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1. 发明公开

EP1290452A1 SELF TEACHING ROBOTIC CARRIER HANDLING SYSTEM 有权
标题翻译：自学习支持机器人处理系统
公开(公告)号：EP1290452A1
公开(公告)日：2003-03-12
申请号：EP01939753.8
申请日：2001-05-30
申请人： Berkeley Process Control, Inc.
发明人： SAGUES, Paul , WIGGERS, Robert, T. , HARDING, Nathan, H. , AGGARWAL, Sanjay, K.
IPC分类号： G01R1/04
CPC分类号： H01L21/67259 , H01L21/67769
摘要： Embodiment of the present invention includes a wafer carrier buffer (10) for storage of a plurality of carriers containing wafers either waiting to be taken for processing in an adjacent wafer processing system, or waiting to be taken from the buffer following the processing. The buffer (10) has a sliding carrier first input apparatus for taking a carrier from outside the buffer though a buffer input door and into the buffer interior. A buffer controller (50) is included for directing robotic apparatus (44) to take the carrier from the input apparatus and place it on a selected one of a plurality of carrier storage locations, and from a carrier storage location to a first output for deliver of wafers to processing. The robotic apparatus (44) also delivers an empty carrier to a second input apparatus for receiving wafers from the processing area, and for delivery of a carrier with processed wafers to a second sliding output apparatus for removal from the buffer through a buffer output door. The controller (50) is programmed to direct an automatic calibration of all of the carrier storage locations and the input and output positions. The robotic apparatus (44) includes a sensor for detecting the position of a flange on a calibration fixture that is placed by the robot at a carrier storage location. The flange is accurately positioned on the fixture to correspond to a similar flange on each carrier that is used to engage with a tool on the robotic apparatus for moving the carrier. The calibration is preferably done by directing the robotic apparatus to place the calibration fixture at a location in need to calibration and then sensing the precise position of the fixture flange with the sensor apparatus. The controller (50) then calculates the coordinates required to place a carrier accurately in that location. This process is repeated for each carrier storage location and the input and output locations.

2. 发明公开

EP1282486A1 SELF TEACHING ROBOTIC WAFER HANDLING SYSTEM 审中-公开
标题翻译： AUTO DIDACTIC机器人晶片处理系统
公开(公告)号：EP1282486A1
公开(公告)日：2003-02-12
申请号：EP01932795.6
申请日：2001-04-30
申请人： Berkeley Process Control, Inc.
发明人： SAGUES, Paul , WIGGERS, Robert, T. , AGGARWAL, Sanjay, K. , D'SOUZA, Kevin, D. , HARDING, Nathan, H.
IPC分类号： B25J9/22
CPC分类号： H01L21/67265 , B25J9/1692 , G05B2219/37275 , G05B2219/39024 , G05B2219/39048 , G05B2219/39056 , G05B2219/40623 , G05B2219/45031 , H01L21/67766
摘要： A wafer handling apparatus (10) having input and output robotic systems directed by a programmed controller (32). The controller (32) is pre-programmed with approximate physical dimensions of the system components and their relative positions, and additionally programmed to automatically perform a precision calibration/teaching routine to gather more precise location data.

3. 发明授权

EP1290452B1 SELF TEACHING ROBOTIC CARRIER HANDLING SYSTEM 有权
标题翻译：自学习支持机器人处理系统
公开(公告)号：EP1290452B1
公开(公告)日：2007-10-31
申请号：EP01939753.8
申请日：2001-05-30
申请人： Berkeley Process Control, Inc.
发明人： SAGUES, Paul , WIGGERS, Robert, T. , HARDING, Nathan, H. , AGGARWAL, Sanjay, K.
IPC分类号： H01L21/00
CPC分类号： H01L21/67259 , H01L21/67769
摘要： Embodiment of the present invention includes a wafer carrier buffer (10) for storage of a plurality of carriers containing wafers either waiting to be taken for processing in an adjacent wafer processing system, or waiting to be taken from the buffer following the processing. The buffer (10) has a sliding carrier first input apparatus for taking a carrier from outside the buffer though a buffer input door and into the buffer interior. A buffer controller (50) is included for directing robotic apparatus (44) to take the carrier from the input apparatus and place it on a selected one of a plurality of carrier storage locations, and from a carrier storage location to a first output for deliver of wafers to processing. The robotic apparatus (44) also delivers an empty carrier to a second input apparatus for receiving wafers from the processing area, and for delivery of a carrier with processed wafers to a second sliding output apparatus for removal from the buffer through a buffer output door. The controller (50) is programmed to direct an automatic calibration of all of the carrier storage locations and the input and output positions. The robotic apparatus (44) includes a sensor for detecting the position of a flange on a calibration fixture that is placed by the robot at a carrier storage location. The flange is accurately positioned on the fixture to correspond to a similar flange on each carrier that is used to engage with a tool on the robotic apparatus for moving the carrier. The calibration is preferably done by directing the robotic apparatus to place the calibration fixture at a location in need to calibration and then sensing the precise position of the fixture flange with the sensor apparatus. The controller (50) then calculates the coordinates required to place a carrier accurately in that location. This process is repeated for each carrier storage location and the input and output locations.

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