会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明公开
    • ACID MACROMONOMERS AND THEIR METHOD OF PREPARATION
    • HECTELLUNG DEREN的SAUR MAKROMONOMERE
    • EP1392736A2
    • 2004-03-03
    • EP02722115.9
    • 2002-02-21
    • Ciba Specialty Chemicals Holding Inc.
    • MURER, Peter
    • C08F2/38C08F20/04C08F2/50C08F293/00
    • C08F8/44B33Y70/00C07C381/12C07F9/5428C08F265/02
    • The invention relates to a composition comprising: a) an acid monomer or oligomer of acrylic acid or of an acid derivative of acrylic acid or mixtures thereof; or a mixture of an ethylenically unsaturated monomer or oligomer and an acid monomer or oligomer of acrylic acid or of an acid derivative of acrylic acid; b) at least one radical initiator which forms a radical upon heating or upon irradiation with (UV) light in the range from 305 nm to 450 nm; and c) a compound of the formulae (Ia), (Ib) or (Ic) wherein Y represents a group that activates nucleophilic addition reactions at the adjacent double bond; X represents halogen or the anion of an aliphatic or aromatic monocarboxylic or dicarboxylic acid of 1-12 carbon atoms, of a monovalent or divalent oxo acid or of a complex acid; n represents 0 or 1; R1, R2, R3 independently of one another represent hydrogen, C1-C18alkyl, C3-C18alkyl interrupted by at least one nitrogen or oxygen atom, C3-C18 alkenyl, C3-C18alkynyl, C7-C9phenylalkyl, C3-C12cycloalkyl or C3-C12cycloalkyl containing at least one nitrogen or oxygen atom; or C1-C18alkyl, C3- C18alkyl interrupted by at least one nitrogen or oxygen atom, C3-C18 alkenyl, C3-C18alkynyl, C7-C9phenylalkyl, C3-C12cycloalkyl or C3-C12cycloalkyl containing at least one nitrogen or oxygen atom, which are substituted with at least one substituent selected from the group consisting of NO2, halogen, amino, hydroxy, cyano, carboxy, C1-C4alkoxy, C1-C4 alkylthio, C1-C4alkylamino, di(C1-C4alkyl)amino and-O-C(=0)-C1C18alkyl; or phenyl or naphthyl or phenyl and naphtyl substituted with at least one substituent selected from the group consisting of C1-C4alkyl, C1-C4alkoxy, C1-C4alkylthio, halogen, cyano, hydroxy, carboxy, C1-C4alkylamino and di)C1-C4alkyl)amino; or R1 and R2 together with the linking N, P or S-heteroatoms form a C3-C12 heterocycloalkyl radical; or R1 and R2 together form the groups: (Id); or (Ie); or R1, R2 and R3 together form the groups (If) or (Ig). The invention relates also to acid macromomers and to their method of preparation by radically initiated polymerisation.
    • 本发明涉及一种组合物,其包含:a)酸性单体或丙烯酸或丙烯酸的酸衍生物或其混合物的低聚物; 或烯属不饱和单体或低聚物的混合物和丙烯酸或丙烯酸的酸衍生物的酸单体或低聚物; b)至少一种自由基引发剂,其在加热或在305nm至450nm范围内的(UV)光照射时形成基团; 和c)式(I),(Ib)或(Ic)的化合物,其中Y表示在相邻双键处活化亲核加成反应的基团; X表示一价或二价含氧酸或络合酸的卤素或1-12个碳原子的脂族或芳族单羧酸或二羧酸的阴离子; n表示0或1; R 1,R 2,R 3和R 3彼此独立地表示氢,C 1 -C 1 - C 1 -C 18烷基,C 3 -C 18烷基,被至少一个氮或氧原子间隔,C 3 -C 3 C 18链烯基,C 3 -C 18炔基,C 7 -C 9苯基烷基,C 1 -C 6烷基, 含有至少一个氮原子或氧原子的C 3 -C 12环烷基和C 3 -C 12 -C 12环烷基, 其被至少一个选自下列的取代基取代:NO 2,卤素,氨基,羟基,氰基,羧基,C 1 -C 4烷基, 烷氧基,C 1 -C 4烷硫基,C 1 -C 4烷基氨基,二(C
    • 9. 发明公开
    • SULFONATE DERIVATIVES AND THE USE THEROF AS LATENT ACIDS
    • SUVFONAT-DERIVATE UND IHRE VERWENDUNG ALS LATENTESÄURE
    • EP1472576A2
    • 2004-11-03
    • EP03704479.9
    • 2003-01-28
    • Ciba Specialty Chemicals Holding Inc.
