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    • 3. 发明公开
      EP3952113A1 CONTROL UNIT, RADIO FREQUENCY POWER GENERATOR, AND METHOD FOR GENERATING SYNCHRONIZED RADIO FREQUENCY OUTPUT SIGNALS 审中-实审
    • CONTROL UNIT, RADIO FREQUENCY POWER GENERATOR, AND METHOD FOR GENERATING SYNCHRONIZED RADIO FREQUENCY OUTPUT SIGNALS
    • EP3952113A1
    • 2022-02-09
    • EP20190074.3
    • 2020-08-07
    • Comet AG
    • vor dem Brocke, Manuel , Schlierf, Roland , Grede, André , Gruner, Daniel , Labanc, Anton
    • H03L7/099 , H03L7/18 , H03L7/10
    • The invention describes a control unit (2, 21) for generating a plurality of synchronized radio frequency (RF) output signals (RF out,i ) each having a respective output frequency (f i ), phase (Φ i ), and amplitude (A i ), comprising:
      a signal comparator (3) configured to compare a reference signal (4) having a reference frequency (f ref ) and a reference phase (Φ ref ) with a feedback signal (5) having a feedback frequency (f PLL ) and a feedback phase (Φ PLL ), and configured to generate an error signal (6, 6') representative of a difference between the reference signal (4) and the feedback signal (5); and
      a data processing unit (7) receiving as an input signal the error signal (6, 6') generated by the signal comparator (3), and outputting a plurality of waveform tuning signals (FTW PLL , FTW i ) as a function of the error signal (6, 6');
      wherein a plurality of waveform generators (DDS PLL , DDS i ) each receiving at least one of the plurality of waveform tuning signals (FTW PLL , FTW i ) output by the data processing unit (7), wherein each waveform generator (DDS PLL , DDS i ) generates a time-dependent amplitude signal (A PLL (t), A i (t)) as a function of the received respective waveform tuning signal (FTW PLL , FTW i ),
      wherein one predetermined amplitude signal (A PLL (t)) of the generated plurality of amplitude signals (A PLL (t), A i (t)) represents the feedback signal (5) input to the signal comparator (3), and the other amplitude signals (A i (t)) represent the respective radio frequency (RF) output signals (RF out,i ) to be generated, and
      wherein the data processing unit (7) is configured to adjust both the waveform tuning signal (FTW PLL ) corresponding to the one predetermined amplitude signal (A PLL (t)) representing the feedback signal (5) such as to minimize the error signal (6, 6'), and the other waveform tuning signals (FTW i ) corresponding to the other amplitude signals (A i (t)) representing the radio frequency (RF) output signals (RF out,i ) based on the adjusted waveform tuning signal (FTW PLL ) of the predetermined amplitude signal (A PLL (t)) representing the feedback signal (5).
      The invention further describes a radio frequency (RF) power generator (1, 20, 30), an arrangement (35, 40, 45, 50, 55) of at least two such radio frequency (RF) power generators (1, 20, 30), and a method each for generating a plurality of synchronized radio frequency (RF) output signals (RF out,i ).
    • 基本信息 添加关注 加入工作空间 PDF全文 PDF下载 全文下载 相似专利 双屏查看 权利要求书 说明书全文 Global Dossier Espacenet 法律信息 同族专利 专利引用
    • 6. 发明公开
      EP3907753A1 RF POWER GENERATOR WITH ANALOGUE AND DIGITAL DETECTORS AND METHOD OF OPERATING SUCH A POWER GEBERATOR 有权
    • RF POWER GENERATOR WITH ANALOGUE AND DIGITAL DETECTORS AND METHOD OF OPERATING SUCH A POWER GEBERATOR
    • EP3907753A1
    • 2021-11-10
    • EP21182480.0
    • 2019-09-10
    • Comet AG
    • Labanc, Anton , Gruner, Daniel , Grede, André
    • H01J37/32 , H03F3/189
    • In the field of RF generator design, some output power faults may occur so quickly that a digital control system is unable to effectively address them. Accordingly, there is provided a generator, comprising: a power amplifier, at least one sampler configured to sample a radio frequency, RF, signal at an output of the power amplifier, an RF output configured to output an RF signal from the generator, a signal generator configured to generate an RF input signal and to provide the RF input signal to the power amplifier, a controller comprising a digital control portion and an analogue control portion, wherein one or both of the digital control portion and the analogue control portion are configured to control at least the power amplifier and/or the signal generator, an analogue feedback path between the at least one sampler and the controller enabling an analogue signal representation of a signal from the at least one sampler to be provided to the controller, and a digital feedback path between the at least one sampler and the controller enabling a digital signal representation of the signal from the at least one sampler to be provided to the controller.
