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1. 发明授权

EP1137126B1 ELECTRIC DISCHARGE EXCITATION EXCIMER LASER 有权
标题翻译：通过放电激发的准分子激光
公开(公告)号：EP1137126B1
公开(公告)日：2010-01-13
申请号：EP99973186.2
申请日：1999-11-26
申请人： EBARA CORPORATION , KOMATSU LTD.
发明人： Shinozaki, Hiroyuki , Sekiguchi, Shinichi , Barada, Toshimitsu , Nakazawa, Toshiharu
IPC分类号： H01S3/036 , F16C32/04
CPC分类号： F16C32/047 , H01S3/036 , H01S3/225

2. 发明授权

EP1056950B1 SEALED MAGNETIC BEARINGS FOR CIRCULATION FAN 有权
标题翻译：循环风扇用密封磁性轴承
公开(公告)号：EP1056950B1
公开(公告)日：2003-05-07
申请号：EP99906446.2
申请日：1999-02-18
申请人： Ebara Corporation , Komatsu Ltd
发明人： Sekiguchi, Shinichi , Shinozaki, Hiroyuki , Barada, Toshimitsu , Nakazawa, Toshiharu , Kawamura, Takeshi
IPC分类号： F04D29/04 , F16C39/06
CPC分类号： F04D29/058 , F04D25/06 , F16C32/047 , F16C32/0474 , F16C2300/42 , F16C2360/44
摘要： A circulation fan apparatus including a hermetic vessel (1) containing a corrosive process gas therein, and a circulation fan (2) installed in the hermetic vessel, rotors (2-1, 2-2) of the circulation fan are rotatably supported by bearings, wherein the bearings comprise control-type radial magnetic bearings (4, 5) and at least control-type axial magnetic bearing (6, 7) displacement sensor targets (4-1, 5-1, 6-1 and 7-1) and rotor-side magnetic poles (4-2, 5-2, 6-2, and 7-2) of radial magnetic bearings (4 and 5) and axial magnetic bearings (6 and 7) are fixed to the rotors (2-1 and 2-2) of the circulation fan (2) and are disposed in the hermetic space communicating with the hermetic vessel, and displacement sensors (4-3, 5-3, 6-3, and 7-3) and stator-side magnetic poles (4-4, 5-4, 6-4, and 7-4) opposing the displacement sensor targets and rotor-side magnetic poles are disposed outside of the hermetic vessel with cans (14, 15, 17 and 18) interposed therebetween, whereby even when the circulation fan (2) is rotated at a high speed and under a high load, the process gas is not contaminated, ensuring maintenance-free operation, and furthermore, an installation space can be reduced.
摘要翻译： 1.一种循环风扇装置，其特征在于，具有内部装有腐蚀性处理气体的密闭容器（1）和设置在密闭容器内的循环风扇（2），循环风扇的转子（2-1,2-2）由轴承，其中所述轴承包括控制型径向磁轴承（4,5）和至少控制型轴向磁轴承（6,7）位移传感器目标（4-1,5-1,6-1和7-1）并且径向磁性轴承（4和5）和轴向磁性轴承（6和7）的转子侧磁极（4-2,5-2,6-2和7-2）固定到转子（2- 设置在与密闭容器连通的密闭空间内，并设有位移传感器（4-3,5-3,6-3,7-3）和定子侧传感器与位移传感器靶相对的转子侧磁极（4-4,5-4,6-4,7-4）和转子侧磁极配置在带罐（14,15,17,18）的密闭容器的外侧，插入它们之间，从而即使当ci 循环风扇（2）高速高负荷旋转，工艺气体不受污染，确保免维护运行，并且可以减少安装空间。