    • MATSUMOTO, Akira,YAMATO, HitoshiASAKURA, Toshikage,4-16-46, MinooMURER, Peter
    • G03F7/004C07D291/00C07C301/00
    • G03F7/0037B33Y70/00C07C323/66C07C381/00G03F7/001G03F7/0045G03F7/038G03F7/0382G03F7/0392G03F7/0397G03F7/0758Y10S430/114
    • Chemically amplified photoresist compositions comprising, (a) a compound which cures upon the action of an acid or a compound whose solubility is increased upon the action of an acid; and (b) a compound of the formula (Ia), (Ib), (IIa), (IIb), (IIIa), (IIIb), (Iva), (Ivb), (Va), (Vb) or (VIa), wherein n is 1 or 2; m is 0 or 1; X0 is -[CH2]h-X or -CH=CH2; h is 2, 3, 4, 5 or 6; R1 when n is 1, is for example optionally substituted phenyl, naphthyl, anthracyl, phenanthryl, or heteroaryl; R1, when n is 2, is for example optionally substituted phenylene or naphthylene; R2 for example has one of the meanings of R1; X is for example -OR20, -NR21R22, -SR23; X' is -X1-A3-X2-; X1 and X2 are for example -O-, -S- or a direct bond; A3 is e.g. phenylene; R3 has for example one of the meanings given for R1; R4 has for example one of the meaning given for R2; R5 and R6 e.g. are hydrogen; G i.a. is -S- or -O-; R7 when n is 1, e.g. is phenyl, optionally substituted, when n is 2, is for ex­ample phenylene; R8 and R9 e.g. are C1-C18alkyl; R10 has one of the meanings given for R7; R11 i.a. is C1-C18alkyl; R12, R13, R14, R15 R16, R17 and R18 for example are hydrogen or C1-­C18alkyl; R20, R21, R22 and R23 i.a. are phenyl or C1-C18alkyl; give high resolution with good resist profile.
    • 化学扩增的光致抗蚀剂组合物,其包含(a)在酸的作用下固化的化合物或其在酸的作用下溶解度增加的化合物; 和(b)式(Ia),(Ib),(IIa),(IIb),(IIIa),(IIIb),(Iva),(Ivb),(Va),(Vb) VIa),其中n为1或2; m为0或1; X 是 - [CH 2] n -X或-CH-CH 2; h为2,3,4,5或6; 当n为1时,R 1为例如任选取代的苯基,萘基,蒽基,菲基或杂芳基; 当n为2时,R 1为例如任选取代的亚苯基或亚萘基; R 2例如具有R 1的含义之一; X是例如-OR 20,-NR 21 R 22,-SR 23; X'是-X 1 -X 3 -X 2 -X 2。 X 1和X 2是例如-O - , - S-或直接键; A 3是例如。 苯; R 3具有例如R 1中给出的含义之一; R 4具有例如R 2 2给出的含义之一; R 5和R 6,例如, 是氢; a. a. 是-S-或-O-; 当n为1时,R 7为例如。 当n为2时任选被取代的苯基是例如亚苯基; R 8和R 9,例如, 是C 1 -C 18烷基; R 10具有R 7给出的含义之一; R 11 i.a。 是C 1 -C 18烷基; R 12,R 13,R 14,R 15,R 16,R 15, 例如,R 17和R 18是氢或C 1 -C 18烷基; R 20,R 21,R 22和R 23是苯基或C 1〜 SUB> -C 18 烷基; 给出高分辨率和良好的光刻胶