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    • 6. 发明公开
    • Anchorless electrostatically activated micro electromechanical system switch
    • Haltlos elektrostatisch aktiviertes mikroelektromechanisches Schaltsystem
    • EP1489639A1
    • 2004-12-22
    • EP03026904.7
    • 2003-11-24
    • Northrop Grumman Corporation
    • Yip, David
    • H01H59/00G02B26/08
    • G02B26/0841B81B5/00B81B2201/018H01H9/40H01H59/0009H01H2001/0078
    • A micro electromechanical system (MEMS) switch (10) includes a substrate (12) and a stress free beam (14) disposed above the substrate (12). The stress free beam (14) is provided within first and second platforms (16, 18) to limit displacement of the stress free beam (14) in directions that are not substantially parallel to the substrate (12). A set of one or more control pads (20) is disposed in a vicinity of a first lengthwise side (22) of the stress free beam (14) for creating a potential on the first lengthwise side (22) of the stress free beam (14). The stress free beam (14) is displaceable in directions substantially parallel to the substrate (12) in accordance with the potential for providing a signal path.
    • 微机电系统(MEMS)开关(10)包括衬底(12)和设置在衬底(12)上方的无应力束(14)。 无应力梁(14)设置在第一和第二平台(16,18)内,以限制无应力梁(14)在基本上不平行于基板(12)的方向上的位移。 一组一个或多个控制焊盘(20)设置在无应力梁(14)的第一纵向侧(22)附近,用于在无应力梁的第一纵向侧(22)上产生电位( 14)。 根据提供信号路径的可能性,无应力束(14)可在基本上平行于衬底(12)的方向上移位。
    • 10. 发明公开
    • BIDIRECTIONAL MEMS DRIVING ARRANGEMENT
    • BIDIREKTIONALE MEMS ANTRIEBSANORDNUNG
    • EP2959571A4
    • 2016-12-07
    • EP13870003
    • 2013-12-27
    • TIMEX GROUP USA INC
    • STOTZ GERHARD
    • B81B5/00H02N2/00H02N2/12
    • F16H1/32B81B5/00B81B2203/056
    • A micro-electromechanical system (MEMS) driving arrangement comprising a driven wheel comprising (n) teeth about an outer periphery thereof, an actuator ring around the driven wheel, itself comprising (n)+(x) teeth about an inner periphery thereof, wherein the (n)+(x) teeth of the actuator ring progressively engage and disengage subsets of the (n) teeth of the driven wheel; a driving actuation assembly, coupled to the actuator ring, for driving the actuator ring in a hysteresis-type motion so as to cause rotation of the driven wheel, wherein after one full cycle of engagements and disengagements between selective subsets of the (n) teeth of the driven wheel with selective subsets of the (n)+(x) teeth of the actuator ring, the driven wheel rotates by (x) teeth corresponding to [(360)(x)/(n)]°.
    • 一种微机电系统(MEMS)驱动装置,包括从其轮周围包括(n)齿的从动轮,围绕从动轮的致动器环,其自身在其内周围包括(n)+(x)个齿,其中 致动器环的(n)+(x)齿逐渐地接合和分离从动轮的(n)个齿的子集; 驱动致动组件,其联接到致动器环,用于以滞后型运动驱动致动器环,以便引起从动轮的旋转,其中在(n)个齿的选择性子集之间的一个完整周期的接合和分离之后, 由驱动环的(n)+(x)齿的选择性子集组成的从动轮,从动轮旋转(x)对应于[(360)(x)/(n)]°的齿。