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1. 发明公开

EP1724809A1 Particle-optical apparatus for the irradiation of a sample 审中-公开
标题翻译： TeilchenoptischesGerätzur Bestrahlung einer Probe
公开(公告)号：EP1724809A1
公开(公告)日：2006-11-22
申请号：EP05076151.9
申请日：2005-05-18
申请人： FEI COMPANY
发明人： Knowles, Ralph W.
IPC分类号： H01J37/28
CPC分类号： H01J37/256 , H01J37/228 , H01J37/28 , H01J2237/16 , H01J2237/2608
摘要： Many particle-optical apparatus operate with a gas pressure near the sample (118) higher than in the particle-optical column. To avoid leakage into the column a pressure limiting aperture (PLA) with a small diameter is used through which the particle beam (160) leaves the column. Often there is also the need to combine the use of such a column with a path for electro-magnetic radiation, e.g. for the detection of X-rays or when a light-optical microscope is included for observation and/or navigation. Creating a path for this radiation (and optical elements thereof) typically results in an increased working distance for the column, resulting in several disadvantages. The invention offers a solution by placing a window (156) transparent to the electro-magnetic radiation but impervious to gas adjacent to the PLA (140), through which the beam of radiation (170) can enter and/or emerge from the column, to be guided and/or detected further.
摘要翻译：许多粒子光学装置在样品（118）附近的气体压力高于颗粒光学柱中操作。为了避免泄漏到柱中，使用具有小直径的压力限制孔（PLA），粒子束（160）离开柱。通常还需要将这种柱的使用与用于电磁辐射的路径相结合，例如，用于检测X射线或当包含用于观察和/或导航的光学显微镜时。为该辐射（及其光学元件）创建路径通常导致柱的工作距离增加，导致几个缺点。本发明通过将窗口（156）放置为对电磁辐射透明但不透过与PLA（140）相邻的气体而提供了解决方案，辐射束（170）可以通过该窗口进入和/或从柱子出来，被引导和/或进一步检测。

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