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1. 发明公开

EP3320125A1 CARRIER FOR SUPPORTING AT LEAST ONE SUBSTRATE DURING A SPUTTER DEPOSITION PROCESS, APPARATUS FOR SPUTTER DEPOSITION ON AT LEAST ONE SUBSTRATE, AND METHOD FOR SPUTTER DEPOSITION ON AT LEAST ONE SUBSTRATE 审中-公开
标题翻译：用于在至少一个基板上支撑至少一个基板的载体，用于至少一个基板上的溅射沉积的设备以及用于在至少一个基板上溅射沉积的方法
公开(公告)号：EP3320125A1
公开(公告)日：2018-05-16
申请号：EP15739534.4
申请日：2015-07-06
申请人： Applied Materials, Inc.
发明人： KELLER, Stefan , BRÜNING, Andre , SCHÜßLER, Uwe , ZILBAUER, Thomas Werner , BANGERT, Stefan
IPC分类号： C23C14/50 , C23C14/56 , H01J37/32 , C23C14/34
CPC分类号： C23C14/50 , C23C14/34 , C23C14/562 , C23C14/564 , H01J37/32715 , H01J37/34 , H01M10/052 , H01M10/0562
摘要： A carrier for supporting at least one substrate during a sputter deposition process is provided. The carrier includes a carrier body and an insulating portion provided at the carrier body. The insulating portion provides a surface of an electrically insulating material, wherein the surface is configured to face one or more sputter deposition sources during the sputter deposition process.

2. 发明公开

EP3387162A1 SYSTEM CONFIGURED FOR SPUTTER DEPOSITION ON A SUBSTRATE, SHIELDING DEVICE FOR A SPUTTER DEPOSITION CHAMBER, AND METHOD FOR PROVIDING AN ELECTRICAL SHIELDING IN A SPUTTER DEPOSITION CHAMBER 审中-公开
公开(公告)号：EP3387162A1
公开(公告)日：2018-10-17
申请号：EP15910151.8
申请日：2015-12-09
申请人： Applied Materials, Inc.
发明人： ZILBAUER, Thomas Werner , HENKEL, Uwe , THIEL, Johannes , EL ZAAR, Kamal , KELLER, Stefan
IPC分类号： C23C14/34 , C23C14/54
CPC分类号： H01J37/3441 , C23C14/3471 , H01J37/32477 , H01J37/32605 , H01J37/32651
摘要： The present disclosure provides a system configured for sputter deposition on a substrate. The system includes a sputter deposition chamber having a processing zone, one or more sputter deposition sources arranged at a first side of the processing zone, and a shielding device arranged at a second side of the processing zone, wherein the shielding device includes a frame assembly mounted to the sputter deposition chamber and one or more conductive sheets detachably mounted on the frame assembly, wherein the one or more conductive sheets provide a surface arranged along the processing zone.

3. 发明授权

EP2831708B1 TRANSPARENT BODY FOR USE IN A TOUCH PANEL AND ITS MANUFACTURING METHOD AND APPARATUS 有权
标题翻译：透明体用于触摸面板及其制造方法和设备
公开(公告)号：EP2831708B1
公开(公告)日：2017-10-18
申请号：EP12711408.0
申请日：2012-03-30
申请人： Applied Materials, Inc.
发明人： GRILLMAYER, Jürgen , ZILBAUER, Thomas Werner
IPC分类号： G06F3/041 , H01J37/34
CPC分类号： G02B1/116 , C23C14/35 , C23C14/352 , G02B1/105 , G02B1/14 , G06F3/041 , G06F2203/04103 , H01J37/3405 , H01J37/3414 , H01J37/3429 , H01J2237/332

4. 发明授权

EP2831707B1 TRANSPARENT BODY FOR USE IN A TOUCH SCREEN PANEL MANUFACTURING METHOD AND SYSTEM 有权
标题翻译：用于触摸屏面板制造方法和系统的透明体
公开(公告)号：EP2831707B1
公开(公告)日：2018-03-14
申请号：EP12711407.2
申请日：2012-03-30
申请人： Applied Materials, Inc.
发明人： ZILBAUER, Thomas Werner , GRILLMAYER, Jürgen
IPC分类号： G06F3/041
CPC分类号： H05K3/0091 , C23C14/35 , G06F3/041 , G06F2203/04103 , H01J37/3405 , H01J37/3426 , H05K1/0274 , H05K1/0306 , H05K1/0313 , H05K1/0393 , H05K2201/0108 , H05K2201/2054
摘要： A process for manufacturing a transparent body for use in a touch screen panel is provided. The process includes: depositing a first transparent layer stack over a transparent substrate, wherein said first transparent layer stack includes at least a first dielectric film with a first refractive index, and a second dielectric film with a second refractive index different from the second the first refractive index; providing a structured transparent conductive film in a manner such that the first transparent layer stack and the transparent conductive film are disposed over the substrate in this order, and wherein the structured transparent conductive film has a sheet resistance of 100 Ohm/square or below; and providing a transparent adhesive onto the structured transparent conductive film configured for attaching the layer stack to the touch screen panel.

