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51. 发明公开

EP1411024A2 2-D actuator and manufacturing method thereof 有权
标题翻译： 2-D Stellelement unddazugehörigesHerstellungsverfahren
公开(公告)号：EP1411024A2
公开(公告)日：2004-04-21
申请号：EP03255439.6
申请日：2003-09-01
申请人： SAMSUNG ELECTRONICS CO., LTD.
发明人： Ko, Young-chul , Lee, Jin-ho
IPC分类号： B81B3/00
CPC分类号： B81B3/0062 , B81B2201/033 , B81B2201/042 , B81B2203/058 , B81C2201/019 , G02B26/0841 , H02N1/008
摘要： An actuator includes a stage having a first direction and a second direction perpendicular to the first direction and seesawing around a third direction perpendicular to the first direction and the second direction with respect to a rotation center axis placed along the first direction. A first support portion supports a seesaw motion of the stage. A base facing the stage under the stage at a predetermined interval is supported by the first support portion. A stage driving portion has a plurality of first driving comb electrodes and a plurality of first stationary comb electrodes corresponding to the first driving comb electrodes which are respectively formed on a lower surface of each of the stages and an upper surface of the base facing the stages. A second support portion supports the first support portion so that the first support portion seesaws with respect to a rotation center axis placed along the second direction. A first support portion driving portion has a second driving comb electrode provided at the first support portion and a second stationary comb electrode fixedly positioned to correspond to the second driving comb electrode to generate a seesaw motion of the first support portion.
摘要翻译：驱动部分具有分别布置在载物台（100）的下表面和基座（110）的上表面的驱动和固定梳状电极（120,130）。另一个驱动部分具有设置在支撑部分（200）处的驱动梳状电极（410）和对应于驱动梳状电极（120）定位的固定梳状电极（420），以产生支撑部分（200）的跷跷板运动。还包括用于制造致动器的方法的独立权利要求。

52. 发明公开

EP1360144A1 GYROSCOPE AND FABRICATION METHOD THEREOF 有权
标题翻译：陀螺仪和方法生产同样
公开(公告)号：EP1360144A1
公开(公告)日：2003-11-12
申请号：EP02711501.3
申请日：2002-01-30
申请人： Intellimicrons Co., LTD. , Kim, Yong-Kweon
发明人： KIM, Yong-Kweon , KIM, Seong-Hyok
IPC分类号： B81C1/00 , G01C19/56
CPC分类号： B81B3/0078 , B81B3/0062 , B81B2201/0242 , B81B2203/0136 , B81B2203/04 , G01C19/5755
摘要： A gyroscope which comprises: a driving fixed electrode (26) being fixed; a driving displacement electrode (24) being opposite to the driving fixed electrode, and being able to be displaced in a first direction; an inertial mass (23) being connected to the driving displacement electrode (24), being displaced in the first direction according to the first directional displacement of the driving displacement electrode (24), and being displaced in a second direction when an angular rate is applied; a sensing displacement electrode (22) being connected to the inertial mass (23), and being able to be displaced in the second direction according to the second directional displacement of the inertial mass (23); and a sensing fixed electrode (25) being opposite to the sensing displacement electrode and being fixed. The driving displacement electrode (24) is supported by a folded spring (31) movable in the first direction, and the sensing displacement electrode is supported by a folded spring (32) movable in the second direction.

53. 发明公开

EP1191382A3 Stacked micromirror structures 审中-公开
标题翻译：堆叠的微反射镜结构
公开(公告)号：EP1191382A3
公开(公告)日：2003-10-15
申请号：EP01000451.3
申请日：2001-09-12
申请人： Texas Instruments Inc.
发明人： Orcutt, John W. , Melendez, Jose L.
IPC分类号： G02B26/08 , B81B3/00 , H04B10/10
CPC分类号： H04B10/1123 , B81B3/0062 , G02B26/0833 , H04B10/1125 , H04B10/1141
摘要： A packaged micromirror assembly is disclosed. The assembly includes a micromirror (70) formed of a lower element (60) having a central mounting portion (63) surrounded by an intermediate gimbal portion and a frame portion (61). A magnet standoff (68) is attached to the central mounting portion (63) and an upper mirror surface (65) is attached to the magnet standoff (68). The micromirror (70) may be packaged into a body with coil drivers. A magnetic field generated by the coil drivers applies a torque to the magnet standoff (68) causing it to rotate; because of silicon hinges in the lower element (60), the upper mirror (65) can rotate in two axes.