      The controller is configured to adjust the RF signal at the RF output from a first state into a second state based on the analogue signal representation and/or the digital signal representation.
    • 基本信息 添加关注 加入工作空间 PDF全文 PDF下载 全文下载 相似专利 双屏查看 权利要求书 说明书全文 Global Dossier Espacenet 法律信息 同族专利 专利引用
    • 9. 发明公开
      EP3276827A1 BROADBAND MATCHING NETWORK 有权
    • BROADBAND MATCHING NETWORK
    • 宽带匹配网络
    • EP3276827A1
    • 2018-01-31
    • EP16181040.3
    • 2016-07-25
    • Comet AG
    • Labanc, Anton , Gruner, Daniel , Reiff, Marcus
    • H03H7/38
    • H03F1/565 , H03F1/42 , H03F3/19 , H03F3/193 , H03F3/21 , H03F3/265 , H03F2200/36 , H03F2200/387 , H03F2200/451 , H03F2200/541 , H03H7/38
    • The invention describes broadband matching network (100) for coupling to an output of amplifying device (200) for amplifiers with a nominal operating frequency between 1 MHz and 100 MHz, more preferably between 5 MHz and 85 MHz and an output power of at least 100 W, more preferably at least 200 W and most preferably at least 250 W, and a wherein the broadband matching network (100) comprises a planar transformer (110) with a primary winding (112) arranged on a primary side of the broadband matching network (100) and a secondary winding (114) arranged on a secondary side of the broadband matching network (100), wherein the primary winding (112) is arranged to be electrically connected to the output of the amplifying device (200), wherein the broadband matching network (100) is characterized by a center frequency and a bandwidth with a frequency range of at least +/-3%, preferably at least +/-5%, more preferably at least +/-7% around the center frequency, wherein the center frequency corresponds to the nominal operating frequency, and wherein the broadband matching network (100) is arranged such that a series resonance frequency of the broadband matching network (100) corresponds to the center frequency, and a first parallel resonance frequency and a second parallel resonance frequency of the broadband matching circuit (100) are arranged around the series resonance frequency such that a frequency dependence of a load impedance provided by the broadband matching network (100) for the amplifying device (200) is reduced. The invention further describes an amplifier arrangement comprising the broadband matching network (100), an electrical RF generator comprising the RF amplifier arrangement and a plasma processing system comprising the electrical RF generator. The invention finally describes a method of implementing a broadband matching network for an amplifier arrangement.
    • 本发明描述了宽带匹配网络（100），用于耦合到放大器的放大设备（200）的输出，该放大设备具有在1MHz和100MHz之间，更优选地在5MHz和85MHz之间的标称工作频率以及至少100MHz的输出功率 W，更优选地至少200W并且最优选地至少250W，并且其中宽带匹配网络（100）包括平面变压器（110），该平面变压器具有布置在宽带匹配网络的初级侧上的初级绕组 （100）和布置在所述宽带匹配网络（100）的次级侧上的次级绕组（114），其中所述初级绕组（112）被布置为电连接到所述放大装置（200）的输出，其中所述 宽带匹配网络（100）的特征在于中心频率和带宽，其频率范围在中心频率附近至少+/- 3％，优选至少+/- 5％，更优选至少+/- 7％ ，其中中心频率cor 并且其中宽带匹配网络（100）被布置为使得宽带匹配网络（100）的串联谐振频率对应于中心频率，并且第一并联谐振频率和第二并联谐振频率 所述宽带匹配电路（100）的所述放大器被布置在所述串联谐振频率周围，使得由所述宽带匹配网络（100）为所述放大装置（200）提供的负载阻抗的频率依赖性被降低。 本发明还描述了包括宽带匹配网络（100）的放大器装置，包括RF放大器装置的电气RF发生器以及包括电气RF发生器的等离子体处理系统。 本发明最后描述了一种为放大器装置实现宽带匹配网络的方法。
    • 基本信息 添加关注 加入工作空间 PDF全文 PDF下载 全文下载 相似专利 双屏查看 权利要求书 说明书全文 Global Dossier Espacenet 法律信息 同族专利 专利引用
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