5. 发明公开

EP2831708A1 TRANSPARENT BODY FOR USE IN A TOUCH PANEL AND ITS MANUFACTURING METHOD AND APPARATUS 有权
标题翻译：透明体FOR USE IN触摸屏和形成方法和设备
公开(公告)号：EP2831708A1
公开(公告)日：2015-02-04
申请号：EP12711408.0
申请日：2012-03-30
申请人： Applied Materials, Inc.
发明人： GRILLMAYER, Jürgen , ZILBAUER, Thomas Werner
IPC分类号： G06F3/041 , H01J37/34
CPC分类号： G02B1/116 , C23C14/35 , C23C14/352 , G02B1/105 , G02B1/14 , G06F3/041 , G06F2203/04103 , H01J37/3405 , H01J37/3414 , H01J37/3429 , H01J2237/332
摘要： A process for manufacturing a transparent body for use in a touch screen panel is provided. The process includes: depositing a first transparent layer stack (12) over a transparent substrate (14), wherein said first transparent layer stack (12) includes at least a first dielectric film (16) with a first refractive index, and a second dielectric film (18) with a second refractive index different from the first refractive index, providing a structured transparent conductive film (22) in a manner such that the first transparent layer stack (12) and the transparent conductive film (22) are disposed over the substrate (14) in this order, and wherein the structured transparent conductive film has a sheet resistance of 100 Ohm/square or below, and depositing a second transparent layer stack over the transparent conductive film, wherein said second transparent layer stack includes at least a third dielectric film with a third refractive index, and a fourth dielectric film or a transparent adhesive with a fourth refractive index, wherein the first transparent layer stack, the structured transparent conductive film and the second transparent layer stack are provided in this order.
摘要翻译：提供一种用于制造透明体用于在触摸屏面板的使用过程。该方法包括：沉积第一透明层堆迭在透明基板，worin所述第一透明层堆叠包括至少一个第一介电膜，具有第一折射率，并且第二介电膜，与来自所述第一折射率不同的第二折射率，提供了一个结构化的透明导电膜的所检查的方式做的第一透明层堆叠和透明导电膜的被布置在以该顺序的基材，和worin结构化的透明导电膜，具有100欧姆/平方或更低的薄层电阻，和沉积在所述透明导电膜的第二透明层栈，电影，worin所述第二透明层堆叠包括至少一个第三电介质膜具有第三折射率和第四电介质膜或具有第四折射率的透明粘合剂，worin第一透明层堆叠，所述结构化的透明导电膜和第二在依次设置透明层堆叠。

6. 发明公开

EP2831707A1 TRANSPARENT BODY FOR USE IN A TOUCH SCREEN PANEL MANUFACTURING METHOD AND SYSTEM 有权
标题翻译： DURCHSICHTIGERKÖRPERSZUR VERWENDUNG在EINEMBERÜHRUNGSBILDSCHIRM-HERSTELLUNGSVERFAHREN UND -SYSTEM
公开(公告)号：EP2831707A1
公开(公告)日：2015-02-04
申请号：EP12711407.2
申请日：2012-03-30
申请人： Applied Materials, Inc.
发明人： ZILBAUER, Thomas Werner , GRILLMAYER, Jürgen
IPC分类号： G06F3/041
CPC分类号： H05K3/0091 , C23C14/35 , G06F3/041 , G06F2203/04103 , H01J37/3405 , H01J37/3426 , H05K1/0274 , H05K1/0306 , H05K1/0313 , H05K1/0393 , H05K2201/0108 , H05K2201/2054
摘要： A process for manufacturing a transparent body for use in a touch screen panel is provided. The process includes: depositing a first transparent layer stack over a transparent substrate, wherein said first transparent layer stack includes at least a first dielectric film with a first refractive index, and a second dielectric film with a second refractive index different from the second the first refractive index; providing a structured transparent conductive film in a manner such that the first transparent layer stack and the transparent conductive film are disposed over the substrate in this order, and wherein the structured transparent conductive film has a sheet resistance of 100 Ohm/square or below; and providing a transparent adhesive onto the structured transparent conductive film configured for attaching the layer stack to the touch screen panel.
摘要翻译：提供一种用于制造用于触摸屏面板的透明体的方法。该方法包括：在透明衬底上沉积第一透明层堆叠，其中所述第一透明层堆叠至少包括具有第一折射率的第一介电膜和具有与第二折射率不同的第二折射率的第二介电膜折射率; 以使得所述第一透明层叠层和所述透明导电膜依次配置在所述基板上的方式提供结构化的透明导电膜，并且其中所述结构化透明导电膜的薄层电阻为100欧姆/平方或以下; 以及将结构化的透明导电膜上的透明粘合剂提供给构造成用于将层叠层附接到触摸屏面板上。

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