54. 发明授权

EP1104746B1 Micro-electro-mechanical optical device 有权
标题翻译：一种微机电光学器件
公开(公告)号：EP1104746B1
公开(公告)日：2003-02-26
申请号：EP00307167.7
申请日：2000-08-21
申请人： LUCENT TECHNOLOGIES INC.
发明人： Anatolyevich Aksyuk, Vladimir , Bishop, David John
IPC分类号： B81B5/00 , G02B26/08
CPC分类号： G02B26/0841 , B81B3/004 , B81B3/0062 , B81B5/00 , B81B7/0003 , B81B2201/042 , B81B2201/045 , G02B26/0866

55. 发明公开

EP1191382A2 Stacked micromirror structures 审中-公开
标题翻译： Gestapelte Mikro-Spiegelstrukturen
公开(公告)号：EP1191382A2
公开(公告)日：2002-03-27
申请号：EP01000451.3
申请日：2001-09-12
申请人： Texas Instruments Inc.
发明人： Orcutt, John W. , Melendez, Jose L.
IPC分类号： G02B26/08 , B81B3/00
CPC分类号： H04B10/1123 , B81B3/0062 , G02B26/0833 , H04B10/1125 , H04B10/1141
摘要： A packaged micromirror assembly is disclosed. The assembly includes a micromirror (70) formed of a lower element (60) having a central mounting portion (63) surrounded by an intermediate gimbal portion and a frame portion (61). A magnet standoff (68) is attached to the central mounting portion (63) and an upper mirror surface (65) is attached to the magnet standoff (68). The micromirror (70) may be packaged into a body with coil drivers. A magnetic field generated by the coil drivers applies a torque to the magnet standoff (68) causing it to rotate; because of silicon hinges in the lower element (60), the upper mirror (65) can rotate in two axes.
摘要翻译：公开了一种封装的微镜组件。组件包括由下部元件（60）形成的微反射镜（70），所述下部元件（60）具有由中间万向节部分和框架部分（61）包围的中心安装部分（63）。磁体支座（68）安装在中心安装部分（63）上，并且上镜面（65）安装在磁体支座（68）上。微镜（70）可以用线圈驱动器封装在主体中。由线圈驱动器产生的磁场向磁体支座施加扭矩，使其转动; 由于下部元件（60）中的硅铰链，上反射镜（65）可以在两个轴线上旋转。

56. 发明公开

EP1093003A3 Micro-electro-mechanical optical device 有权
标题翻译：微光学设备Elektromekanische
公开(公告)号：EP1093003A3
公开(公告)日：2001-05-02
申请号：EP00307182.6
申请日：2000-08-21
申请人： LUCENT TECHNOLOGIES INC.
发明人： Aksyuk, Vladimir Anatolyevich , Bishop, David John
IPC分类号： G02B26/08
CPC分类号： G02B26/0866 , B81B3/004 , B81B3/0062 , B81B7/0003 , B81B2201/042 , G02B26/0841
摘要： A method for pivoting an optical device about one or more axes thereof is disclosed. Springs couple the optical device to the micro-electro-mechanical structure. A portion of the springs are fastened on the micro-electro-mechanical structure. Fastening the portion of each spring on the electro-mechanical structure prevents the springs from moving the optical device in a translational direction when such optical device pivots about the one or more axes.

57. 发明公开

EP1093003A2 Micro-electro-mechanical optical device 有权
标题翻译：微电子机械光学器件
公开(公告)号：EP1093003A2
公开(公告)日：2001-04-18
申请号：EP00307182.6
申请日：2000-08-21
申请人： LUCENT TECHNOLOGIES INC.
发明人： Aksyuk, Vladimir Anatolyevich , Bishop, David John
IPC分类号： G02B26/08
CPC分类号： G02B26/0866 , B81B3/004 , B81B3/0062 , B81B7/0003 , B81B2201/042 , G02B26/0841
摘要： A method for pivoting an optical device about one or more axes thereof is disclosed. Springs couple the optical device to the micro-electro-mechanical structure. A portion of the springs are fastened on the micro-electro-mechanical structure. Fastening the portion of each spring on the electro-mechanical structure prevents the springs from moving the optical device in a translational direction when such optical device pivots about the one or more axes.
摘要翻译：公开了一种用于围绕其一个或多个轴枢转光学装置的方法。弹簧将光学器件耦合到微电子机械结构。一部分弹簧固定在微电子机械结构上。当这种光学装置围绕所述一个或多个轴线枢转时，将所述每个弹簧的所述部分紧固在所述机电结构上防止所述弹簧沿平移方向移动所述光学装置。

