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1. 发明授权

EP2657678B1 Determining hardness and porosity from measuring THz-radiation having travelled within the measured object 有权
公开(公告)号：EP2657678B1
公开(公告)日：2018-08-08
申请号：EP13165286.9
申请日：2013-04-25
申请人： Advantest Corporation
发明人： Kato, Eiji
IPC分类号： G01N3/40 , G01N15/08 , G01N21/35
CPC分类号： G01N21/59 , G01N3/068 , G01N3/40 , G01N9/24 , G01N15/088 , G01N21/3581 , G01N21/9508 , G01N33/15 , G01N2015/0092 , G01N2015/0846 , G01N2203/0076
摘要： According to the present invention, a measurement device includes an electromagnetic wave detector, a phase measurement unit and a deriving unit. The electromagnetic wave detector detects an electromagnetic wave having a frequency equal to or more than 0.02THz and equal to or less than 12THz having traveled inside an object to be measured, which is an aggregation of particles. The phase measurement unit measures a change in phase of the electromagnetic wave generated by the travel inside the object to be measured based on a detection result by the electromagnetic wave detector. The deriving unit derives hardness or porosity of the object to be measured based on a measurement result by the phase measurement unit.

2. 发明授权

EP2657758B1 Electromagnetic wave emission device 有权
标题翻译：电磁波发射装置
公开(公告)号：EP2657758B1
公开(公告)日：2018-01-10
申请号：EP13164939.4
申请日：2013-04-23
申请人： Advantest Corporation
发明人： Shiota, Kazunori , Irisawa Akiyoshi
IPC分类号： G02F1/37 , F21V5/04 , G02F1/35 , G02F1/365
CPC分类号： F21V5/04 , G02F1/3534 , G02F1/365 , G02F2001/374 , G02F2203/13
摘要： According to the present invention, an electromagnetic wave emission device includes a nonlinear crystal having an optical waveguide; and a prism including an electromagnetic wave input surface and an electromagnetic wave transmission surface. The electromagnetic wave transmission surface includes a rotation surface which is a trajectory of a tilted line segment rotated about a central axis of the electromagnetic wave input surface, the tilted line segment being tilted with respect to the central axis. The tilted line segment and the central axis are on the same plane. The central axis is in parallel to an extending direction of the optical waveguide. The central axis passes through a projection of the optical waveguide into the electromagnetic wave input surface.

3. 发明公开

EP3208826A1 EXPOSURE APPARATUS 有权
标题翻译：接触设备
公开(公告)号：EP3208826A1
公开(公告)日：2017-08-23
申请号：EP16204969.6
申请日：2016-12-19
申请人： Advantest Corporation
发明人： HAMAGUCHI, Shinichi , TANAKA, Hitoshi , TOKUNO, Atsushi , KOJIMA, Shinichi , YAMADA, Akio
IPC分类号： H01J37/317 , H01J37/10 , H01J37/04
CPC分类号： H01J37/3177 , H01J37/045 , H01J37/065 , H01J37/09 , H01J37/10 , H01J2237/0435 , H01J2237/0453 , H01J2237/06308 , H01J2237/0835 , H01J2237/31754
摘要： The invention provides an exposure apparatus (100) including a formation module (122) which forms charged particle beams with different irradiation positions on a specimen. The formation module (122) includes: a particle source (20) which emits the charged particle beams from an emission region (21) in which a width in a longitudinal direction is different from and a width in a lateral direction orthogonal to the longitudinal direction; an aperture array device (60) provided with openings (62) arranged in an illuminated region (61) in which a width in a longitudinal direction is different from a width in a lateral direction orthogonal to the longitudinal direction; illumination lenses (30, 50) provided between the particle source (20) and the aperture array device (60); and a beam cross-section deformation device (40) which is provided between the particle source (20) and the aperture array device (60), and deforms a cross-sectional shape of the charged particle beams into an anisotropic shape by an action of a magnetic field or an electric field.
摘要翻译：本发明提供了一种曝光设备（100），其包括形成具有不同照射位置的带电粒子束的样本模块（122）。所述形成模块（122）包括：粒子源（20），其从发光区域（21）发射带电粒子束，所述发射区域的长度方向的宽度与所述长度方向正交的宽度方向的宽度不同， ; 具有配置在照明区域（61）内的开口部（62）的光圈阵列装置（60），所述照明区域（61）的长度方向的宽度与所述长度方向正交的宽度方向的宽度不同; 设置在所述粒子源（20）和所述孔径阵列装置（60）之间的照明透镜（30,50）; 以及设置在粒子源（20）与光阑阵列装置（60）之间的光束截面变形装置（40），该光束截面变形装置（40）通过以下动作使带电粒子束的截面形状变形为各向异性形状一个磁场或一个电场。

