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61. 发明公开

EP2921286A1 ADDITIVE MANUFACTURING MACHINE 审中-公开
标题翻译： ADDITIVHERSTELLUNGSMASCHINE
公开(公告)号：EP2921286A1
公开(公告)日：2015-09-23
申请号：EP15159901.6
申请日：2015-03-19
申请人： JEOL Ltd.
发明人： Honda, Kazuhiro
IPC分类号： B29C67/00 , B22F3/105 , B33Y30/00
CPC分类号： B22F3/1055 , B22F2003/1056 , B22F2003/1059 , B29C64/153 , B29C64/20 , B33Y30/00 , B33Y40/00 , Y02P10/295
摘要： An additive manufacturing machine is offered which can stably supply a powdered material onto a support stage and can suppress contamination of the interior of a processing chamber with the powdered material. The additive manufacturing machine (1) has the support stage (4) and a powder supply unit (7). The supply unit (7) has powder cartridges (21) and holding mechanisms (22) by which the cartridges (21) are detachably held. Each cartridge (21) has a cartridge body (26) for receiving an amount of powdered material (M1) to be spread tightly as one or plural layers on the stage (4) and an exhaust port (26a) through which the powdered material (M1) received in the cartridge body (26) is discharged.
摘要翻译：提供一种添加剂制造机器，其可以将粉末材料稳定地供应到支撑台上并且可以抑制处理室的内部与粉末材料的污染。添加剂制造机（1）具有支撑台（4）和粉末供给单元（7）。供给单元（7）具有粉末盒（21）和保持机构（22），可拆卸地保持盒（21）。每个墨盒（21）具有一个盒主体（26），用于接收一定量的粉末材料（M1），该粉末材料（M1）在台架（4）上以一层或多层紧密地分散，并且排出口（26a） M1）容纳在盒体（26）中。

62. 发明公开

EP2672503A3 Method of axial alignment of charged particle beam and charged particle beam system 审中-公开
标题翻译：一种用于带电粒子束的轴向对准和带电粒子束系统的过程
公开(公告)号：EP2672503A3
公开(公告)日：2015-08-26
申请号：EP13170438.9
申请日：2013-06-04
申请人： Jeol Ltd.
发明人： Yamada, Mitsuru , Nakamura, Motohiro
IPC分类号： H01J37/147 , H01J37/28
CPC分类号： H01J37/1471 , H01J37/28 , H01J2237/1501
摘要： A method of axially aligning a charged particle beam (B) easily is offered. This method involves an image data acquisition step (S10) and a calculation step (S11). The image data acquisition step (S10) consists of obtaining first to third sets of image data by scanning a shielding member placed in the path of the beam with the beam (B) while varying conditions of the excitation currents through first and second alignment coils (10a, 10b), respectively. The calculation step (S11) consists of calculating the values of the excitation currents through the first and second alignment coils (10a, 10b), respectively, for axial alignment of the beam (B), based on the obtained first to third sets of image data.
Furthermore, a charged particle beam system (100) configured for carrying out this method is disclosed, comprising first and second alignment coils (10a, 10b), image data acquisition means (22, 24, 32) for carrying out the image data acquisition step, and calculation means (34,36) for carrying out the calculation step.

63. 发明公开

EP2853923A1 Radiation detector and sample analyzer 有权
标题翻译： Strahlungsdetektor und Probenanalator
公开(公告)号：EP2853923A1
公开(公告)日：2015-04-01
申请号：EP14186246.6
申请日：2014-09-24
申请人： JEOL Ltd.
发明人： Kinugasa, Genki
IPC分类号： G01T1/17
CPC分类号： G01T1/172 , G01T1/171
摘要： A radiation detector is offered which can suppress generation of sum peaks. The radiation detector (100) has a radiation detection portion (2), a first differential filter portion (10) for converting the output signal S2 from the detection portion into a first pulsed signal S10, a second differential filter portion (20) for converting the output signal S2 into a second pulsed signal S20, a third differential filter portion (30) having a time constant longer than that of the second differential filter portion (20) and operative to convert the output signal S2 into a third pulsed signal S30, an event detection portion (40) for outputting an event signal S40, a pileup detection portion (50) for outputting a pileup signal S50 in response to the ratio between the pulse height of the second pulsed signal S20 and the pulse height of the third pulsed signal S30, and a pulse height detection portion (60) starting to detect the pulse height of the first pulsed signal S10 in response to the event signal S40 and outputting a detection signal S60. The pulse height detection portion (60) stops from outputting the detection signal S60 in response to the pileup signal S50.
摘要翻译：提供了可以抑制和峰的产生的放射线检测器。辐射检测器（100）具有辐射检测部（2），用于将来自检测部的输出信号S2转换为第一脉冲信号S10的第一差分滤波器部（10），用于转换的第二差分滤波器部（20）输出信号S2变为第二脉冲信号S20，第三差分滤波器部分（30）具有比第二差分滤波器部分（20）的时间常数更长的时间常数，并将输出信号S2转换为第三脉冲信号S30，用于输出事件信号S40的事件检测部分（40），用于响应于第二脉冲信号S20的脉冲高度与第三脉冲信号S20的脉冲高度之间的比率输出堆积信号S50的堆积检测部分（50）信号S30和脉冲高度检测部分（60）响应于事件信号S40开始检测第一脉冲信号S10的脉冲高度，并输出检测信号S60。响应于堆积信号S50，脉冲高度检测部分60停止输出检测信号S60。

