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1. 发明公开

EP3896717A1 HIGH FREQUENCY ANTENNA AND PLASMA PROCESSING DEVICE 有权
公开(公告)号：EP3896717A1
公开(公告)日：2021-10-20
申请号：EP21168282.8
申请日：2021-04-14
申请人： EMD Corporation , Tomoegawa Co., Ltd.
发明人： EBE, Akinori , TSUDA, Hajime , MORIUCHI, Hideki
IPC分类号： H01J37/32 , H01Q1/00
摘要： [OBJECT]
To provide a radio-frequency antenna through which a high amount of current can be efficiently passed even at a radio-frequency level for plasma generation, as well as a plasma processing device utilizing the radio-frequency antenna.
[MEANS FOR SOLVING PROBLEM]
A radio-frequency antenna (10) according to the present invention includes a metal fiber sheet. A plasma processing device according to the present invention includes: a vacuum container (21) including a wall (211) having an opening (213); a radio-frequency antenna (10) including a metal fiber sheet and located at the opening (213); and a dielectric protection plate (12) located closer to the interior of the vacuum container (21) than the radio-frequency antenna (10) and configured to close the opening (213) in a gas-tight manner. The radio-frequency antenna (10) including a metal fiber sheet has a larger surface area and an accordingly lower impedance to a radio-frequency current than a radio-frequency antenna including a metal plate having the same outer shape. Therefore, it allows a radio-frequency current commonly used for plasma generation (e.g., at a frequency of 13.56 MHz) to be more efficiently passed through in large amounts.

2. 发明公开

EP2517874A1 CLAY FILM COMPOSITE 审中-公开
标题翻译： TON-FOLIEN-VERBUND
公开(公告)号：EP2517874A1
公开(公告)日：2012-10-31
申请号：EP10838979.2
申请日：2010-12-24
申请人： Tomoegawa Co., Ltd.
发明人： TSUDA, Hajime , MOTEGI, Katsumi
IPC分类号： B32B9/00 , B32B27/00 , C01B33/40
CPC分类号： B32B9/04 , B32B27/08 , B32B27/20 , C01B33/40 , Y10T156/10 , Y10T428/239 , Y10T428/249921 , Y10T428/26
摘要： A clay film composition which exhibits high gas barrier properties even under high humidity conditions is provided.
Disclosed is a clay film composite having a clay film comprising a clay only or of a clay and an additive, and provided on at least one surface thereof, a water vapor barrier layer having a water permeability of 1.0 g/m 2 ·day or less. The clay film preferably has a distance between clay particle layers of 1.3 nm or less. The clay film preferably has a water content of 3.0% by mass or less. It is preferable to melt-bond the water vapor barrier layer to the clay film.
摘要翻译：提供即使在高湿度条件下也显示出高阻气性的粘土膜组合物。公开了一种粘土膜复合材料，其具有仅含粘土或粘土和添加剂的粘土膜，并且在其至少一个表面上设置透水性为1.0g / m 2·天以下的水蒸气阻隔层。粘土膜的粘土颗粒层之间的距离优选为1.3nm以下。粘土膜的水含量优选为3.0质量％以下。优选将水蒸气阻隔层熔融粘合到粘土膜。

3. 发明公开

EP2030779A1 THIN FILM AND THIN FILM LAMINATE USING THE SAME 审中-公开
标题翻译： DÜNNFILMUND DIENEN VERWENDENDESDÜNNFILMLAMINAT
公开(公告)号：EP2030779A1
公开(公告)日：2009-03-04
申请号：EP07740387.1
申请日：2007-03-29
申请人： Tomoegawa Co., Ltd.
发明人： INOUE, Tomohito , MOTEGI, Katsumi , TSUDA, Hajime
IPC分类号： B32B18/00 , B32B9/00 , B32B27/20
CPC分类号： B32B9/00 , B29K2083/005 , B29K2105/16 , B32B2255/00 , B32B2429/00 , B32B2457/00 , C08G77/80 , C09D183/04 , H01L31/03926 , H01L31/049 , Y02E10/50 , Y10T428/249995
摘要： The object of the present invention is to provide a thin film which has excellent heat resistance and water resistance together with excellent flexibility, and a thin film laminate comprising the thin film, and the present invention provides a thin film comprising a heat-resistant fluid between layers comprising heat-resistant flakes.
摘要翻译：本发明的目的是提供一种具有优异的耐热性和耐水性以及优异的柔韧性的薄膜，以及包含该薄膜的薄膜层压体，本发明提供一种薄膜，其包含耐热流体，层包含耐热薄片。

