专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

EP1360593B1 CONFIGURABLE CONNECTORIZED I/O SYSTEM 有权
标题翻译：可配置的连接式I / O系统
公开(公告)号：EP1360593B1
公开(公告)日：2010-05-26
申请号：EP02713575.5
申请日：2002-02-11
申请人： Berkeley Process Control, Inc.
发明人： SAGUES, Paul , PEUARCH, John, T. , WOODS, Leslie, H.
IPC分类号： G06F13/00 , G06F13/38 , G06F13/40 , H01B11/00 , H01B11/02 , G05B19/05
CPC分类号： G05B19/054 , G05B2219/1105 , G05B2219/1138 , G05B2219/1144 , H01R29/00 , H01R2201/06

2. 发明公开

EP1282486A4 SELF TEACHING ROBOTIC WAFER HANDLING SYSTEM 审中-公开
标题翻译： AUTODIDAKTISCHES机器人WAFER BEHANDLUNGSSYSTEM
公开(公告)号：EP1282486A4
公开(公告)日：2007-06-06
申请号：EP01932795
申请日：2001-04-30
申请人： BERKELEY PROCESS CONTROL INC
发明人： SAGUES PAUL , WIGGERS ROBERT T , AGGARWAL SANJAY K , D SOUZA KEVIN D , HARDING NATHAN H
IPC分类号： B25J9/16 , B25J9/18 , B25J9/22 , H01L21/00 , H01L21/677 , H01L21/68
CPC分类号： H01L21/67265 , B25J9/1692 , G05B2219/37275 , G05B2219/39024 , G05B2219/39048 , G05B2219/39056 , G05B2219/40623 , G05B2219/45031 , H01L21/67766
摘要： A wafer handling apparatus (10) having input and output robotic systems directed by a programmed controller (32). The controller (32) is pre-programmed with approximate physical dimensions of the system components and their relative positions, and additionally programmed to automatically perform a precision calibration/teaching routine to gather more precise location data.

3. 发明公开

EP1290452A1 SELF TEACHING ROBOTIC CARRIER HANDLING SYSTEM 有权
标题翻译：自学习支持机器人处理系统
公开(公告)号：EP1290452A1
公开(公告)日：2003-03-12
申请号：EP01939753.8
申请日：2001-05-30
申请人： Berkeley Process Control, Inc.
发明人： SAGUES, Paul , WIGGERS, Robert, T. , HARDING, Nathan, H. , AGGARWAL, Sanjay, K.
IPC分类号： G01R1/04
CPC分类号： H01L21/67259 , H01L21/67769
摘要： Embodiment of the present invention includes a wafer carrier buffer (10) for storage of a plurality of carriers containing wafers either waiting to be taken for processing in an adjacent wafer processing system, or waiting to be taken from the buffer following the processing. The buffer (10) has a sliding carrier first input apparatus for taking a carrier from outside the buffer though a buffer input door and into the buffer interior. A buffer controller (50) is included for directing robotic apparatus (44) to take the carrier from the input apparatus and place it on a selected one of a plurality of carrier storage locations, and from a carrier storage location to a first output for deliver of wafers to processing. The robotic apparatus (44) also delivers an empty carrier to a second input apparatus for receiving wafers from the processing area, and for delivery of a carrier with processed wafers to a second sliding output apparatus for removal from the buffer through a buffer output door. The controller (50) is programmed to direct an automatic calibration of all of the carrier storage locations and the input and output positions. The robotic apparatus (44) includes a sensor for detecting the position of a flange on a calibration fixture that is placed by the robot at a carrier storage location. The flange is accurately positioned on the fixture to correspond to a similar flange on each carrier that is used to engage with a tool on the robotic apparatus for moving the carrier. The calibration is preferably done by directing the robotic apparatus to place the calibration fixture at a location in need to calibration and then sensing the precise position of the fixture flange with the sensor apparatus. The controller (50) then calculates the coordinates required to place a carrier accurately in that location. This process is repeated for each carrier storage location and the input and output locations.