3. 发明公开

EP1137126A1 ELECTRIC DISCHARGE EXCITATION EXCIMER LASER 有权
标题翻译： DURCH ELEKTRISCHE ENTLADUNG ANGEREGTER EXCIMERLASER
公开(公告)号：EP1137126A1
公开(公告)日：2001-09-26
申请号：EP99973186.2
申请日：1999-11-26
申请人： EBARA CORPORATION , KOMATSU LTD.
发明人： Shinozaki, Hiroyuki , Sekiguchi, Shinichi , Barada, Toshimitsu , Nakazawa, Toshiharu
IPC分类号： H01S3/036 , F16C32/04
CPC分类号： F16C32/047 , H01S3/036 , H01S3/225
摘要： A long-life electric discharge excitation excimer laser improved in that the laser gas in the laser enclosure hardly degrades, no dust enters the inside of the magnetic bearing and the inside of the motor, and damage to the portions in contact with the laser gas is little. The electric discharge excitation excimer laser is characterized by comprising a housing connected to both ends of a laser enclosure where the laser gas is sealed and a pair of main discharge electrodes are housed, a cross flow fan rotatably supported at both ends by a magnetic bearing housed in the housing and adapted to produce a laser gas flow, a motor housed in the housing and adapted to rotate the cross flow fan, a laser gas passage extending through the gap between the rotor side and the-stator side of the magnetic bearing and the gap between the rotor side and the stator side of the motor along the full length of the housing and communicating with the laser enclosure, a laser gas introduction passage extending from the inside of the laser enclosure and communicating with the laser gas passage at one end of the housing, and a filter disposed in the laser gas introduction passage.
摘要翻译：长寿命放电励磁准分子激光器的改进在于激光外壳中的激光气体几乎不降解，不会有灰尘进入到磁轴承和电机内部，并且与激光气体接触的部分损坏是小。放电激发准分子激光器的特征在于，包括连接到激光器外壳的两端的壳体，其中激光气体被密封并且容纳一对主放电电极，横流风扇由两个端部旋转地支撑，在壳体中并且适于产生激光气流，马达容纳在壳体中并且适于旋转横流风扇，激光气体通道延伸穿过磁轴承的转子侧和定子侧之间的间隙和沿着壳体的整个长度的电机的转子侧和定子侧之间的间隙，与激光外壳连通，激光气体引入通道从激光外壳的内部延伸并与激光气体通道的一端连通壳体和布置在激光气体导入通道中的过滤器。

4. 发明公开

EP1056950A1 SEALED MAGNETIC BEARINGS FOR CIRCULATION FAN 有权
标题翻译： ABGEDICHTES FORUMWALZGEBLÄSE磁轴承
公开(公告)号：EP1056950A1
公开(公告)日：2000-12-06
申请号：EP99906446.2
申请日：1999-02-18
申请人： Ebara Corporation , Komatsu Ltd
发明人： Sekiguchi, Shinichi , Shinozaki, Hiroyuki , Barada, Toshimitsu , Nakazawa, Toshiharu , Kawamura, Takeshi
IPC分类号： F04D29/04 , F16C39/06
CPC分类号： F04D29/058 , F04D25/06 , F16C32/047 , F16C32/0474 , F16C2300/42 , F16C2360/44
摘要： A circulation fan apparatus including a hermetic vessel (1) containing a corrosive process gas therein, and a circulation fan (2) installed in the hermetic vessel, rotors (2-1, 2-2) of the circulation fan are rotatably supported by bearings, wherein the bearings comprise control-type radial magnetic bearings (4, 5) and at least control-type axial magnetic bearing (6, 7) displacement sensor targets (4-1, 5-1, 6-1 and 7-1) and rotor-side magnetic poles (4-2, 5-2, 6-2, and 7-2) of radial magnetic bearings (4 and 5) and axial magnetic bearings (6 and 7) are fixed to the rotors (2-1 and 2-2) of the circulation fan (2) and are disposed in the hermetic space communicating with the hermetic vessel, and displacement sensors (4-3, 5-3, 6-3, and 7-3) and stator-side magnetic poles (4-4, 5-4, 6-4, and 7-4) opposing the displacement sensor targets and rotor-side magnetic poles are disposed outside of the hermetic vessel with cans (14, 15, 17 and 18) interposed therebetween, whereby even when the circulation fan (2) is rotated at a high speed and under a high load, the process gas is not contaminated, ensuring maintenance-free operation, and furthermore, an installation space can be reduced.

5. 发明授权

EP1350997B1 Method for operating a seal device 有权
标题翻译：用于密封装置的操作方法
公开(公告)号：EP1350997B1
公开(公告)日：2014-10-01
申请号：EP03007399.3
申请日：2003-04-02
申请人： EBARA CORPORATION
发明人： Shinozaki, Hiroyuki
IPC分类号： H01L21/67 , F16J15/40
CPC分类号： H01L21/67126 , F16J15/406 , Y10S414/135 , Y10S414/139 , Y10S414/141

6. 发明授权

EP1061557B1 Substrate processing apparatus 有权
标题翻译：基板处理设备
公开(公告)号：EP1061557B1
公开(公告)日：2007-04-25
申请号：EP00112620.0
申请日：2000-06-14
申请人： EBARA CORPORATION
发明人： Shinozaki, Hiroyuki
IPC分类号： H01L21/00 , H01L21/68 , B05C11/08 , C23C16/458
CPC分类号： H01L21/67063 , C23C16/4584

7. 发明授权

EP0852970B1 Vapor feed supply system 失效
标题翻译：系统的蒸汽供应
公开(公告)号：EP0852970B1
公开(公告)日：2006-07-26
申请号：EP98100218.1
申请日：1998-01-08
申请人： EBARA CORPORATION
发明人： Horie, Kuniaki , Suzuki, Hidenao , Nakada, Tsutomu , Murakami, Takeshi , Fukunaga, Yukio , Abe, Masahito , Shinozaki, Hiroyuki , Tsukamoto, Kiwamu , Shibasaki, Mitsunao , Araki, Yuji , Ueyama, Hiroyuki
IPC分类号： B08B9/00 , C23C16/44 , B01D8/00 , F16K51/00
CPC分类号： C23C16/448 , B08B9/00 , C23C16/4407 , Y10S134/902