4. 发明公开

EP3120770A3 INFRARED OPTICAL BIOSENSING APPARATUS AND PROBE THEREOF 审中-公开
标题翻译：红外光学生物传感装置及其探针
公开(公告)号：EP3120770A3
公开(公告)日：2017-02-22
申请号：EP16179461.5
申请日：2016-07-14
申请人： Advantest Corporation
发明人： KIMURA, Makoto
IPC分类号： A61B5/1455 , G01N21/359 , G01N21/49
CPC分类号： G01N21/359 , A61B5/0077 , A61B5/0261 , A61B5/4064 , G01N21/49 , G01N21/53 , G01N33/4925
摘要： A infrared optical biosensing apparatus is provided which includes: a probe including an infrared light emitting element which emits infrared light, an output variation detection element which detects output variation of the infrared light emitting element, and a light receiving element which detects the infrared light scattered in a living organism; and an operation unit which calculates information on the living organism based on output data of the light receiving element. The operation unit corrects the information on the living organism in accordance with a detection result of the output variation detection element.
摘要翻译：提供了一种红外光学生物传感设备，其包括：探针，其包括发射红外光的红外光发射元件，检测红外光发射元件的输出变化的输出变化检测元件以及检测散射的红外光的光接收元件在活的有机体里; 以及操作单元，其基于光接收元件的输出数据计算关于活体的信息。操作单元根据输出变化检测元件的检测结果来校正生物体的信息。

5. 发明授权

EP2594920B1 DEVICE, METHOD AND PROGRAM LUBRICANT SPREAD ANALYSIS 有权
标题翻译：设备，方法和程序润滑油的传播分析
公开(公告)号：EP2594920B1
公开(公告)日：2016-06-01
申请号：EP12192842.8
申请日：2012-11-15
申请人： Advantest Corporation
发明人： Kato, Eiji , Irisawa, Akiyoshi
IPC分类号： G01N21/55 , G01N21/3586 , A61K9/20
CPC分类号： G01J3/42 , G01N21/13 , G01N21/314 , G01N21/35 , G01N21/3581 , G01N21/359 , G01N21/552 , G01N21/95 , G01N21/9508 , G01N2021/8411

6. 发明公开

EP2856943A1 PHOTOACOUSTIC WAVE MEASUREMENT DEVICE 有权转让
标题翻译： PHOTOAKUSTISCHE WELLENMESSVORRICHTUNG
公开(公告)号：EP2856943A1
公开(公告)日：2015-04-08
申请号：EP13800243.1
申请日：2013-05-02
申请人： Advantest Corporation
发明人： IDA, Taiichiro
IPC分类号： A61B8/00 , G01N21/00 , G01N29/00
CPC分类号： G01H9/004 , A61B5/0095 , A61B5/7203 , G01N21/1702 , G01N29/2418 , G01N2021/1708
摘要： A photoacoustic wave measurement device includes a pulsed-light outputter, an arrangement member and a photoacoustic wave detector. The pulsed-light outputter outputs a pulsed light. The arrangement member is disposed between a pulsed-light output end of the pulsed-light outputter and a measurement object, the arrangement member being adapted to allow the pulsed light to pass therethrough. The photoacoustic wave detector receives a photoacoustic wave generated by the measurement object by the pulsed light and converts the photoacoustic wave into an electric signal. The photoacoustic wave detector is farther from the measurement object than the pulsed-light output end. The arrangement member has such a sufficient thickness that noise to be detected by the photoacoustic wave detector after a start time of detection of the photoacoustic wave starts to be detected after an end time of the detection of the photoacoustic wave.
摘要翻译：光声波测量装置包括脉冲光输出器，布置构件和光声波检测器。脉冲光输出器输出脉冲光。布置构件设置在脉冲光输出器的脉冲光输出端和测量对象之间，该布置构件适于允许脉冲光通过。光声波检测器通过脉冲光接收由测量对象产生的光声波，并将光声波转换成电信号。光声波检测器比脉冲光输出端远离测量对象。布置构件具有足够的厚度，使得在光声波的检测的结束时间之后开始检测到光声波的检测开始时之后由光声波检测器检测的噪声。

7. 发明公开

EP2509099A3 Electron beam exposure apparatus and electron beam exposure method 有权
标题翻译： Elektronenstrahlexpositionsvorrichtung und Elektronenstrahlexpositionsverfahren
公开(公告)号：EP2509099A3
公开(公告)日：2014-03-19
申请号：EP12162992.7
申请日：2012-04-03
申请人： Advantest Corporation
发明人： Kurokawa, Masaki , Yamada, Akio , Okawa, Tatsuro
IPC分类号： H01J37/302 , H01J37/317 , G03F1/78 , G03F7/20
CPC分类号： H01J37/3177 , B82Y10/00 , B82Y40/00 , G03F1/78 , H01J37/3023 , H01J2237/30461 , H01J2237/31769
摘要： In a multi-column electron beam exposure apparatus for performing exposure treatment in parallel by arranging a plurality of column cells on a wafer, a relationship between exposure intensity and a line width for each column cell is obtained (Steps S41 and S44). Then, correction parameters are obtained, which allow a relationship between exposure intensity and a line width for a correction target column cell to coincide with a relationship between exposure intensity and a line width for a reference column cell selected from among the plurality of column cells (Steps S43 and S46). Thereafter, exposure time of each column cell is obtained by correcting the exposure time of the reference column cell based on the correction parameters thus obtained (Steps S30 and S40).
摘要翻译：在多列电子束曝光装置中，通过在晶片上配置多个列单元进行并行进行曝光处理，得到各列单元的曝光强度与线宽之间的关系（步骤S41，步骤S44）。然后，获得校正参数，其允许校正目标列单元的曝光强度和线宽之间的关系与从多个列单元格中选择的参考列单元的曝光强度和线宽之间的关系一致（步骤S43和S46）。此后，通过基于由此获得的校正参数校正参考列单元的曝光时间来获得每列列单元的曝光时间（步骤S30和S40）。