58. 发明公开

EP0924763A2 Self-assembling micro-mechanical device 有权
标题翻译： Einrichtung的Selbstanordnende mikromechanische
公开(公告)号：EP0924763A2
公开(公告)日：1999-06-23
申请号：EP98310061.1
申请日：1998-12-08
申请人： LUCENT TECHNOLOGIES INC.
发明人： Aksyuk, Vladimir Anatolyevich , Bishop, David John
IPC分类号： H01L25/00 , H01L23/13 , H01L21/98 , G02B26/00
CPC分类号： B81B3/0062 , B81B3/004 , B81B7/0003 , B81B2201/042 , G02B26/0866
摘要： A self-assembling micron-sized mechanical device is described. The device comprises hinged plates attached to a support. A beam having a first end free to move in an upwardly-directed arc is associated with each hinged plate comprising the device. The beam has a first engagement member, including a first angled edge, disposed at its freely-movable first end. Each hinged plate includes a second engagement member, including a second angled edge. In the unassembled state, at least a portion of the first engagement member lies beneath the second engagement member on the support. Actuation force is applied to the beam by an actuator, the force causing the first end of the beam to lift. As it does so, the first and second angled edges slide over another, and the hinged plate is rotated upwardly about its hinges away from the support. The mechanical advantage provided by the angled edges allows a hinged plate to be rotated fully ninety degrees away from the support.
摘要翻译：描述了自组装微米尺寸的机械装置。该装置包括连接到支撑件的铰接板。具有自由在向上指向的弧中移动的第一端的梁与包括该装置的每个铰接板相关联。梁具有第一接合构件，其包括设置在其可自由移动的第一端处的第一成角度的边缘。每个铰接板包括第二接合构件，其包括第二倾斜边缘。在未组装状态下，第一接合构件的至少一部分位于支撑件上的第二接合构件的下方。激励力由致动器施加到梁上，导致梁的第一端抬起的力。如此，第一和第二倾斜的边缘滑过另一个，并且铰接板围绕其铰链远离支撑件向上旋转。由倾斜边缘提供的机械优点允许铰链板从支撑件旋转完全九十度。

59. 发明授权

EP3251789B1 OPEN FRAME, PARALLEL, TWO AXIS FLEXURE STAGE WITH YAW COMPENSATION 有权
公开(公告)号：EP3251789B1
公开(公告)日：2018-12-12
申请号：EP17170839.9
申请日：2017-05-12
申请人： AEROTECH, INC.
发明人： Mosier, Evan
IPC分类号： B23Q1/34 , F16M11/18 , F16M11/04 , B81B3/00
CPC分类号： F16M11/125 , B23Q1/25 , B23Q2210/002 , B81B3/0062 , F16M11/18 , H02N2/0095 , H02N2/043 , H02N2/046
摘要： Disclosed is a stage system comprising at least one flexure frame having a fixed center and movable distal ends configured to displace a tabletop operatively connected thereto along at least one axis of movement and at least two actuators comprising a first actuator and a second actuator positioned within the at least one flexure frame. The first actuator is positioned within the at least one flexure frame at a first angle of deflection from at least one beam of the at least one flexure frame and the second actuator is positioned within the at least one flexure frame at a second angle of deflection from the at least one beam. The at least two actuators are configured to produce a compensating displacement to offset yaw error as the at least two actuators expand from a contracted first position to an expanded second position.

60. 发明授权

EP2902358B1 ELECTROSTATICALLY DRIVEN MEMS DEVICE, IN PARTICULAR ROTATABLE MICROMIRROR 有权转让
公开(公告)号：EP2902358B1
公开(公告)日：2018-09-26
申请号：EP15153380.9
申请日：2015-01-30
申请人： STMicroelectronics S.r.l.
发明人： Carminati, Roberto , Conti, Sebastiano
IPC分类号： B81B3/00 , G02B26/08
CPC分类号： B81B3/0062 , B81B3/0043 , B81B7/008 , B81B2201/018 , B81B2201/033 , B81B2201/042 , B81B2201/045 , B81B2203/058 , G02B26/0841 , G03B21/142 , G03B21/2033 , G03B21/28
摘要： The MEMS device has a suspended mass (31) supported via a pair of articulation arms (32) by a supporting region (33). An electrostatic driving system (36), coupled to the articulation arms (32), has mobile electrodes (38) and fixed electrodes (39) that are coupled to each other. The electrostatic driving system is formed by two pairs of actuation assemblies (36), arranged on opposite sides of a respective articulation arm (32) and connected to the articulation arm through connection elements (30). Each actuation assembly (36) extends laterally to the suspended mass (31) and has an auxiliary arm (37) carrying a respective plurality of mobile electrodes (38). Each auxiliary arm is parallel to the articulation arms (32). The connection elements (30) may be rigid or formed by linkages.

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