8. 发明公开

EP1176325A3 Magnetic bearing apparatus 审中-公开
标题翻译： Magnetlager
公开(公告)号：EP1176325A3
公开(公告)日：2004-05-12
申请号：EP01118169.0
申请日：2001-07-26
申请人： EBARA CORPORATION
发明人： Shinozaki, Hiroyuki
IPC分类号： F16C39/06
CPC分类号： F16C32/0457 , F16C2360/45
摘要： There is provided a magnetic bearing apparatus having no necessity of providing a magnetic flux sensor in the vicinity of a supporting electromagnet and no necessity of increasing the number of signal lines in a cable and capable of achieving an advantage similar to a conventional magnet flux feedback type power amplifier in a controller. The magnetic bearing apparatus for supporting a supported member by a magnetic force without contact comprises a current sensor (11) for detecting a control current output from a power amplifier (7) and a displacement sensor (10) for detecting a displacement of the supported member (1). A control current detection signal Si of the current sensor (11) and a displacement detection signal Sg of the displacement sensor (10) are supplied to an estimator (20) that estimates a magnetic flux or magnetic flux density generated between a surface of the electromagnet (4) and an electromagnetic target (3) on the supported member (1). An estimated value is fed back from the estimator (20) to the power amplifier (7) that supplies a control current i to an electromagnetic coil (6).
摘要翻译：提供了一种磁性轴承装置，其不需要在支撑电磁体附近提供磁通量传感器，并且不需要增加电缆中的信号线的数量，并且能够实现类似于常规磁通量反馈型的优点功率放大器在控制器中。用于通过磁力而不接触地支撑被支撑构件的磁轴承装置包括用于检测从功率放大器（7）输出的控制电流的电流传感器（11）和用于检测被支撑构件的位移的位移传感器（10）（1）。电流传感器（11）的控制电流检测信号Si和位移传感器（10）的位移检测信号Sg被提供给估计器（20），估计器（20）估计在电磁体表面之间产生的磁通量或磁通密度（4）和电磁目标（3）。估计值从估计器（20）反馈到向电磁线圈（6）提供控制电流i的功率放大器（7）。

9. 发明公开

EP1191243A3 Magnetic bearing apparatus of quick response 审中-公开
标题翻译：具有短的响应时间的磁性轴承装置
公开(公告)号：EP1191243A3
公开(公告)日：2004-01-07
申请号：EP01118168.2
申请日：2001-07-26
申请人： EBARA CORPORATION
发明人： Shinozaki, Hiroyuki
IPC分类号： F16C32/04 , F16C39/06
CPC分类号： F16C32/0457 , F16C2360/45
摘要： A magnetic bearing apparatus having a high speed-of-response and of a low cost is provided. The apparatus comprises a power amplifier for supplying a control current to a coil of an electromagnet of a control-type magnetic bearing and a non-linear component positioned in the rear of a stage where a control input signal S1 of the power amplifier and a current feedback signal S2 is added.

10. 发明公开

EP1333468A2 Stage device and angle detecting device 有权
标题翻译： Trägerplattevorrichtung
公开(公告)号：EP1333468A2
公开(公告)日：2003-08-06
申请号：EP03001225.6
申请日：2003-01-20
申请人： EBARA CORPORATION
发明人： Shinozaki, Hiroyuki , Sobukawa, Hirosi , Yoshikawa, Shoji
IPC分类号： H01L21/00
CPC分类号： H01L21/682 , H01L21/68 , H01L21/681
摘要： The present invention provides a stage device applicable to a semiconductor manufacturing apparatus. A stage device 10 comprises a Y-axis stage 20 and an X-axis stage 40, said Y-axis stage 20 including a fixed component 21 and a movable component 26 movable along the Y-axis, said X-axis stage 40 including a fixed component 41 and a movable component 43 movable along the X-axis, wherein the fixed component 41 of the X-axis stage 40 is disposed in the movable component 26 side of the Y-axis stage 20, the Y-axis is designed as a scanning axis, while the X-axis is designed as a stepping axis, and a non-contact sealing device is arranged between the fixed component 21 and the movable component 26 of the Y-axis stage 20.
摘要翻译：本发明提供一种适用于半导体制造装置的平台装置。平台装置10包括Y轴平台20和X轴平台40，所述Y轴平台20包括可沿着Y轴移动的固定部件21和可移动部件26，所述X轴平台40包括固定部件41和可沿着X轴移动的可动部件43，其中，X轴平台40的固定部件41设置在Y轴台20的可动部件26侧，Y轴被设计为扫描轴，而X轴被设计为步进轴，并且非接触式密封装置设置在Y轴平台20的固定部件21和可动部件26之间。

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