparatus for fine movement of specimen stage of electron microscope 失效
标题翻译：的电子显微镜的试样保持器的微动控制方法及装置。
公开(公告)号：EP0376286B1
公开(公告)日：1995-05-10
申请号：EP89124031.9
申请日：1989-12-27
申请人： HITACHI, LTD.
发明人： Kobayashi, Hiroyuki , Izawa, Shigeru , Ukiana, Motohide
IPC分类号： G05D3/20 , H01J37/20
CPC分类号： G05B19/231 , G05B2219/35459 , G05B2219/45182 , H01J37/20

4. 发明公开

EP0376286A2 Method and apparatus for fine movement of specimen stage of electron microscope 失效
标题翻译： Methode und Vorrichtung zur feinen Bewegungssteuerung des Probenhalters eines Elektronenmikroskops。
公开(公告)号：EP0376286A2
公开(公告)日：1990-07-04
申请号：EP89124031.9
申请日：1989-12-27
申请人： HITACHI, LTD.
发明人： Kobayashi, Hiroyuki , Izawa, Shigeru , Ukiana, Motohide
IPC分类号： G05D3/20 , H01J37/20
CPC分类号： G05B19/231 , G05B2219/35459 , G05B2219/45182 , H01J37/20
摘要： Method and apparatus for fine movement of a specimen stage (7) of an electron microscope wherein a value of enlargement magnification M of the electron microscope is set, a manipulation unit (14) adapted to move an image enlarged by the electron microscope in X or Y direction is then manipulated, a pulse signal PX2 or PY2 which accords with a manipulation amount of the manipulation unit is delivered, the specimen stage is moved in the X or Y direction in accordance with the delivered pulse signal, a pulse signal PX1 or PY1 which accords with a moving distance of the specimen stage in the X or Y direction is delivered, and the operation of movement of the specimen stage is stopped when the relation represented by PX2 · K/M = PX1 or the relation represented by PY2 · K/M = PY1 stands, where K is a constant.
摘要翻译：电子显微镜的放大倍数M设定的电子显微镜的试样台（7）的精细运动的方法和装置，适于将由电子显微镜放大的图像移动到X中的操作单元（14） Y方向被操作，输送符合操作单元的操作量的脉冲信号PX2或PY2，根据传送的脉冲信号，将样本台沿X或Y方向移动，脉冲信号PX1或PY1 传送与X，Y方向的移动距离一致的移动距离，由PX2表示的关系停止样品台的移动。 K / M = PX1或由PY2表示的关系。 K / M = PY1，其中K是常数。

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