64. 发明公开

EP2674960A3 Electron microscope and method of adjusting the same 有权
标题翻译：电子显微镜以及它们的调整的方法
公开(公告)号：EP2674960A3
公开(公告)日：2015-01-07
申请号：EP13171746.4
申请日：2013-06-12
申请人： JEOL Ltd.
发明人： Kohno, Yuji
IPC分类号： H01J37/244 , H01J37/28 , H01J37/22
CPC分类号： H01J37/22 , H01J37/244 , H01J37/28 , H01J2237/0206 , H01J2237/0209 , H01J2237/06341 , H01J2237/24514 , H01J2237/24528 , H01J2237/2801 , H01J2237/2826
摘要： An electron microscope is offered which has a detector and a noise canceling circuit whose offset can be easily adjusted if any information about the offset of the detector is not available. Also, a method of adjusting this microscope is offered. The method of adjusting the electron microscope (1) starts with measuring the output voltage from a preamplifier (20) at given timing while blocking the electron beam transmitted through a sample (14) from hitting the detector (15) (step S 140). An offset voltage to be set into the noise canceling circuit (30) is calculated based on the measured output voltage from the preamplifier (20) (step S150). The calculated offset voltage is set into the noise canceling circuit (30) (step S160).

65. 发明公开

EP2804199A2 Scanning charged particle microscope, image acquisition method, and electron detection method 有权转让
标题翻译： Raster-Teilchenmikroskop，Bilderfassungsverfahren und Elektronendetektionsverfahren
公开(公告)号：EP2804199A2
公开(公告)日：2014-11-19
申请号：EP14168549.5
申请日：2014-05-15
申请人： JEOL Ltd.
发明人： Otsuka, Takeshi
IPC分类号： H01J37/244 , H01J37/28
CPC分类号： H01J37/28 , H01J37/22 , H01J37/244 , H01J2237/063 , H01J2237/15 , H01J2237/2441 , H01J2237/2446 , H01J2237/24465 , H01J2237/2448 , H01J2237/24485 , H01J2237/2806
摘要： A scanning charged particle microscope is offered which can selectively detect and image electrons. The scanning charged particle microscope (100) has: a source (1) of a charged particle beam (E1); an objective lens (6) for bringing the charged particle beam (E1) emitted from the source (1) into focus at a sample (S); a scanning deflector (4) for scanning the focused charged particle beam (E1) over the sample (S); a sorting portion (10) for sorting out electrons emitted at given emission angles from electrons released from the sample (S) in response to irradiation of the sample (S) by the charged particle beam (E1); an electron deflector (20) for producing a deflecting field to deflect the electrons (E2) sorted out according to their energy; a detection portion (30) for detecting the electrons (E2) deflected by the electron deflector (20); and an image creating portion (44) for creating an image, based on the results of the detection performed by the detection portion (30).
摘要翻译：提供一种扫描带电粒子显微镜，可以选择性地检测和成像电子。扫描带电粒子显微镜（100）具有：带电粒子束（E1）的源（1）; 用于使从源（1）发射的带电粒子束（E1）在样品（S）处聚焦的物镜（6）; 用于扫描样品（S）上的聚焦带电粒子束（E1）的扫描偏转器（4）; 分选部分（10），用于响应于通过带电粒子束（E1）照射样品（S），以从给定的发射角度发射的电子排出电子; 用于产生偏转场的电子偏转器（20），以使根据其能量分类的电子（E2）偏转; 用于检测由电子偏转器（20）偏转的电子的检测部分（30）; 以及基于由检测部分（30）执行的检测结果来创建图像的图像创建部分（44）。

