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1. 发明公开

EP1668313A4 GAS DISCHARGE MOPA LASER SPECTRAL ANALYSIS MODULE 有权转让
标题翻译： GASENTLADUNGS-MOPA-LASER-SPEKTRALANALYSE-MODUL
公开(公告)号：EP1668313A4
公开(公告)日：2010-11-24
申请号：EP04784260
申请日：2004-09-15
申请人： CYMER INC
发明人： RAO RAJASEKHAR M , MELCHIOR JOHN T , GLATZEL HOGER K
IPC分类号： G01B9/02 , G01J3/02 , G01J3/26 , G01J9/02 , H01S3/13
CPC分类号： G01J3/26 , G01J3/02 , G01J3/027 , G01J9/0246
摘要： A wavemeter and method for measuring bandwidth for a high repetition rate gas discharge laser having an output laser bean comprising a pulsed output of greater than or equal to 15 mJ per pulse, sub-nanometer bandwidth tuning range pulses having a femptometer bandwidth precision and tens of femptometers bandwidth accuracy range, for measuring bandwidth on a pulse to pulse basis at pulse repetition rates of 4000Hz and above, is disclosed which may comprise a focusing lens having a focal length; an optical interferometer creating an interference fringe pattern; an optical detection means positioned at the focal length from the focusing lens; and a bandwidth calculator calculating bandwidth from the position of interference fringes in the interference fringe pattern incident on the optical detection means, defining a DID and a DOD, the respective distances between a pair of first fringe borders and between a pair of second fringe borders in the interference pattern on an axis of the interference pattern, and according to the formula Deltalambda= lambda0 [DOD DID2] / [8f -D0 ] where lambda0 is an assumed constant wavelength and D0 = (DOD - DID)2, and f is the focal length.
摘要翻译：一种用于测量具有输出激光束的高重复率气体放电激光器的带宽的波长计和方法，该输出激光束包括脉冲输出大于或等于15mJ /脉冲，亚纳米带宽调谐范围脉冲具有飞行器带宽精度和数十公开了用于以4000Hz及以上的脉冲重复频率测量基于脉冲到脉冲的带宽的飞行器带宽精度范围，其可以包括具有焦距的聚焦透镜; 产生干涉条纹图案的光学干涉仪; 位于聚焦透镜的焦距处的光学检测装置; 以及带宽计算器，从入射到光学检测装置的干涉条纹图案中的干涉条纹的位置计算带宽，限定DID和DOD，一对第一边缘边界之间的相应距离和一对第二边缘之间的相应距离干涉图案的轴上的干涉图案，并且根据公式Deltalambda =λ0[DOD <2> DID2] / <> [8f2-D2]>其中λ0是假定的恒定波长和D0 =（DOD-DID）2，f是焦距。

2. 发明公开

EP1668312A4 GAS DISCHARGE MOPA LASER SPECTRAL ANALYSIS MODULE 有权转让
标题翻译： GASENTLADUNGS-MOPA-LASER-SPEKTRALANALYSE-MODUL
公开(公告)号：EP1668312A4
公开(公告)日：2010-11-24
申请号：EP04784259
申请日：2004-09-15
申请人： CYMER INC
发明人： RAO RAJASEKHAR M , MELCHIOR JOHN T , GLATZEL HOGER K
IPC分类号： G01B9/02 , G01J3/02 , G01J3/26 , G01J9/02 , H01S3/13
CPC分类号： G01J3/26 , G01J3/02 , G01J3/027 , G01J9/0246

3. 发明公开

EP1994549A4 ACTIVE SPECTRAL CONTROL OF DUV LIGHT SOURCE 有权转让
标题翻译： AKTIVE SPEKTRALSTEUERUNG EINER DUV-LICHTQUELLE
公开(公告)号：EP1994549A4
公开(公告)日：2009-08-05
申请号：EP07716893
申请日：2007-01-22
申请人： CYMER INC
发明人： DUNSTAN WAYNE J , JACQUES ROBERT N , RAO RAJASEKHAR M , TRINTCHOUK FEDOR B
IPC分类号： H01L21/00 , G03F7/20
CPC分类号： H01S3/13 , G03F7/70575 , H01S3/134 , H01S3/136
摘要： According to aspects of an embodiment of the disclosed subject matter, a line narrowed high average power high pulse repetition laser micro-photolithography light source bandwidth control method and apparatus are disclosed which may comprise a bandwidth metrology module measuring the bandwidth of a laser output light pulse beam pulse produced by the light source and providing a bandwidth measurement; a bandwidth error signal generator receiving the bandwidth measurement and a bandwidth setpoint and providing a bandwidth error signal; an active bandwidth controller providing a fine bandwidth correction actuator signal and a coarse bandwidth correction actuator signal responsive to the bandwidth error. The fine bandwidth correction actuator and the coarse bandwidth correction actuator each may induce a respective modification of the light source behavior that reduces bandwidth error. The coarse and fine bandwidth correction actuators each may comprise a plurality of bandwidth correction actuators.
摘要翻译：根据所公开主题的实施例的多个方面，公开了一种线窄化高平均功率高脉冲重复激光微光刻光源带宽控制方法和装置，其可以包括带宽度量模块，其测量激光输出光脉冲由光源产生并提供带宽测量的光束脉冲; 带宽误差信号发生器，接收带宽测量值和带宽设定值并提供带宽误差信号; 有源带宽控制器，响应带宽误差提供精细带宽校正致动器信号和粗带宽校正致动器信号。细带宽校正致动器和粗带宽校正致动器各自可以引起光源行为的相应修改，这减少了带宽误差。粗和细带宽校正致动器均可以包括多个带宽校正致动器。

4. 发明公开

EP1741168A4 VERY HIGH REPETITION RATE NARROW BAND GAS DISCHARGE LASER SYSTEM 有权
标题翻译：具有非常高的重复率窄带气体放电激光系统
公开(公告)号：EP1741168A4
公开(公告)日：2008-05-28
申请号：EP05724578
申请日：2005-03-03
申请人： CYMER INC
发明人： STEIGER THOMAS D , HOLTAWAY EDWARD P , MOOSMAN BRYAN G , RAO RAJASEKHAR M
IPC分类号： H01S3/225 , H01S3/00 , H01S3/038 , H01S3/097 , H01S3/104 , H01S3/13 , H01S3/22 , H01S3/23
CPC分类号： H01S3/038 , H01S3/0057 , H01S3/07 , H01S3/097 , H01S3/09702 , H01S3/104 , H01S3/1305 , H01S3/2333
摘要： A method and apparatus for producing a very high repetition rate gas discharge laser system in a MOPA configuration is disclosed which may comprise a master oscillator gas discharge layer system producing a beam of oscillator laser output light pulses at a very light pulse repetition rate; at least two power amplification gas discharge laser systems receiving laser output light pulses from (he master oscillator gas d ischarge laser system and each of the at least two power amplification gas discharge laser systems amplifying some of the received laser output light pulses at a pulse repetition that is a fraction of the very high pulse repetition rate equal to one over the number of the at least two power amplification gas discharge laser systems to form an amplified output laser light pulse beam at the very high pulse repetition rate, which may be positioned in series with respect to the oscillator laser output light pulse beam. The apparatus and method may further comprise a beam delivery unit connected to the laser light output of the power amplification laser system The apparatus and method may be a very high repetition rate gas discharge laser system in a MOPO configuration.

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