4. 发明公开

EP1960892A4 SYSTEM FOR PROGRAMMED CONTROL OF SIGNAL INPUT AND OUTPUT TO OR FROM CABLE CONDUCTORS 有权转让
标题翻译： SYSTEM FOR编程的控制信号输入和-EXPENDITURE或电缆线路
公开(公告)号：EP1960892A4
公开(公告)日：2011-03-02
申请号：EP06850479
申请日：2006-12-05
申请人： BERKELEY PROCESS CONTROL INC
发明人： SAGUES PAUL , BRASFIELD LARRY
IPC分类号： G06F13/38
CPC分类号： G05B19/0423 , G05B19/054 , G05B2219/1105 , G05B2219/1138 , G05B2219/1144 , G05B2219/21116 , G05B2219/25258 , G05B2219/25321

5. 发明公开

EP1960892A2 SYSTEM FOR PROGRAMMED CONTROL OF SIGNAL INPUT AND OUTPUT TO OR FROM CABLE CONDUCTORS 有权转让
标题翻译： SYSTEM FOR编程的控制信号输入和-EXPENDITURE或电缆线路
公开(公告)号：EP1960892A2
公开(公告)日：2008-08-27
申请号：EP06850479.4
申请日：2006-12-05
申请人： Berkeley Process Control, Inc.
发明人： SAGUES, Paul , BRASFIELD, Larry
IPC分类号： G06F13/38
CPC分类号： G05B19/0423 , G05B19/054 , G05B2219/1105 , G05B2219/1138 , G05B2219/1144 , G05B2219/21116 , G05B2219/25258 , G05B2219/25321
摘要： An input/output module for implementing directions from a controller for sending and receiving signals to and from devices. The input/output module includes a microprocessor for communication with, and receiving programming from the controller. The input/output module further includes device communication connectors, each having number of pins, each pin for interconnection with a cable conductor to a device. The input/output module has an ASIC for each of the pins, providing a controlled interface with the corresponding pin. Each ASIC has interconnection apparatus, selectable by the microprocessor for providing a particular interface with the pin served by the ASIC.

6. 发明公开

EP1360593A1 CONFIGURABLE CONNECTORIZED I/O SYSTEM 有权
标题翻译：可配置的连接式I / O系统
公开(公告)号：EP1360593A1
公开(公告)日：2003-11-12
申请号：EP02713575.5
申请日：2002-02-11
申请人： Berkeley Process Control, Inc.
发明人： SAGUES, Paul , PEUARCH, John, T. , WOODS, Leslie, H.
IPC分类号： G06F13/00 , G06F13/38 , G06F13/40 , H01B11/00 , H01B11/02
CPC分类号： G05B19/054 , G05B2219/1105 , G05B2219/1138 , G05B2219/1144 , H01R29/00 , H01R2201/06
摘要： A system for making interconnections between an input/output module (66) and a first device (70) and a second device (70) wherein the system uses standard cables (68) and connectors (74). The input/output module (66) includes a standard first connector (74) for making connection with a standard first transmission line cable (68) for conveying signals between the module (66) and the first device (70), and at least one second connector (74), with such second connector (74) connecting to a first end of a second standard cable (68). A second end of the second standard cable (68) includes a standard cable connector (74) for making connection to a corresponding connector of the second device (70). The input/output module (66) is configured to contain programmable logic for making the required connections between the module (66) and the first and second devices (70).
摘要翻译：一种用于在输入/输出模块（66）与第一装置（70）和第二装置（70）之间进行互连的系统，其中系统使用标准电缆（68）和连接器（74）。输入/输出模块（66）包括用于与用于在模块（66）和第一装置（70）之间传送信号的标准第一传输线缆（68）连接的标准第一连接器（74），以及至少一个第二连接器74，该第二连接器74连接到第二标准电缆68的第一端。第二标准电缆（68）的第二端包括用于连接到第二装置（70）的相应连接器的标准电缆连接器（74）。输入/输出模块（66）被配置为包含用于在模块（66）与第一和第二设备（70）之间进行所需连接的可编程逻辑。

7. 发明公开

EP1137052A1 Automatic calibration system for wafer transfer robot 有权
标题翻译：自动化Kalibrationssystemfüreinen Wafertransferroboter
公开(公告)号：EP1137052A1
公开(公告)日：2001-09-26
申请号：EP00105965.8
申请日：2000-03-24
申请人： Berkeley Process Control, Inc.
发明人： Sagues, Paul , Peurach, John P. , Aggarwal, Sanjay D.
IPC分类号： H01L21/00
CPC分类号： H01L21/681 , H01L21/67766
摘要： A system for automatically calibrating a semiconductor wafer handling robot so that the robot will move wafers into and out of precise locations within enclosures that form process stations or storage cassettes is disclosed. The system comprises a controller having memory and logic sections connected to a robot having an articulated arm that is movable in vertical (Z), horizontal (θ), and radial (R) directions and having a wafer retaining wand at the end of the arm. Dimensional characteristics of the robot wand and the enclosures are stored in the controller memory. Sensors are provided at each enclosure and/or the robot wand which are activated and provide signals to the controller that are relative to the wand position. The robot is programmed to execute a series of progressive movements at each enclosure location which are controlled by a combination of sensor response signals and the appropriate dimensional characteristics. At the end of the programmed movements, the robot wand is positioned within a process station or cassette so that it can engage for removal or release a wafer therein at a precise predetermined location.
摘要翻译：公开了一种用于自动校准半导体晶片处理机器人的系统，使得机器人将晶片移入和移出形成处理站或存储盒的外壳内的精确位置。该系统包括具有连接到机器人的存储器和逻辑部分的控制器，该机器人具有可在垂直（Z），水平（＆amp;θ）和径向（R）方向上移动的铰接臂，并且在该端部具有晶片保持杆臂。机器人手柄和外壳的尺寸特性存储在控制器存储器中。传感器设置在每个外壳和/或机器人棒上，其被激活并且向控制器提供相对于杆的位置的信号。机器人被编程为在每个封闭位置执行一系列渐进运动，这些运动由传感器响应信号和适当的尺寸特性组合来控制。在编程运动结束时，机器人棒位于处理站或盒中，使得其可以在精确的预定位置处接合以移除或释放其中的晶片。