4. 发明公开

EP1938965A1 CLAY THIN FILM SUBSTRATE, CLAY THIN FILM SUBSTRATE WITH ELECTRODE, AND DISPLAY USING THOSE 审中-公开
标题翻译： DÜNNFILMTONSUBSTRAT，DÜNNFILMTONSUBSTRATMIT ELEKTRODE UND DIESE VERWENDENDE ANZEIGE
公开(公告)号：EP1938965A1
公开(公告)日：2008-07-02
申请号：EP06798107.6
申请日：2006-09-19
申请人： Tomoegawa Co., Ltd. , National Institute of Advanced Industrial Science and Technology
发明人： INOUE, Tomohito , TSUDA, Hajime , MOTEGI, Katsumi , EBINA, Takeo , MIZUKAMI, Fujio c/o Tohoku Center
IPC分类号： B32B18/00 , C23C14/06 , C23C16/42 , G02F1/1333 , G09F9/30 , H01L27/32 , H01L51/50 , H05B33/02 , H05B33/10 , H05B33/22
CPC分类号： H01L51/52 , C04B35/597 , C04B41/009 , C04B41/5035 , C04B41/52 , C04B2111/00275 , C04B2111/28 , C04B2235/963 , C23C16/401 , G02F1/133305 , G02F2001/133302 , H01L51/0097 , H01L51/5256 , H01L51/5262 , Y02E10/549 , Y10T428/1055 , Y10T428/1086 , Y10T428/1095 , C04B14/106 , C04B41/4531 , C04B41/0045 , C04B41/483 , C04B41/522 , C04B41/4533
摘要： A clay thin film substrate including a clay thin film having a structure, in which oriented clay particles are laminated; and at least a gas barrier inorganic layer which is laminated on at least one surface of the clay thin film.
摘要翻译：一种粘土薄膜基材，包括具有层压有取向粘土颗粒的结构的粘土薄膜; 以及至少层压在粘土薄膜的至少一个表面上的阻气性无机层。

5. 发明公开

EP1944270A1 METHOD FOR PRODUCING CLAY THIN FILM AND CLAY THIN FILM 审中-公开
标题翻译： VERFAHREN ZUR HERSTELLUNG VONDÜNN电影AUS TON UNDDÜNERFILM AUS TON
公开(公告)号：EP1944270A1
公开(公告)日：2008-07-16
申请号：EP06798101.9
申请日：2006-09-19
申请人： Tomoegawa Co., Ltd. , National Institute of Advanced Industrial Science and Technology
发明人： TSUDA, Hajime , INOUE, Tomohito , MOTEGI, Katsumi , EBINA, Takeo , MIZUKAMI, Fujio
IPC分类号： C01B33/40 , G02F1/1333 , H01L51/50 , H05B33/02
CPC分类号： B28B1/30 , G02F2001/133302 , H01L51/5237 , Y10T428/24413
摘要： A method for producing a clay thin film, which is formed of clay alone or in combination with an additive and has a structure where oriented clay particles are laminated, the method including paste-making in which clay alone or in combination with an additive are dispersed in a dispersion medium formed of water, an organic solvent, or a mixed solvent of water and an organic solvent to prepare clay paste; coating in which a thin film is formed by coating the clay paste on a substrate; planarization in which the thin film is planarized; drying in which water, an organic solvent, or water and an organic solvent are removed from the thin film; and separation in which the thin film is separated from the substrate.
摘要翻译：一种粘土薄膜的制造方法，其由单独的粘土或与添加剂组合形成并且具有层压取向粘土颗粒的结构的方法，所述粘土薄膜的制造方法包括单独或与添加剂组合的粘土分散在由水，有机溶剂或水和有机溶剂的混合溶剂形成的分散介质中制备粘土糊料; 通过将粘土糊涂布在基材上而形成薄膜的涂层; 平面化，薄膜平坦化; 从薄膜中除去水，有机溶剂或水和有机溶剂的干燥; 以及其中薄膜与基底分离的分离。

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