66. 发明公开

EP2463887A3 Method of making axial alignment of charged particle beam and charged particle beam system 审中-公开
标题翻译：一种生产带电粒子束的轴向对准处理和带电粒子束
公开(公告)号：EP2463887A3
公开(公告)日：2014-07-30
申请号：EP11192488.2
申请日：2011-12-07
申请人： JEOL Ltd.
发明人： Yamada, Mitsuru , Nakamura, Motohiro , Sato, Mitsuru
IPC分类号： H01J37/147 , H01J37/22 , H01J37/28
CPC分类号： H01J37/1471 , H01J37/222 , H01J37/28 , H01J2237/1501
摘要： A method of making axial alignment of a charged particle beam (B) is offered which facilitates making axial alignment of the beam (B). The method starts with obtaining at least first through sixth image data while controlling the focal position of the beam on a sample (S) in the direction of incidence, the excitation current in a first alignment coil (10a), and the excitation current in a second alignment coil (10b) . Then, values of the excitation currents in the first (10a) and second alignment coils (10b) for the axial alignment of the beam (B) are calculated from the at least first through sixth image data.

67. 发明授权

EP2197016B1 Electron beam apparatus and method of operating the same 有权
标题翻译：一种电子束装置及其驱动方法
公开(公告)号：EP2197016B1
公开(公告)日：2014-02-12
申请号：EP09252728.2
申请日：2009-12-04
申请人： JEOL Ltd.
发明人： Kazumori, Hiroyoshi
IPC分类号： H01J37/147 , H01J37/244 , H01J37/28 , H01J37/153
CPC分类号： H01J37/153 , H01J37/244 , H01J37/28 , H01J2237/15 , H01J2237/2443 , H01J2237/24475 , H01J2237/2448

68. 发明公开

EP2674961A2 Electron microscope and method of operating the same 有权
标题翻译： Elektronenmikroskop und Verfahren zu dessen Betrieb
公开(公告)号：EP2674961A2
公开(公告)日：2013-12-18
申请号：EP13171744.9
申请日：2013-06-12
申请人： Jeol Ltd.
发明人： Suzuki, Takashi
IPC分类号： H01J37/28
CPC分类号： G06F17/18 , H01J37/28 , H01J37/285 , H01J2237/06341 , H01J2237/24495 , H01J2237/24507
摘要： An electron microscope is offered which can achieve noise cancellation that can be adjusted without being affected by decreases in emission current and more easily than the prior art analog division technique. Also, a method of operating this microscope is offered. The electron microscope (1) has an electron beam source (11) for producing an electron beam, a noise canceling aperture (12) for detecting a part of the beam, an amplifier (42), an effective value calculating circuit (44) for extracting DC components of the output signal from the amplifier (42), a detector (15) for detecting a signal obtained in response to impingement of the beam on a sample (A), a preamplifier circuit (20), an amplifier circuit (30), a dividing circuit (54) for performing a division based on the output signal from the amplifier circuit (30) and on the output signal from the amplifier (42), and a multiplier circuit (58) for performing multiplication of the output signal from the dividing circuit (54) and the output from the effective value calculating circuit (44).
摘要翻译：提供了可以实现噪声消除的电子显微镜，其可以在不受现有技术模拟分割技术的发射电流的降低的影响的情况下被调整。此外，提供了一种操作该显微镜的方法。电子显微镜（1）具有用于产生电子束的电子束源（11），用于检测光束的一部分的噪声消除孔（12），放大器（42），有效值计算电路（44），用于提取来自放大器（42）的输出信号的DC分量;检测器（15），用于检测响应于束对样本（A）的冲击而获得的信号;前置放大器电路（20）;放大器电路），用于基于来自放大器电路（30）的输出信号和来自放大器（42）的输出信号执行除法的分频电路（54），以及用于执行输出信号来自分频电路（54）和有效值计算电路（44）的输出。

