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41. 发明公开

EP3465236A1 DISPOSITIF DE DETECTION CAPACITIVE A GARDE NULLE 有权转让
公开(公告)号：EP3465236A1
公开(公告)日：2019-04-10
申请号：EP17723638.7
申请日：2017-04-25
申请人： Fogale Nanotech
发明人： NEEL, Christian , OSSART, Frédéric , LEGROS, Eric , ROZIERE, Didier
IPC分类号： G01R27/26 , G06F3/044

42. 发明公开

EP3434427A1 ROBOT MUNI DE MOYENS DE DÉTECTION CAPACITIFS ET DE PAROIS RÉFÉRENCÉES À UN POTENTIEL DE GARDE 有权转让
公开(公告)号：EP3434427A1
公开(公告)日：2019-01-30
申请号：EP18181595.2
申请日：2018-07-04
申请人： Fogale Nanotech
发明人： ROZIERE, Didier , OSSART, Frédéric
IPC分类号： B25J13/08 , B25J19/02 , B25J19/06
摘要： La présente invention concerne un robot (200) comprenant :
- pour au moins une sous-partie (106,108) au moins une électrode de mesure,
- au moins un moyen de polarisation électrique pour polariser ladite au moins une électrode de mesure (118) à un premier potentiel électrique alternatif, et
caractérisé en ce que ledit au moins un moyen de polarisation est en outre agencé pour polariser au moins une partie électriquement conductrice de la paroi externe (102 1 -116 1 ) d'au moins une sous-partie (102-116), à un potentiel électrique alternatif (V G ), dit de garde, identique ou sensiblement identique audit premier potentiel à ladite fréquence de travail.

43. 发明授权

EP2462418B1 CAPTEUR DE PRESSION CAPACITIF INTEGRANT UNE MESURE DE TEMPERATURE COMPATIBLE AVEC LES MILIEUX CHAUDS 有权转让
标题翻译：电容式压力传感器，包括温度测量功能，适合热环境
公开(公告)号：EP2462418B1
公开(公告)日：2018-01-17
申请号：EP10762734.1
申请日：2010-08-06
申请人： Fogale Nanotech
发明人： ROZIERE, Didier
IPC分类号： G01L9/00 , G01L9/12 , G01L9/04 , G01B7/02
CPC分类号： G01L9/0072 , G01D5/24 , G01D21/02 , G01L9/125

44. 发明公开

EP3198220A1 DISPOSITIF ET PROCEDE DE PROFILOMETRIE DE SURFACE POUR LE CONTROLE DE WAFERS EN COURS DE PROCESS 有权转让
公开(公告)号：EP3198220A1
公开(公告)日：2017-08-02
申请号：EP15778220.2
申请日：2015-09-18
申请人： Fogale Nanotech
发明人： FRESQUET, Gilles
IPC分类号： G01B11/24 , G01B9/02 , G01N21/95 , H01L21/66 , G01N21/956
CPC分类号： G01B11/2441 , G01B9/0203 , G01B11/303 , G01B21/30 , G01B2210/56 , G01N21/9501 , G01N2021/8841 , H01L22/12
摘要： The present invention relates to a device or apparatus for carrying out shape measurements on a first surface (13) of a wafer (12) relative to the structures (14) present under said first surface (13), which comprises (i) profilometry means (10) arranged to carry out the shape measurements on said first surface (13) of the wafer (12) according to at least one measurement field; (ii) imaging means (11) facing said profilometry means (10) and arranged to acquire a reference image of said structures (14) on or through a second surface of the wafer (12) opposite to the first surface(13) according to at least one imaging field; said profilometry means (10) and said imaging means (11) being arranged such that the measurement and the imaging fields are position-referenced in a common frame of reference (15). The invention also relates to a method implemented in said device or apparatus.
摘要翻译：本发明涉及一种用于在晶片（12）的第一表面（13）上相对于存在于所述第一表面（13）下方的结构（14）进行形状测量的装置或设备，其包括（i）轮廓测量装置（10），布置成根据至少一个测量场在晶片（12）的所述第一表面（13）上进行形状测量; （ii）成像装置（11），面对所述轮廓测定装置（10）并且被布置为根据以下公式获取在所述晶片（12）的与所述第一表面（13）相反的第二表面上或通过所述结构至少一个成像场; 所述轮廓测量装置（10）和所述成像装置（11）被布置成使得测量和成像场在公共参考系（15）中被位置参考。本发明还涉及在所述设备或装置中实施的方法。

