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    • 2. 发明公开
    • MEASURING INSTRUMENT AND METHOD FOR DETERMINATION OF THE PROPERTIES OF AN ITEM AND ITS SURFACE
    • 仪表和方法确定物件及其表面的特性
    • EP2486392A4
    • 2017-01-04
    • EP10821623
    • 2010-10-07
    • FOCALSPEC OY
    • NIEMELÄ KARRIKERÄNEN HEIMO
    • G01B11/06G01N21/41G01N21/57
    • G01B11/0633G01B11/065G01B2210/50G01N21/41G01N21/57
    • A measurement device for the determination of the characteristics of the object's surface by means of the optical radiation, wherein a measurement device comprises an optical radiation source and a detector to receive the radiation reflected from the surface being measured. In addition, a measurement device comprises an emitted optical radiation processing unit, which is adjusted to split optical radiation emitted by an optical source into separate wavelengths and to direct said separate wavelengths to the object being measured in a direction, that differs from the normal of the surface being measured so, that at least the shortest and the longest wavelengths of said wavelengths are focused on different halves and different heights of the measured object's surface, in the direction of the normal of the surface being measured. In addition, a measurement device comprises a reflected optical radiation processing unit, which is adjusted to receive an optical radiation reflected from the measured object at least in the direction of a specular reflection, which differs from the normal of the surface being measured, and to direct received optical radiation to said detector. Still further, the measurement device is adjusted to analyze an electric signal produced by the detector and proportional to the intensity of the radiation focused thereto, and to further determine a surface gloss (gloss degree) and/or thickness characteristic property of the measured object, based on the intensity of its wavelength, the focus point of which was located on the measured surface, and which wavelength was the strongest reflected from that point to the detector in the specular geometry.
    • 对的对象的表面的特性的确定由所述光辐射的手段,worin光辐射源和检测器的测量装置包括用于接收辐射的测量装置从所述表面被测量反射。 另外,被调整的测量装置发射的光辐射处理单元包括,全部以在光源分割由发射的光辐射成单独的波长,并引导所述分离波长的对象被测量的方向上,从正常的那样而异 表面被测量所以没有至少所述的波长的最短和最长的波长集中在不同的半部与被测物体表面的不同高度,在正常的表面的方向测量的。 此外,测量设备包括被调整以接收的光辐射从至少一个镜面反射,其从正常的表面的不同的方向上的测量对象物反射的被测量的反射光辐射处理单元,全部和向 直接接收到的光辐射到所述检测器。 更进一步地,所述测量装置被调整来分析由所述检测器和比例产生的聚焦到其上的辐射的强度的电信号,和つweiterer确定性矿的表面光泽度(光泽度),和/或测量对象物的厚度特征性质, 基于其波长的强度,其中聚焦点位于被测表面上,并且其波长从做点在镜面几何形状检测器,其最强的反射。
    • 5. 发明公开
    • Apparatus and method for measuring the dimensions of 1-dimensional and 0-dimensional nanostructures in real-time during epitaxial growth
    • 1维器件和方法,用于在外延生长过程中测量的实时的尺寸和0维纳米结构
    • EP2693271A1
    • 2014-02-05
    • EP12199125.1
    • 2012-12-21
    • LayTec AG
    • Anttu, NicklasHeurlin, MagnusBorgström, MagnusSamuelson, LarsXu, HongqiKaspari, Christian
    • G03F7/20B82Y35/00G01B11/02G01B11/06
    • C30B25/16B82Y35/00G01B11/02G01B11/0633G01B2210/56
    • The present invention relates to an apparatus and a method for measuring the dimensions of 1-dimensional and 0-dimensional nanostructures on semiconductor substrates in real-time during epitaxial growth.
      The method includes either assigning a pre-calculated 3D-model from a data base to the sample, wherein pre-calculation of the 3D-model includes calculation of the interference effects of light reflected from the front and back interfaces of the nano-structure and calculation of the interference effects due to superposition of neighbouring wave-fronts reflected from the nano-structure area and wave-fronts reflected from the substrate area between the nano-structures; or calculating a 3D-model of the sample using the measured optical reflectances of the plurality of different measuring positions of the sample, wherein calculation of the 3D-model includes calculation of the interference effects of light reflected from the front and back interfaces of the nano-structure and calculation of the interference effects due to superposition of neighbouring wave-fronts reflected from the nano-structure area and wave-fronts reflected from the substrate area between the nano-structures.
    • 本发明涉及的装置和外延生长期间测量的一维和0维纳米结构的实时半导体基板上的尺寸的方法。 该方法包括任一分配从数据的基础上预先计算的3D模型到样品中,worin 3D模型的预先计算包括从所述纳米结构的前部和后部界面反射的光的干涉效果的计算和 的干涉效应由于相邻波前叠加计算从纳米结构区域的反射和波前从纳米结构之间的面积基板反射的光; 或计算样品的使用样本的不同测量位置的多个测量的光反射率的3D模型,worin 3D模型的计算包括从纳米的正面和背面界面反射的光的干涉效果计算 - 结构和的干涉效应计算由于相邻波前叠加从纳米结构区域的反射和波前从纳米结构之间的面积基板反射。
    • 9. 发明公开
    • METHOD AND DEVICE FOR DETERMINING THE THICKNESS AND CONCENTRICITY OF A LAYER APPLIED TO A CYLINDRICAL BODY
    • 方法和设备,用来确定厚度和同心层上的圆柱体
    • EP0792438A1
    • 1997-09-03
    • EP95937290.0
    • 1995-11-15
    • TELEFONAKTIEBOLAGET LM ERICSSON
    • KRAHBICHLER, ErikBORAK, Georges
    • G01B11G02B6
    • G01B11/0633
    • In the determination of deviation from a concentric position for a protective polyimide coating disposed on an optical fiber (1) the absorption of light in the coating is used. A light source such as a laser (9) provides a light ray which is split by a beamsplitter (11) in two light rays. By means of suitably placed mirrors (15, 17) the light rays are guided to hit two opposite sides of the fiber (1) at oblique and equal incidence angles to the longitudinal direction of the fiber (1). The light rays hit the fibers at positions which are a little displaced in the longitudinal direction of the fiber in order to prevent wrong light rays from hitting the detectors (13, 19) which receive the reflected light. The detectors provide signals representing the intensity of the reflected light to a subtraction circuit which forms the difference of the signals from the detectors (13, 19). The different signal is then a measure of the concentricity error of the coating. A simple method and device are obtained in this way which can also be used on-line in the determination of concentricity in the case where the coating is extruded in a drawing tower where the fiber is produced. Absolute determinations of the thickness of a coating can also be made by making a measurement on a fiber having a calibrated coating.