69. 发明公开

EP2672503A2 Method of axial alignment of charged particle beam and charged particle beam system 审中-公开
标题翻译：阿尔及利亚帝国主义者
公开(公告)号：EP2672503A2
公开(公告)日：2013-12-11
申请号：EP13170438.9
申请日：2013-06-04
申请人： Jeol Ltd.
发明人： Yamada, Mitsuru , Nakamura, Motohiro
IPC分类号： H01J37/147
CPC分类号： H01J37/1471 , H01J37/28 , H01J2237/1501
摘要： A method of axially aligning a charged particle beam (B) easily is offered. This method involves an image data acquisition step (S10) and a calculation step (S11). The image data acquisition step (S10) consists of obtaining first to third sets of image data by scanning a shielding member placed in the path of the beam with the beam (B) while varying conditions of the excitation currents through first and second alignment coils (10a, 10b), respectively. The calculation step (S11) consists of calculating the values of the excitation currents through the first and second alignment coils (10a, 10b), respectively, for axial alignment of the beam (B), based on the obtained first to third sets of image data.
Furthermore, a charged particle beam system (100) configured for carrying out this method is disclosed, comprising first and second alignment coils (10a, 10b), image data acquisition means (22, 24, 32) for carrying out the image data acquisition step, and calculation means (34,36) for carrying out the calculation step.
摘要翻译：提供了一种容易地轴向对准带电粒子束（B）的方法。该方法涉及图像数据获取步骤（S10）和计算步骤（S11）。图像数据获取步骤（S10）包括通过在通过第一和第二对准线圈改变激励电流的条件的同时通过扫描放置在光束（B）的光束路径中的屏蔽构件来获得第一至第三组图像数据（ 10a，10b）。计算步骤（S11）包括基于所获得的第一至第三组图像来计算通过第一和第二对准线圈（10a，10b）的激励电流的值以用于光束（B）的轴向对准数据。此外，公开了一种用于执行该方法的带电粒子束系统（100），包括第一和第二对准线圈（10a，10b），用于执行图像数据获取步骤的图像数据获取装置（22,24,32）以及用于执行计算步骤的计算装置（34,36）。

70. 发明公开

EP2669926A2 Method of axial alignment of charged particle beam and charged particle beam system 有权
标题翻译：阿尔及利亚帝国主义者
公开(公告)号：EP2669926A2
公开(公告)日：2013-12-04
申请号：EP13275130.6
申请日：2013-05-31
申请人： Jeol Ltd.
发明人： Yamada, Mitsuru
IPC分类号： H01J37/147
CPC分类号： H01J29/64 , H01J37/1471 , H01J37/153 , H01J37/28 , H01J2237/1501 , H01J2237/1532
摘要： A method of axially aligning a charged particle beam easily is offered. This method is implemented by a charged particle beam system equipped with an astigmatic correction lens (10) including a first pair of coils (P1) and a second pair of coils (P2). The first pair of coils consists of first (101) and second coils (102) which are located on opposite sides of the axis of the beam (B). The first (101) and second coils (102) have opposite coil surfaces (101f, 102f) having magnetic poles of a first polarity. The second pair of coils (P2) consists of third (103) and fourth coils (104) which are located on opposite sides of the axis of the beam (B). The third (103) and fourth coils (104) have opposite coil surfaces (103f, 104f) having magnetic poles of a second polarity different from the first polarity. The second pair of coils (P2) is angularly spaced from the first pair of coils (P1). The method starts with obtaining via respective image data acquisition means (22, 24, 32) first to sixth sets of image data while varying currents flowing through the first to fourth coils to first to sixth sets of conditions. Then, using respective calculation means (34, 36), the values of the currents through the first to fourth coils for correcting the position of the axis of the beam (B) are calculated based on the first to sixth sets of image data.
摘要翻译：提供了一种容易地轴向对准带电粒子束的方法。该方法由配备有包括第一对线圈（P1）和第二对线圈（P2）的像散校正透镜（10）的带电粒子束系统来实现。第一对线圈由位于梁（B）的轴线的相对侧上的第一（101）和第二线圈（102）组成。第一（101）和第二线圈（102）具有具有第一极性的磁极的相对的线圈表面（101f，102f）。第二对线圈（P2）由位于梁（B）的轴线的相对侧上的第三（103）和第四线圈（104）组成。第三（103）和第四线圈（104）具有具有与第一极性不同的第二极性的磁极的相对的线圈表面（103f，104f）。第二对线圈（P2）与第一对线圈（P1）成角度地间隔开。该方法开始于通过各自的图像数据获取装置（22,24,32）从第一至第六组图像数据获得，同时将流过第一至第四线圈的电流改变为第一至第六组条件。然后，使用各自的计算装置（34,36），基于第一至第六组图像数据计算用于校正光束（B）的轴的位置的通过第一至第四线圈的电流的值。

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