45. 发明公开

EP3155376A1 PROCEDE DE SUIVI TEMPS REEL DE L'ETAT DE FONCTIONNEMENT D'UN CAPTEUR CAPACITIF 有权转让
标题翻译：薇薇儿ZUR ECHTZEITVERFOLGUNG DES BETRIEBSZUSTANDES EINES KAPAZITIVEN SENSORS
公开(公告)号：EP3155376A1
公开(公告)日：2017-04-19
申请号：EP15731862.7
申请日：2015-06-10
申请人： Fogale Nanotech
发明人： NEEL, Christian , BILLIARD, Nicolas
IPC分类号： G01D5/24
CPC分类号： G01R31/028 , G01D5/24 , G01R27/26 , G01R27/2605 , G01R31/016
摘要： The invention relates to a method for real-time tracking of the operational status of a capacitive sensor mountable onto a rotatable machine and connected to an electronic measurement module via a high-frequency transmission line. Said method includes the steps of: generating, within the electronic module, a signal of conductance compensation for interference from the transmission line and the sensor; generating, within the electronic module, a signal of capacitance compensation for the transmission line and the sensor; sampling a signal representing the capacitance compensation and a signal representing the conductance compensation such as to determine an operation point of the sensor; and analyzing the operation point so as to verify if it is located in a predetermined area.
摘要翻译：本发明涉及一种用于实时跟踪可安装到可旋转机器上并通过高频传输线连接到电子测量模块的电容式传感器的操作状态的方法。所述方法包括以下步骤：在所述电子模块内产生用于来自所述传输线和所述传感器的干扰的电导补偿信号; 在电子模块内产生传输线和传感器的电容补偿信号; 对表示电容补偿的信号进行采样，以及表示电导补偿的信号，以确定传感器的操作点; 并分析操作点，以验证其是否位于预定区域中。

46. 发明公开

EP2997455A1 DISPOSITIF ET PROCEDE D'INTERFACE DE COMMANDE CAPACITIVE ADAPTE A LA MISE EN OEUVRE D'ELECTRODES DE MESURES FORTEMENT RESISTIVES 审中-公开
标题翻译：电容式控制接口的设备和方法实现测量电极电阻率高
公开(公告)号：EP2997455A1
公开(公告)日：2016-03-23
申请号：EP14721224.5
申请日：2014-04-09
申请人： Fogale Nanotech
发明人： ROZIERE, Didier
IPC分类号： G06F3/044 , G06F3/041
CPC分类号： G06F3/044 , G06F3/0416 , G06F2203/04101 , G06F2203/04107
摘要： The present invention relates to an interface device for controlling actions of at least one object of interest, comprising (i) a detection surface (4) provided with a plurality of capacitive‑measurement electrodes (5), (ii) electronic and processing means comprising excitation means able to polarize said measurement electrodes (5) to an alternating electrical excitation potential, and measurement means able to measure a capacitive coupling between at least one measurement electrode (5) and at least one object of interest, (iii) guard elements (6) made of an electrically conducting material which are polarized to an alternating electrical guard potential substantially identical to said electrical excitation potential, (iv) electrical linking tracks (7) disposed at least in part on said detection surface (4), in which device the excitation means are arranged in such a way as to generate an electrical excitation potential with an excitation frequency low enough for the measurement electrodes (5) coupled capacitively to at least one object of interest and their linking track (7) to have an electrical impedance at said excitation frequency whose resistive part is much lower than the modulus of the reactive part. The invention also relates to an apparatus and a method implemented in this device or this apparatus.

47. 发明公开

EP2981879A1 DISPOSITIF POUR INTERAGIR, SANS CONTACT, AVEC UN APPAREIL ÉLECTRONIQUE ET/OU INFORMATIQUE, ET APPAREIL ÉQUIPÉ D'UN TEL DISPOSITIF 有权
标题翻译：装置上使用的电子设备和/或计算机设备非接触式交互和利用这样的装置搭载设备
公开(公告)号：EP2981879A1
公开(公告)日：2016-02-10
申请号：EP14718343.8
申请日：2014-03-28
申请人： Fogale Nanotech
发明人： ROZIERE, Didier , BLONDIN, Christophe
IPC分类号： G06F3/044 , G06F1/16 , H04M1/02
CPC分类号： G06F3/044 , G06F1/1643 , G06F3/0418 , G06F2203/04101 , G06F2203/04106 , H04M1/0216 , H04M2250/22
摘要： The present invention concerns a device (110) for contactless interaction, via at least one control object (116), with an electronic and/or computer apparatus (100), called user apparatus, comprising at least first and second portions (102, 104) which, during use, together form a non-zero angle (108), called user angle, said device (110) comprising: -at least one first detection means (112) for detection, by contactless capacitive technology, of said at least one control object (116) relative to a first control surface (118) defined relative to said first portion (102) of said user apparatus (100), said first detection means (112) comprising a plurality of capacitive electrodes, called measurement electrodes; at least one, and preferably each, of said measurement electrodes being maintained, by a first means (130), called maintaining means, at an AC potential, called guard potential, different from a potential, called ground potential, of said at least one control object (116), and substantially identical to the potential of said measurement electrode. -at least one second means (132), called maintaining means, for maintaining said second portion (104) of said user apparatus (100) at least partially at said guard potential. It also concerns an apparatus (100) comprising such a device (110).

