
基本信息:
- 专利标题: GAS DISCHARGE MOPA LASER SPECTRAL ANALYSIS MODULE
- 专利标题(中):GASENTLADUNGS-MOPA-LASER-SPEKTRALANALYSE-MODUL
- 申请号:EP04784260 申请日:2004-09-15
- 公开(公告)号:EP1668313A4 公开(公告)日:2010-11-24
- 发明人: RAO RAJASEKHAR M , MELCHIOR JOHN T , GLATZEL HOGER K
- 申请人: CYMER INC
- 专利权人: CYMER INC
- 当前专利权人: CYMER, LLC
- 当前专利权人地址: CYMER, LLC
- 优先权: US67617503 2003-09-30; US67690703 2003-09-30; US67622403 2003-09-30
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01J3/02 ; G01J3/26 ; G01J9/02 ; H01S3/13
摘要:
A wavemeter and method for measuring bandwidth for a high repetition rate gas discharge laser having an output laser bean comprising a pulsed output of greater than or equal to 15 mJ per pulse, sub-nanometer bandwidth tuning range pulses having a femptometer bandwidth precision and tens of femptometers bandwidth accuracy range, for measuring bandwidth on a pulse to pulse basis at pulse repetition rates of 4000Hz and above, is disclosed which may comprise a focusing lens having a focal length; an optical interferometer creating an interference fringe pattern; an optical detection means positioned at the focal length from the focusing lens; and a bandwidth calculator calculating bandwidth from the position of interference fringes in the interference fringe pattern incident on the optical detection means, defining a DID and a DOD, the respective distances between a pair of first fringe borders and between a pair of second fringe borders in the interference pattern on an axis of the interference pattern, and according to the formula Deltalambda= lambda0 [DOD DID2] / [8f -D0 ] where lambda0 is an assumed constant wavelength and D0 = (DOD - DID)2, and f is the focal length.
摘要(中):
一种用于测量具有输出激光束的高重复率气体放电激光器的带宽的波长计和方法,该输出激光束包括脉冲输出大于或等于15mJ /脉冲,亚纳米带宽调谐范围脉冲具有飞行器带宽精度和数十 公开了用于以4000Hz及以上的脉冲重复频率测量基于脉冲到脉冲的带宽的飞行器带宽精度范围,其可以包括具有焦距的聚焦透镜; 产生干涉条纹图案的光学干涉仪; 位于聚焦透镜的焦距处的光学检测装置; 以及带宽计算器,从入射到光学检测装置的干涉条纹图案中的干涉条纹的位置计算带宽,限定DID和DOD,一对第一边缘边界之间的相应距离和一对第二边缘之间的相应距离 干涉图案的轴上的干涉图案,并且根据公式Deltalambda =λ0[DOD <2> DID2] / <> [8f2-D2]>其中λ0是假定的恒定波长 和D0 =(DOD-DID)2,f是焦距。
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01B | 长度、厚度或类似线性尺寸的计量;角度的计量;面积的计量;不规则的表面或轮廓的计量 |
------G01B9/00 | 组中所列的及以采用光学测量方法为其特征的仪器 |
--------G01B9/02 | .干涉仪 |