8. 发明公开

EP2657758A2 Electromagnetic wave emission device 有权
标题翻译：维克里森zum奥森登电磁阀维恩
公开(公告)号：EP2657758A2
公开(公告)日：2013-10-30
申请号：EP13164939.4
申请日：2013-04-23
申请人： Advantest Corporation
发明人： Shiota, Kazunhori , Irisawa Akiyoshi
IPC分类号： G02F1/35 , G02F1/365
CPC分类号： F21V5/04 , G02F1/3534 , G02F1/365 , G02F2001/374 , G02F2203/13
摘要： According to the present invention, an electromagnetic wave emission device includes a nonlinear crystal having an optical waveguide; and a prism including an electromagnetic wave input surface and an electromagnetic wave transmission surface. The electromagnetic wave transmission surface includes a rotation surface which is a trajectory of a tilted line segment rotated about a central axis of the electromagnetic wave input surface, the tilted line segment being tilted with respect to the central axis. The tilted line segment and the central axis are on the same plane. The central axis is in parallel to an extending direction of the optical waveguide. The central axis passes through a projection of the optical waveguide into the electromagnetic wave input surface.
摘要翻译：根据本发明，电磁波发射装置包括具有光波导的非线性晶体; 以及包括电磁波输入面和电磁波透过面的棱镜。电磁波传播面包括作为围绕电磁波输入面的中心轴旋转的倾斜线段的轨迹的旋转面，倾斜线段相对于中心轴倾斜。倾斜的线段和中心轴在同一平面上。中心轴与光波导的延伸方向平行。中心轴穿过光波导的投影到电磁波输入表面。

9. 发明公开

EP2657678A2 Determining hardness and porosity from measuring THz-radiation having travelled within the measured object 有权
标题翻译：确定测量的硬度和孔隙率的传播的测量对象物的THz辐射内
公开(公告)号：EP2657678A2
公开(公告)日：2013-10-30
申请号：EP13165286.9
申请日：2013-04-25
申请人： Advantest Corporation
发明人： Kato, Eiji
IPC分类号： G01N3/40 , G01N15/08 , G01N21/35
CPC分类号： G01N21/59 , G01N3/068 , G01N3/40 , G01N9/24 , G01N15/088 , G01N21/3581 , G01N21/9508 , G01N33/15 , G01N2015/0092 , G01N2015/0846 , G01N2203/0076
摘要： According to the present invention, a measurement device includes an electromagnetic wave detector, a phase measurement unit and a deriving unit. The electromagnetic wave detector detects an electromagnetic wave having a frequency equal to or more than 0.02THz and equal to or less than 12THz having traveled inside an object to be measured, which is an aggregation of particles. The phase measurement unit measures a change in phase of the electromagnetic wave generated by the travel inside the object to be measured based on a detection result by the electromagnetic wave detector. The deriving unit derives hardness or porosity of the object to be measured based on a measurement result by the phase measurement unit.

10. 发明公开

EP2577466A2 FLEXIBLE STORAGE INTERFACE TESTER WITH VARIABLE PARALLELISM AND FIRMWARE UPGRADEABILITY 审中-公开
标题翻译：具有可变并行性和固件更新能力灵活的存储接口测试
公开(公告)号：EP2577466A2
公开(公告)日：2013-04-10
申请号：EP11787137.6
申请日：2011-05-18
申请人： ADVANTEST CORPORATION
发明人： FILLER, Scott , VOLKERINK, Hendrik, Jan (Erik) , TANTAWY, Ahmed, Sami
IPC分类号： G06F11/22 , G06F11/273 , G06F13/14 , G06F13/38
CPC分类号： G01R31/31908 , G01R31/2834 , G06F11/263 , G06F11/2733 , G06F17/00 , G11C29/56
摘要： A system for use in automated test equipment. In one embodiment, the system includes a configurable integrated circuit (IC) programmable to provide test patterns for use in automated test equipment. The configurable IC includes a configurable interface core that is programmable to provide functionality of one or more protocol based interfaces for a device under test (DUT) and is programmable to interface with the DUT. The system also includes a connection configurable to couple the configurable IC to the DUT.

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