48. 发明公开

EP2888552A1 PROCEDE ET DISPOSITIF POUR CONTROLER LA REVELATION DE STRUCTURES ENTERREES SUR DES OBJETS TELS QUE DES WAFERS 有权转让
标题翻译：方法和设备物品中受控检测LIKE WAFERS结构所含
公开(公告)号：EP2888552A1
公开(公告)日：2015-07-01
申请号：EP13763196.6
申请日：2013-08-20
申请人： Fogale Nanotech
发明人： FRESQUET, Gilles , PERROT, Sylvain
IPC分类号： G01B11/00 , B24B49/12 , G01B11/06 , G01N21/95 , H01L21/66 , H01L21/67
CPC分类号： G06T7/0012 , B24B37/005 , B24B49/12 , G01B9/02091 , G01B11/06 , G01B11/0633 , G01B11/0683 , G01B11/14 , G01N21/9501 , G06T7/0008 , G06T7/001 , G06T2207/10004 , G06T2207/10152 , G06T2207/30148 , H04N5/2256 , H04N7/18
摘要： The present invention relates to an imaging method and device for inspecting for the presence, in an area of an object (20) such as a wafer, of structures (70a, 70b, 70c) enclosed in said object (20), such as vias, employing: an imaging sensor (22); optical imaging means (34) able to produce, on said imaging sensor (22), an image (73, 74) of the object (20) in a field of view; and illuminating means (23, 27) for generating an illuminating beam (25, 30) and lighting said field of view in reflection, characterised in that it comprises steps of: acquiring a first image (73) of the object (20) by illuminating said object (20) with a first illuminating beam (25, 30) the spectral content of which is adapted to the nature of the object (20), such that the light of said beam (25, 30) is able essentially to penetrate into said object (20); acquiring a second image (74) of the object (20) by illuminating said object (20) with a second illuminating beam (25, 30) the spectral content of which is adapted to the nature of the object (20), such that the light of said beam (25, 30) is essentially reflected by the surface of the object (20); and comparing said first and second images (73, 74) such as to identify structures (71a) that appear in the first image (73) but not in the second image (74).
摘要翻译：提供了一种用于在物体像的晶片检查是否有存在下，在，封闭结构，：如通孔，采用成像的方法和设备：成像传感器; 在光学成像器能够产生，在成像传感器的视场中，以对象图像; 和照明器用于在照明光束产生和反射照明的视场，其中包括：通过照射具有第一照明光束angepasst给对象的对象获取所述对象的第一图像，检测所做的光束的光穿透所述对象 ; 通过照射具有第二照射光束angepasst给对象的对象获取所述对象的第二图像，并检测的光束的光被所述物体的表面反射的光; 和比较第一和第二图像，以确定结构也出现在第一幅图像，但不是在第二图像。

49. 发明公开

EP4433792A1 PROCÉDÉ D'OBTENTION D'UN OUTIL DE CARACTÉRISATION GÉOMÉTRIQUE D'UN OBJECTIF OPTIQUE À FABRIQUER 审中-实审
公开(公告)号：EP4433792A1
公开(公告)日：2024-09-25
申请号：EP22818355.4
申请日：2022-11-17
申请人： Fogale Nanotech
发明人： LEGROS, Eric , PETITGRAND, Sylvain , PORQUE, Jérôme
IPC分类号： G01M11/02 , B29D11/00
CPC分类号： G01M11/0242 , B29D11/0098 , B29D11/00403

50. 发明公开

EP4433772A1 PROCÉDÉ DE CARACTÉRISATION GÉOMÉTRIQUE D'OBJECTIFS OPTIQUES 审中-实审
公开(公告)号：EP4433772A1
公开(公告)日：2024-09-25
申请号：EP22818356.2
申请日：2022-11-17
申请人： Fogale Nanotech
发明人： LEGROS, Mr Eric , PETITGRAND, Sylvain , PORQUE, Jérôme
IPC分类号： G01B11/24 , G01M11/02 , G01B9/02 , G01B9/0209
CPC分类号： G01M11/0242 , G01B9/0209 , G01B9/02047

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