8. 发明公开

EP1360593A4 CONFIGURABLE CONNECTORIZED I/O SYSTEM 有权
标题翻译： KONFIGURIERBARES KONNEKTORISIERTES E / A-SYSTEM
公开(公告)号：EP1360593A4
公开(公告)日：2004-05-19
申请号：EP02713575
申请日：2002-02-11
申请人： BERKELEY PROCESS CONTROL INC
发明人： SAGUES PAUL , PEUARCH JOHN T , WOODS LESLIE H
IPC分类号： G06F1/18 , G05B19/05 , G06F3/00 , H01R29/00 , G06F13/00 , G06F13/38 , G06F13/40 , H01B11/00 , H01B11/02
CPC分类号： G05B19/054 , G05B2219/1105 , G05B2219/1138 , G05B2219/1144 , H01R29/00 , H01R2201/06
摘要： A system for making interconnections between an input/output module (66) and a first device (70) and a second device (70) wherein the system uses standard cables (68) and connectors (74). The input/output module (66) includes a standard first connector (74) for making connection with a standard first transmission line cable (68) for conveying signals between the module (66) and the first device (70), and at least one second connector (74), with such second connector (74) connecting to a first end of a second standard cable (68). A second end of the second standard cable (68) includes a standard cable connector (74) for making connection to a corresponding connector of the second device (70). The input/output module (66) is configured to contain programmable logic for making the required connections between the module (66) and the first and second devices (70).
摘要翻译：一种用于在输入/输出模块（66）与第一装置（70）和第二装置（70）之间进行互连的系统，其中系统使用标准电缆（68）和连接器（74）。输入/输出模块（66）包括用于与用于在模块（66）和第一装置（70）之间传送信号的标准第一传输线缆（68）连接的标准第一连接器（74），以及至少一个第二连接器74，该第二连接器74连接到第二标准电缆68的第一端。第二标准电缆（68）的第二端包括用于连接到第二装置（70）的相应连接器的标准电缆连接器（74）。输入/输出模块（66）被配置为包含用于在模块（66）与第一和第二设备（70）之间进行所需连接的可编程逻辑。

9. 发明公开

EP1282486A1 SELF TEACHING ROBOTIC WAFER HANDLING SYSTEM 审中-公开
标题翻译： AUTO DIDACTIC机器人晶片处理系统
公开(公告)号：EP1282486A1
公开(公告)日：2003-02-12
申请号：EP01932795.6
申请日：2001-04-30
申请人： Berkeley Process Control, Inc.
发明人： SAGUES, Paul , WIGGERS, Robert, T. , AGGARWAL, Sanjay, K. , D'SOUZA, Kevin, D. , HARDING, Nathan, H.
IPC分类号： B25J9/22
CPC分类号： H01L21/67265 , B25J9/1692 , G05B2219/37275 , G05B2219/39024 , G05B2219/39048 , G05B2219/39056 , G05B2219/40623 , G05B2219/45031 , H01L21/67766
摘要： A wafer handling apparatus (10) having input and output robotic systems directed by a programmed controller (32). The controller (32) is pre-programmed with approximate physical dimensions of the system components and their relative positions, and additionally programmed to automatically perform a precision calibration/teaching routine to gather more precise location data.

10. 发明授权

EP1137052B1 Automatic calibration system for wafer transfer robot 有权
标题翻译：用于晶片传送机械手自动校准系统
公开(公告)号：EP1137052B1
公开(公告)日：2008-04-30
申请号：EP00105965.8
申请日：2000-03-24
申请人： Berkeley Process Control, Inc.
发明人： Sagues, Paul , Peurach, John P. , Aggarwal, Sanjay D.
IPC分类号： H01L21/00
CPC分类号： H01L21/681 , H01L21/67766

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式